{"id":"https://openalex.org/W4231890760","doi":"https://doi.org/10.1007/978-90-481-9751-4_100398","title":"MEMS Fabricated Microwave Devices","display_name":"MEMS Fabricated Microwave Devices","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W4231890760","doi":"https://doi.org/10.1007/978-90-481-9751-4_100398"},"language":"en","primary_location":{"id":"doi:10.1007/978-90-481-9751-4_100398","doi":"https://doi.org/10.1007/978-90-481-9751-4_100398","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-90-481-9751-4_100398","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Encyclopedia of Nanotechnology","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W4294566107","display_name":"Encyclopedia of Nanotechnology"},"type":"reference-entry","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1327","last_page":"1327"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.0052999998442828655,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0044999998062849045,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.9449999928474426},{"id":"https://openalex.org/keywords/microwave-devices","display_name":"microwave devices","score":0.8799999952316284},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"microelectromechanical systems","score":0.8450000286102295},{"id":"https://openalex.org/keywords/microwave-integrated-circuits","display_name":"microwave integrated circuits","score":0.6679999828338623},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"nanotechnology","score":0.45899999141693115}],"concepts":[{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.7927037477493286},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7818121910095215},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5731073021888733},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3968011140823364},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.276302307844162},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.2104739248752594}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-90-481-9751-4_100398","doi":"https://doi.org/10.1007/978-90-481-9751-4_100398","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-90-481-9751-4_100398","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Encyclopedia of Nanotechnology","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4252507019","https://openalex.org/W4253548933","https://openalex.org/W4233994369","https://openalex.org/W4244665121","https://openalex.org/W4214663502","https://openalex.org/W4255285238","https://openalex.org/W2492604236","https://openalex.org/W4234704080","https://openalex.org/W4232470159","https://openalex.org/W4200465896"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2022-05-12T00:00:00"}