{"id":"https://openalex.org/W4244574797","doi":"https://doi.org/10.1007/978-90-481-9751-4_100399","title":"MEMS Microphone","display_name":"MEMS Microphone","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W4244574797","doi":"https://doi.org/10.1007/978-90-481-9751-4_100399"},"language":"en","primary_location":{"id":"doi:10.1007/978-90-481-9751-4_100399","doi":"https://doi.org/10.1007/978-90-481-9751-4_100399","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-90-481-9751-4_100399","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Encyclopedia of Nanotechnology","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W4294566107","display_name":"Encyclopedia of Nanotechnology"},"type":"reference-entry","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1335","last_page":"1335"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10860","display_name":"Speech and Audio Processing","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/1711","display_name":"Signal Processing"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-microphone","display_name":"MEMS microphone","score":0.8949999809265137},{"id":"https://openalex.org/keywords/mems-sensors","display_name":"MEMS sensors","score":0.5479999780654907}],"concepts":[{"id":"https://openalex.org/C2778263558","wikidata":"https://www.wikidata.org/wiki/Q46384","display_name":"Microphone","level":3,"score":0.5253985524177551},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.466100811958313},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39905327558517456},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3887050747871399},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.30711179971694946},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16491270065307617},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.08897721767425537},{"id":"https://openalex.org/C157138929","wikidata":"https://www.wikidata.org/wiki/Q570","display_name":"Loudspeaker","level":2,"score":0.027118176221847534}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-90-481-9751-4_100399","doi":"https://doi.org/10.1007/978-90-481-9751-4_100399","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-90-481-9751-4_100399","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Encyclopedia of Nanotechnology","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4249616775","https://openalex.org/W4245972575","https://openalex.org/W4232271490","https://openalex.org/W4242672680","https://openalex.org/W2999861530","https://openalex.org/W2245914915","https://openalex.org/W2347666714","https://openalex.org/W3093931282","https://openalex.org/W6940385388","https://openalex.org/W7125481141"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2022-05-12T00:00:00"}