{"id":"https://openalex.org/W4294047575","doi":"https://doi.org/10.1088/1361-6528/ac8d12","title":"A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores","display_name":"A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores","publication_year":2022,"publication_date":"2022-08-26","ids":{"openalex":"https://openalex.org/W4294047575","doi":"https://doi.org/10.1088/1361-6528/ac8d12","pmid":"https://pubmed.ncbi.nlm.nih.gov/36027727"},"language":"en","primary_location":{"id":"doi:10.1088/1361-6528/ac8d12","doi":"https://doi.org/10.1088/1361-6528/ac8d12","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6528/ac8d12","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6528/ac8d12/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["arxiv","crossref","datacite","pubmed"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1088/1361-6528/ac8d12/pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061561270","display_name":"Thierno-Moussa Bah","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Thierno-Moussa Bah","raw_affiliation_strings":["STMicroelectronics-850 rue jean Monnet F-38920 Crolles, France","Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics-850 rue jean Monnet F-38920 Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057803615","display_name":"Stanislav Didenko","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Stanislav Didenko","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081681861","display_name":"Di Zhou","orcid":"https://orcid.org/0000-0003-4147-7318","observed_orcids":["https://orcid.org/0000-0003-4147-7318"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Di Zhou","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102481681","display_name":"Tianqi Zhu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Tianqi Zhu","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053480857","display_name":"Hafsa Ikzibane","orcid":"https://orcid.org/0009-0009-4106-9139","observed_orcids":["https://orcid.org/0009-0009-4106-9139"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Hafsa Ikzibane","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107600846","display_name":"S. Monfray","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Stephane Monfray","raw_affiliation_strings":["STMicroelectronics-850 rue jean Monnet F-38920 Crolles, France","STMicroelectronics [Crolles]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics-850 rue jean Monnet F-38920 Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048063495","display_name":"T. Skotnicki","orcid":"https://orcid.org/0000-0001-7573-1201","observed_orcids":["https://orcid.org/0000-0001-7573-1201"]},"institutions":[{"id":"https://openalex.org/I108403487","display_name":"Warsaw University of Technology","ror":"https://ror.org/00y0xnp53","country_code":"PL","type":"education","lineage":["https://openalex.org/I108403487"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","PL"],"is_corresponding":false,"raw_author_name":"Thomas Skotnicki","raw_affiliation_strings":["Warsaw University of Technology, Centre for Advanced Materials and Technologies CEZAMAT, ul. Poleczki 19, 02-822 Warsaw, Poland","Warsaw University of Technology, Faculty of Electronics and Information Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warsaw, Poland","STMicroelectronics [Crolles]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Warsaw University of Technology, Centre for Advanced Materials and Technologies CEZAMAT, ul. Poleczki 19, 02-822 Warsaw, Poland","institution_ids":["https://openalex.org/I108403487"]},{"raw_affiliation_string":"Warsaw University of Technology, Faculty of Electronics and Information Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warsaw, Poland","institution_ids":["https://openalex.org/I108403487"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044875650","display_name":"Emmanuel Dubois","orcid":"https://orcid.org/0000-0002-0347-010X","observed_orcids":["https://orcid.org/0000-0002-0347-010X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Emmanuel Dubois","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","JUNIA","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"JUNIA","institution_ids":["https://openalex.org/I4210116330"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009321740","display_name":"J.F. Robillard","orcid":"https://orcid.org/0000-0002-7170-7535","observed_orcids":["https://orcid.org/0000-0002-7170-7535"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210116330","display_name":"JUNIA","ror":"https://ror.org/02evec030","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210116330"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"Centrale Lille Institut","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Jean-Fran\u00e7ois Robillard","raw_affiliation_strings":["Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","JUNIA","Micro\u00e9lectronique Silicium - IEMN"],"raw_orcid":"https://orcid.org/0000-0002-7170-7535","affiliations":[{"raw_affiliation_string":"Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Micro\u00e9lectronique et de Nanotechnologie, F-59000 Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"raw_affiliation_string":"Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"JUNIA","institution_ids":["https://openalex.org/I4210116330"]},{"raw_affiliation_string":"Micro\u00e9lectronique Silicium - IEMN","institution_ids":["https://openalex.org/I4210123471"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5009321740"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"],"apc_list":{"value":2930,"currency":"USD","value_usd":2930},"apc_paid":null,"fwci":0.2643,"has_fulltext":true,"cited_by_count":5,"citation_normalized_percentile":{"value":0.35113054,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"33","issue":"50","first_page":"505403","last_page":"505403"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11277","display_name":"Thermal properties of materials","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermoelectric-devices","display_name":"thermoelectric devices","score":0.9509999752044678},{"id":"https://openalex.org/keywords/nanopores","display_name":"nanopores","score":0.9710000157356262},{"id":"https://openalex.org/keywords/cmos-compatible-fabrication","display_name":"CMOS-compatible fabrication","score":0.8479999899864197},{"id":"https://openalex.org/keywords/thermoelectric-power-generation","display_name":"thermoelectric power generation","score":0.8180000185966492},{"id":"https://openalex.org/keywords/thermoelectric-cooling","display_name":"thermoelectric cooling","score":0.8450000286102295},{"id":"https://openalex.org/keywords/autonomous-power-generation","display_name":"autonomous power generation","score":0.41100001335144043}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8504283428192139},{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.8141133785247803},{"id":"https://openalex.org/C207365445","wikidata":"https://www.wikidata.org/wiki/Q15020929","display_name":"Thermoelectric materials","level":3,"score":0.6303096413612366},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6124595403671265},{"id":"https://openalex.org/C112625512","wikidata":"https://www.wikidata.org/wiki/Q1091448","display_name":"Seebeck coefficient","level":3,"score":0.6004201173782349},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5635149478912354},{"id":"https://openalex.org/C117127486","wikidata":"https://www.wikidata.org/wiki/Q11569191","display_name":"Thermoelectric generator","level":3,"score":0.5575780868530273},{"id":"https://openalex.org/C172100665","wikidata":"https://www.wikidata.org/wiki/Q7465774","display_name":"Thermal conduction","level":2,"score":0.537890613079071},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5323923826217651},{"id":"https://openalex.org/C24169881","wikidata":"https://www.wikidata.org/wiki/Q186608","display_name":"Phonon","level":2,"score":0.4547530710697174},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.4450480341911316},{"id":"https://openalex.org/C141795571","wikidata":"https://www.wikidata.org/wiki/Q580942","display_name":"Nanopore","level":2,"score":0.4178866147994995},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39044249057769775},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.27511394023895264},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17534878849983215},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.07982423901557922},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1088/1361-6528/ac8d12","doi":"https://doi.org/10.1088/1361-6528/ac8d12","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6528/ac8d12","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6528/ac8d12/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},{"id":"pmid:36027727","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/36027727","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"Journal Article"},{"id":"pmh:oai:arXiv.org:2207.00535","doi":null,"is_oa":true,"landing_page_url":"http://arxiv.org/abs/2207.00535","pdf_url":"https://arxiv.org/pdf/2207.00535","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"pmh:oai:HAL:hal-03766399v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-03766399","pdf_url":"https://hal.science/hal-03766399v1/document","source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Nanotechnology, 2022, 33 (50), pp.505403. ⟨10.1088/1361-6528/ac8d12⟩","raw_type":"info:eu-repo/semantics/article"},{"id":"doi:10.48550/arxiv.2207.00535","doi":"https://doi.org/10.48550/arxiv.2207.00535","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2207.00535","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"doi:10.1088/1361-6528/ac8d12","doi":"https://doi.org/10.1088/1361-6528/ac8d12","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6528/ac8d12","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6528/ac8d12/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.571399986743927}],"study_designs":[],"awards":[{"id":"https://openalex.org/G2544296713","display_name":"Plateforme de traitement laser pour l'\u00e9lectronique flexible multifonctionnelle","funder_award_id":"ANR-11-EQPX-0025","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"},{"id":"https://openalex.org/G4101883579","display_name":"Highly sensitive scanning probes for nanoscale thermal microscopy","funder_award_id":"ANR-16-CE09-0023","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"},{"id":"https://openalex.org/G6290199005","display_name":"Unconventional Principles of ThermoElectric Generation","funder_award_id":"338179","funder_id":"https://openalex.org/F4320338352","funder_display_name":"FP7 Ideas: European Research Council"}],"funders":[{"id":"https://openalex.org/F4320316862","display_name":"Equipex","ror":null},{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"},{"id":"https://openalex.org/F4320338352","display_name":"FP7 Ideas: European Research Council","ror":"https://ror.org/0472cxd90"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4294047575.pdf","grobid_xml":"https://content.openalex.org/works/W4294047575.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W210521316","https://openalex.org/W304941884","https://openalex.org/W1946410300","https://openalex.org/W1974180176","https://openalex.org/W1985791504","https://openalex.org/W1990696031","https://openalex.org/W1994146818","https://openalex.org/W2000181253","https://openalex.org/W2014330532","https://openalex.org/W2014800464","https://openalex.org/W2018798737","https://openalex.org/W2028285928","https://openalex.org/W2030086321","https://openalex.org/W2031267583","https://openalex.org/W2043099268","https://openalex.org/W2047512367","https://openalex.org/W2063799442","https://openalex.org/W2078996162","https://openalex.org/W2097948100","https://openalex.org/W2110428869","https://openalex.org/W2128401319","https://openalex.org/W2132760400","https://openalex.org/W2135010991","https://openalex.org/W2298403338","https://openalex.org/W2512882489","https://openalex.org/W2562489535","https://openalex.org/W2602832786","https://openalex.org/W2897335977","https://openalex.org/W2897848076","https://openalex.org/W2898729794","https://openalex.org/W2900560935","https://openalex.org/W3101392392"],"related_works":["https://openalex.org/W4283818513","https://openalex.org/W4413179689","https://openalex.org/W2322696562","https://openalex.org/W2621895816","https://openalex.org/W2478875378","https://openalex.org/W2942297940","https://openalex.org/W2969939758","https://openalex.org/W4402865548","https://openalex.org/W2060544827","https://openalex.org/W3149544897"],"abstract_inverted_index":{"Abstract":[0],"Herein,":[1],"we":[2,52],"report":[3,113],"the":[4,24,38,44,56,94,114,118],"use":[5],"of":[6,27,88,107,116],"nanostructured":[7],"crystalline":[8],"silicon":[9,105],"as":[10],"a":[11,85],"thermoelectric":[12,18,123],"material":[13],"and":[14,43,60,74],"its":[15],"integration":[16],"into":[17],"devices.":[19],"The":[20,67],"proof-of-concept":[21],"relies":[22],"on":[23],"partial":[25],"suppression":[26],"lattice":[28],"thermal":[29],"conduction":[30],"by":[31],"introducing":[32],"pores":[33],"with":[34,100],"dimensions":[35],"scaling":[36],"between":[37],"electron":[39],"mean":[40,46],"free":[41,47],"path":[42],"phonon":[45,61],"path.":[48],"In":[49],"other":[50],"words,":[51],"artificially":[53],"aimed":[54],"at":[55],"well-known":[57],"\u2018electron":[58],"crystal":[59],"glass\u2019":[62],"trade-off":[63],"targeted":[64],"in":[65],"thermoelectricity.":[66],"devices":[68,99,120],"were":[69],"fabricated":[70],"using":[71,104,117],"CMOS-compatible":[72],"processes":[73],"exhibited":[75],"power":[76,97],"generation":[77],"up":[78],"to":[79,96],"5.5":[80],"mW":[81],"cm":[82],"\u22122":[83],"under":[84],"temperature":[86],"difference":[87],"280":[89],"K.":[90],"These":[91],"numbers":[92],"demonstrate":[93],"capability":[95],"autonomous":[98],"environmental":[101],"heat":[102],"sources":[103],"chips":[106],"centimeter":[108],"square":[109],"dimensions.":[110],"We":[111],"also":[112],"possibility":[115],"developed":[119],"for":[121],"integrated":[122],"cooling.":[124]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2022-09-01T00:00:00"}