{"id":"https://openalex.org/W4299950165","doi":null,"title":"DEVICE FOR CARRYING OUT A DEPOSIT OF PARTICLES ON A SUBSTRATE AND DEPOSITION METHOD USING SUCH A DEVICE","display_name":"DEVICE FOR CARRYING OUT A DEPOSIT OF PARTICLES ON A SUBSTRATE AND DEPOSITION METHOD USING SUCH A DEVICE","publication_year":2015,"publication_date":"2015-01-01","ids":{"openalex":"https://openalex.org/W4299950165"},"language":"en","primary_location":{"id":"pmh:oai:HAL:hal-01905042v1","doi":null,"is_oa":false,"landing_page_url":"https://univ-grenoble-alpes.hal.science/hal-01905042","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"France, Patent n\u00b0 : IPC8 Class: AB05D112FI USPC Class: 4284111 Patent application number: 20150321216. 2015","raw_type":"info:eu-repo/semantics/patent"},"volume":null,"type":"other","is_traditional":false,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Picard, E.","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Picard, E.","raw_affiliation_strings":["Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives","institution_ids":["https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113730655","display_name":"Julien Cordeiro","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cordeiro, J.","raw_affiliation_strings":["Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000722049","display_name":"K. Berton","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Berton, K.","raw_affiliation_strings":["Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105309581","display_name":"D. Peyrade","orcid":"https://orcid.org/0000-0003-2232-4762","observed_orcids":["https://orcid.org/0000-0003-2232-4762"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Peyrade, D.","raw_affiliation_strings":["Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071547819","display_name":"M. Zelsmann","orcid":"https://orcid.org/0000-0002-7619-4871","observed_orcids":["https://orcid.org/0000-0002-7619-4871"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Zelsmann, M.","raw_affiliation_strings":["Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.4805000126361847,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.4805000126361847,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.05790000036358833,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11651","display_name":"Inhalation and Respiratory Drug Delivery","score":0.04659999907016754,"subfield":{"id":"https://openalex.org/subfields/2740","display_name":"Pulmonary and Respiratory Medicine"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/particle-deposition","display_name":"particle deposition","score":0.9789999723434448},{"id":"https://openalex.org/keywords/substrate","display_name":"substrate","score":0.8700000047683716},{"id":"https://openalex.org/keywords/deposition-techniques","display_name":"deposition techniques","score":0.8029999732971191}],"concepts":[{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.7565180063247681},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.7314257025718689},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5336616039276123},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4306759834289551},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3732924461364746},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3488767147064209},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.1860475242137909},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16010770201683044},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"pmh:oai:HAL:hal-01905042v1","doi":null,"is_oa":false,"landing_page_url":"https://univ-grenoble-alpes.hal.science/hal-01905042","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"France, Patent n\u00b0 : IPC8 Class: AB05D112FI USPC Class: 4284111 Patent application number: 20150321216. 2015","raw_type":"info:eu-repo/semantics/patent"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4298227838","https://openalex.org/W7030116773","https://openalex.org/W4405665679","https://openalex.org/W2730422138","https://openalex.org/W4233622308","https://openalex.org/W4239242333","https://openalex.org/W7001954984","https://openalex.org/W7002266519","https://openalex.org/W7067738844","https://openalex.org/W1537105721"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-25T09:29:13.331239","created_date":"2022-10-03T00:00:00"}