{"id":"https://openalex.org/W4296980286","doi":null,"title":"Plasma wall interaction in H2 plasma processes","display_name":"Plasma wall interaction in H2 plasma processes","publication_year":2014,"publication_date":"2014-05-12","ids":{"openalex":"https://openalex.org/W4296980286"},"language":"en","primary_location":{"id":"pmh:oai:HAL:hal-01798518v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-01798518","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Plasma Etch and Strip in Microelectronics (PESM), 6th International Workshop, May 2014, grenoble, France","raw_type":"info:eu-repo/semantics/conferenceObject"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051842697","display_name":"J\u00e9r\u00f4me Dubois","orcid":"https://orcid.org/0009-0001-1872-5603","observed_orcids":["https://orcid.org/0009-0001-1872-5603"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Dubois, J","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074822583","display_name":"N. Poss\u00e9m\u00e9","orcid":"https://orcid.org/0000-0003-4659-9488","observed_orcids":["https://orcid.org/0000-0003-4659-9488"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Posseme, N.","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105361169","display_name":"G. Cunge","orcid":"https://orcid.org/0000-0002-3523-7994","observed_orcids":["https://orcid.org/0000-0002-3523-7994"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cunge, G.","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113519920","display_name":"Eddy Latu-Romain","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Latu-Romain, E.","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113627775","display_name":"L. Vallier","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Vallier, L.","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101995126","display_name":"O. Joubert","orcid":"https://orcid.org/0000-0003-3374-1481","observed_orcids":["https://orcid.org/0000-0003-3374-1481"]},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Joubert, O.","raw_affiliation_strings":["LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM - Laboratoire des technologies de la micro\u00e9lectronique (LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9 - France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I4210150049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.35982242,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.024700000882148743,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10592","display_name":"Fusion materials and technologies","score":0.006099999882280827,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/plasma-wall-interaction","display_name":"plasma-wall interaction","score":0.9810000061988831},{"id":"https://openalex.org/keywords/hydrogen-plasma","display_name":"hydrogen plasma","score":0.9589999914169312},{"id":"https://openalex.org/keywords/plasma-processing","display_name":"plasma processing","score":0.6690000295639038}],"concepts":[{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.7347595691680908},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3916018009185791},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2169000208377838},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.06475874781608582}],"mesh":[],"locations_count":1,"locations":[{"id":"pmh:oai:HAL:hal-01798518v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-01798518","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Plasma Etch and Strip in Microelectronics (PESM), 6th International Workshop, May 2014, grenoble, France","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4296979407","https://openalex.org/W4297567277","https://openalex.org/W4318718117","https://openalex.org/W4297454531","https://openalex.org/W6986454736","https://openalex.org/W2961705509","https://openalex.org/W2725269638","https://openalex.org/W4392928246","https://openalex.org/W2996660712","https://openalex.org/W7014357128"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2022-09-25T00:00:00"}