{"id":"https://openalex.org/W4255347643","doi":"https://doi.org/10.22215/etd/1987-01356","title":"LPCVD deposition of in-situ boron-doped polysilicon and its use in polysilicon emitter transistors.","display_name":"LPCVD deposition of in-situ boron-doped polysilicon and its use in polysilicon emitter transistors.","publication_year":1987,"publication_date":"1987-01-01","ids":{"openalex":"https://openalex.org/W4255347643","doi":"https://doi.org/10.22215/etd/1987-01356"},"language":"en","primary_location":{"id":"doi:10.22215/etd/1987-01356","doi":"https://doi.org/10.22215/etd/1987-01356","is_oa":true,"landing_page_url":"https://doi.org/10.22215/etd/1987-01356","pdf_url":"http://repository.library.carleton.ca/downloads/ng451h59p","source":{"id":"https://openalex.org/S4306402514","display_name":"Carleton University's Institutional Repository (MacOdrum Library, Carleton University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Carleton University","raw_type":"dissertation"},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://repository.library.carleton.ca/downloads/ng451h59p","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108433697","display_name":"Cheryl M. Maritan","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Cheryl Maritan","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5108433697"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8246999979019165,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8246999979019165,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.06589999794960022,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.061400000005960464,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polycrystalline-silicon","display_name":"polycrystalline silicon","score":0.7279999852180481},{"id":"https://openalex.org/keywords/low-pressure-chemical-vapor-deposition","display_name":"low-pressure chemical vapor deposition","score":0.8659999966621399},{"id":"https://openalex.org/keywords/emitter-doping","display_name":"emitter doping","score":0.3019999861717224},{"id":"https://openalex.org/keywords/silicon-transistors","display_name":"silicon transistors","score":0.4189999997615814}],"concepts":[{"id":"https://openalex.org/C46918542","wikidata":"https://www.wikidata.org/wiki/Q1648344","display_name":"Common emitter","level":2,"score":0.8309711217880249},{"id":"https://openalex.org/C25356406","wikidata":"https://www.wikidata.org/wiki/Q7226935","display_name":"Polysilicon depletion effect","level":5,"score":0.792691707611084},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7316415309906006},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.7143504023551941},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6047773957252502},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.5488593578338623},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.5403203964233398},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5114206671714783},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.40903913974761963},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3277260959148407},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.19993898272514343},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12036487460136414},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10411405563354492},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0633324384689331},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.060646623373031616},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.22215/etd/1987-01356","doi":"https://doi.org/10.22215/etd/1987-01356","is_oa":true,"landing_page_url":"https://doi.org/10.22215/etd/1987-01356","pdf_url":"http://repository.library.carleton.ca/downloads/ng451h59p","source":{"id":"https://openalex.org/S4306402514","display_name":"Carleton University's Institutional Repository (MacOdrum Library, Carleton University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Carleton University","raw_type":"dissertation"},{"id":"pmh:oai:carleton.scholaris.ca:20.500.14718/29409","doi":null,"is_oa":false,"landing_page_url":"https://hdl.handle.net/20.500.14718/29409","pdf_url":null,"source":{"id":"https://openalex.org/S4306402514","display_name":"Carleton University's Institutional Repository (MacOdrum Library, Carleton University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"public-domain","license_id":"https://openalex.org/licenses/public-domain","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"thesis"}],"best_oa_location":{"id":"doi:10.22215/etd/1987-01356","doi":"https://doi.org/10.22215/etd/1987-01356","is_oa":true,"landing_page_url":"https://doi.org/10.22215/etd/1987-01356","pdf_url":"http://repository.library.carleton.ca/downloads/ng451h59p","source":{"id":"https://openalex.org/S4306402514","display_name":"Carleton University's Institutional Repository (MacOdrum Library, Carleton University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Carleton University","raw_type":"dissertation"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4255347643.pdf"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2903936475","https://openalex.org/W2577710034","https://openalex.org/W7062189326","https://openalex.org/W2464226530","https://openalex.org/W1604826780","https://openalex.org/W3196460161","https://openalex.org/W2068447477","https://openalex.org/W6960348336","https://openalex.org/W2469071823","https://openalex.org/W2003792103"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2022-05-12T00:00:00"}