{"id":"https://openalex.org/W4249900842","doi":"https://doi.org/10.1149/ma2019-01/17/1034","title":"Holographic Characterization of Contaminants in CMP Slurries","display_name":"Holographic Characterization of Contaminants in CMP Slurries","publication_year":2019,"publication_date":"2019-05-01","ids":{"openalex":"https://openalex.org/W4249900842","doi":"https://doi.org/10.1149/ma2019-01/17/1034"},"language":"en","primary_location":{"id":"doi:10.1149/ma2019-01/17/1034","doi":"https://doi.org/10.1149/ma2019-01/17/1034","is_oa":false,"landing_page_url":"https://doi.org/10.1149/ma2019-01/17/1034","pdf_url":null,"source":{"id":"https://openalex.org/S4210168594","display_name":"ECS Meeting Abstracts","issn_l":"1091-8213","issn":["1091-8213","2151-2035","2151-2043","2152-8365"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Meeting Abstracts","raw_type":"journal-article"},"volume":null,"type":"conference-abstract","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027599538","display_name":"Fook Chiong Cheong","orcid":"https://orcid.org/0000-0003-3007-3350","observed_orcids":["https://orcid.org/0000-0003-3007-3350"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fook Chiong Cheong","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000410411","display_name":"Juliana Lumer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Juliana Lumer","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067185568","display_name":"Mary Ann Odete","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mary Ann Odete","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060576053","display_name":"Annmarie Winters","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Annmarie Winters","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":null,"display_name":"Laura A. Philips","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Laura A. Philips","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"MA2019-01","issue":"17","first_page":"1034","last_page":"1034"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11897","display_name":"Digital Holography and Microscopy","score":0.8755000233650208,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11897","display_name":"Digital Holography and Microscopy","score":0.8755000233650208,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.09470000118017197,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12092","display_name":"Erosion and Abrasive Machining","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/2302","display_name":"Ecological Modeling"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/holographic-microscopy","display_name":"holographic microscopy","score":0.9929999709129333},{"id":"https://openalex.org/keywords/particle-size-measurement","display_name":"particle size measurement","score":0.6430000066757202},{"id":"https://openalex.org/keywords/particle-composition","display_name":"particle composition","score":0.5849999785423279},{"id":"https://openalex.org/keywords/agglomerates","display_name":"agglomerates","score":0.8849999904632568},{"id":"https://openalex.org/keywords/glass-particles","display_name":"glass particles","score":0.9919999837875366},{"id":"https://openalex.org/keywords/polymeric-particles","display_name":"polymer particles","score":0.8389999866485596},{"id":"https://openalex.org/keywords/oil-droplets","display_name":"oil droplets","score":0.9449999928474426},{"id":"https://openalex.org/keywords/contaminant-detection","display_name":"contamination detection","score":0.8289999961853027}],"concepts":[{"id":"https://openalex.org/C94293008","wikidata":"https://www.wikidata.org/wiki/Q23925154","display_name":"Slurry","level":2,"score":0.8601974248886108},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.7800325155258179},{"id":"https://openalex.org/C129955480","wikidata":"https://www.wikidata.org/wiki/Q1257738","display_name":"Agglomerate","level":2,"score":0.770341157913208},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.7186907529830933},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6740816831588745},{"id":"https://openalex.org/C2778517922","wikidata":"https://www.wikidata.org/wiki/Q7140482","display_name":"Particle (ecology)","level":2,"score":0.6019772887229919},{"id":"https://openalex.org/C187530423","wikidata":"https://www.wikidata.org/wiki/Q7140503","display_name":"Particle size","level":2,"score":0.5159395337104797},{"id":"https://openalex.org/C112570922","wikidata":"https://www.wikidata.org/wiki/Q60528603","display_name":"Contamination","level":2,"score":0.4909985363483429},{"id":"https://openalex.org/C131850264","wikidata":"https://www.wikidata.org/wiki/Q383056","display_name":"Economies of agglomeration","level":2,"score":0.47651588916778564},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.45032161474227905},{"id":"https://openalex.org/C187590223","wikidata":"https://www.wikidata.org/wiki/Q527628","display_name":"Holography","level":2,"score":0.43689605593681335},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3808320462703705},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.3233869969844818},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20738336443901062},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.19781211018562317},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16930285096168518},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.046938180923461914},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1149/ma2019-01/17/1034","doi":"https://doi.org/10.1149/ma2019-01/17/1034","is_oa":false,"landing_page_url":"https://doi.org/10.1149/ma2019-01/17/1034","pdf_url":null,"source":{"id":"https://openalex.org/S4210168594","display_name":"ECS Meeting Abstracts","issn_l":"1091-8213","issn":["1091-8213","2151-2035","2151-2043","2152-8365"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Meeting Abstracts","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4401696664","https://openalex.org/W4406749367","https://openalex.org/W2621638375","https://openalex.org/W3026500118","https://openalex.org/W2144976923","https://openalex.org/W2067117979","https://openalex.org/W4390065031","https://openalex.org/W4399396050","https://openalex.org/W2214478753","https://openalex.org/W2546166775"],"abstract_inverted_index":{"Holographic":[0,30],"Microscopy":[1],"is":[2],"used":[3],"to":[4,36,55],"characterize":[5,59],"sub-visible":[6],"particles":[7,70],"in":[8,27,74],"CMP":[9,76],"nanoparticles":[10,75],"slurries.":[11,29,77],"Results":[12],"of":[13,22,45],"these":[14,46],"studies":[15],"detect":[16],"and":[17,58,71],"identify":[18],"a":[19],"wide":[20],"range":[21],"different":[23],"large":[24],"particle":[25],"contaminants":[26],"nanoparticle":[28],"characterization":[31],"has":[32],"the":[33,38,43,53],"unique":[34],"ability":[35,54],"measure":[37],"composition":[39],"as":[40,42],"well":[41],"size":[44],"contaminants.":[47],"We":[48],"will":[49],"present":[50],"results":[51],"demonstrating":[52],"detect,":[56],"count":[57],"compact":[60],"dense":[61],"agglomerates,":[62,66],"loosely":[63],"packed":[64],"low-density":[65],"glass":[67],"particles,":[68],"polymeric":[69],"oil":[72],"droplets":[73]},"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2022-05-12T00:00:00"}