{"id":"https://openalex.org/W4239364989","doi":"https://doi.org/10.1109/nano.2006.1717004","title":"A Coupled Simulation and Optimization Approach to Nanodevice Fabrication with Minimization of Electrical Characteristics Fluctuation","display_name":"A Coupled Simulation and Optimization Approach to Nanodevice Fabrication with Minimization of Electrical Characteristics Fluctuation","publication_year":2006,"publication_date":"2006-10-30","ids":{"openalex":"https://openalex.org/W4239364989","doi":"https://doi.org/10.1109/nano.2006.1717004"},"language":"en","primary_location":{"id":"doi:10.1109/nano.2006.1717004","doi":"https://doi.org/10.1109/nano.2006.1717004","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nano.2006.1717004","pdf_url":null,"source":{"id":"https://openalex.org/S4363607910","display_name":"IEEE Conference on Nanotechnology (IEEE NANO)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 Sixth IEEE Conference on Nanotechnology","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100346317","display_name":"Yiming Li","orcid":"https://orcid.org/0000-0001-7374-0964","observed_orcids":["https://orcid.org/0000-0001-7374-0964"]},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yiming Li","raw_affiliation_strings":["Department of Communication Engineering, National Chiao Tung University, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Communication Engineering, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113484924","display_name":"Shao-Ming Yu","orcid":"https://orcid.org/0009-0002-8694-3167","observed_orcids":["https://orcid.org/0009-0002-8694-3167"]},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shao-Ming Yu","raw_affiliation_strings":["Department of Computer and Information Science, National Chiao Tung University, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computer and Information Science, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032597626","display_name":"Cheng\u2010Kai Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Cheng-Kai Chen","raw_affiliation_strings":["Department of Computer and Information Science, National Chiao Tung University, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computer and Information Science, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I148366613"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"1","issue":null,"first_page":"12","last_page":"15"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8812999725341797,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8812999725341797,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.09730000048875809,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.003100000089034438,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanodevice-fabrication","display_name":"nanodevice fabrication","score":0.8119999766349792},{"id":"https://openalex.org/keywords/process-parameter-optimization","display_name":"process parameter optimization","score":0.6869999766349792},{"id":"https://openalex.org/keywords/threshold-voltage-fluctuation","display_name":"threshold voltage fluctuation","score":0.9610000252723694},{"id":"https://openalex.org/keywords/tcad-simulation","display_name":"TCAD simulation","score":0.7059999704360962},{"id":"https://openalex.org/keywords/hybrid-intelligent-optimization","display_name":"hybrid intelligent optimization","score":0.9100000262260437},{"id":"https://openalex.org/keywords/65-nm-cmos","display_name":"65 nm CMOS","score":0.9480000138282776}],"concepts":[{"id":"https://openalex.org/C2909374376","wikidata":"https://www.wikidata.org/wiki/Q2726733","display_name":"Nanodevice","level":2,"score":0.790362536907196},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6875365376472473},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6226505041122437},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5839621424674988},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.570064902305603},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.49679163098335266},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.49556291103363037},{"id":"https://openalex.org/C4775677","wikidata":"https://www.wikidata.org/wiki/Q7449393","display_name":"Semiconductor device modeling","level":3,"score":0.48525023460388184},{"id":"https://openalex.org/C147764199","wikidata":"https://www.wikidata.org/wiki/Q6865248","display_name":"Minification","level":2,"score":0.4697815477848053},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.43221762776374817},{"id":"https://openalex.org/C2780077345","wikidata":"https://www.wikidata.org/wiki/Q16891888","display_name":"Spice","level":2,"score":0.43098747730255127},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3019826412200928},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.19621482491493225},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18097707629203796},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1614166498184204},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nano.2006.1717004","doi":"https://doi.org/10.1109/nano.2006.1717004","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nano.2006.1717004","pdf_url":null,"source":{"id":"https://openalex.org/S4363607910","display_name":"IEEE Conference on Nanotechnology (IEEE NANO)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 Sixth IEEE Conference on Nanotechnology","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2010424922","https://openalex.org/W2102110857","https://openalex.org/W2003225455","https://openalex.org/W2008848729","https://openalex.org/W2159223084","https://openalex.org/W71677980","https://openalex.org/W3123651879","https://openalex.org/W4240109339","https://openalex.org/W2031127652","https://openalex.org/W3140757139"],"abstract_inverted_index":{"In":[0],"this":[1,115,135],"paper,":[2],"a":[3,81,103,138],"TCAD-simulation-based":[4],"optimization":[5,23],"methodology":[6,97],"for":[7],"nanoscale":[8],"CMOS":[9,61,106],"device":[10,27,35,53],"fabrication":[11],"is":[12,17,31,56,98],"advanced.":[13],"Electrical":[14],"characteristics":[15,72],"fluctuation":[16,73],"considered":[18,77],"and":[19,28,91,100,112,148],"minimized":[20],"in":[21,65,123],"the":[22,38,66,89,94,118,124,129,143],"process.":[24],"Integration":[25],"of":[26,60,83,88,93,120,145,151],"process":[29,85,146],"simulation":[30],"performed":[32,101],"to":[33,44,51,141],"evaluate":[34],"performances,":[36],"where":[37],"hybrid":[39],"intelligent":[40],"approach":[41,116,136],"enables":[42],"us":[43],"extract":[45,80],"optimal":[46,84],"recipes":[47],"which":[48],"are":[49,64],"subject":[50],"specified":[52],"specification.":[54],"It":[55],"known":[57],"that":[58],"production":[59],"devices":[62],"now":[63],"sub-65":[67],"nm":[68,105],"region;":[69],"therefore,":[70],"electrical":[71],"should":[74],"be":[75],"simultaneously":[76],"when":[78],"we":[79],"set":[82],"parameters.":[86],"Verification":[87],"efficiency":[90],"accuracy":[92],"proposed":[95],"computational":[96],"tested":[99],"on":[102],"65":[104],"device.":[107],"Compared":[108],"with":[109],"realistic":[110],"fabricated":[111],"measured":[113],"data,":[114],"achieves":[117],"performance":[119],"on-target":[121],"design;":[122],"meanwhile,":[125],"it":[126],"significantly":[127],"reduces":[128],"threshold":[130],"voltage":[131],"fluctuation.":[132],"We":[133],"believe":[134],"provides":[137],"novel":[139],"way":[140],"accelerate":[142],"tuning":[144],"parameters":[147],"benefit":[149],"technology":[150],"nanodevices.":[152]},"counts_by_year":[],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2022-05-12T00:00:00"}