{"id":"https://openalex.org/W4200318915","doi":"https://doi.org/10.3390/mi12121511","title":"A Temperature Control Method for Microaccelerometer Chips Based on Genetic Algorithm and Fuzzy PID Control","display_name":"A Temperature Control Method for Microaccelerometer Chips Based on Genetic Algorithm and Fuzzy PID Control","publication_year":2021,"publication_date":"2021-12-04","ids":{"openalex":"https://openalex.org/W4200318915","doi":"https://doi.org/10.3390/mi12121511","pmid":"https://pubmed.ncbi.nlm.nih.gov/34945361","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/8703788"},"language":"en","primary_location":{"id":"doi:10.3390/mi12121511","doi":"https://doi.org/10.3390/mi12121511","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi12121511","pdf_url":"https://www.mdpi.com/2072-666X/12/12/1511/pdf?version=1638754870","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/12/12/1511/pdf?version=1638754870","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003278343","display_name":"Jiaxiao Chen","orcid":"https://orcid.org/0000-0001-8409-7126","observed_orcids":["https://orcid.org/0000-0001-8409-7126"]},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaxiao Chen","raw_affiliation_strings":["State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China"],"raw_orcid":"https://orcid.org/0000-0001-8409-7126","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China","institution_ids":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066978921","display_name":"Qianbo Lu","orcid":"https://orcid.org/0000-0003-4195-7602","observed_orcids":["https://orcid.org/0000-0003-4195-7602"]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I890469752","display_name":"Ministry of Industry and Information Technology","ror":"https://ror.org/0385nmy68","country_code":"CN","type":"government","lineage":["https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Qianbo Lu","raw_affiliation_strings":["Frontiers Science Center for Flexible Electronics (FSCFE), MIIT Key Laboratory of Flexible Electronics (KLoFE), Shaanxi Key Laboratory of Flexible Electronics (KLoFE), Institute of Flexible Electronics (IFE), Ningbo Institute of Northwestern Polytechnical University, Northwestern Polytechnical University, Xi\u2019an 710072, China"],"raw_orcid":"https://orcid.org/0000-0003-4195-7602","affiliations":[{"raw_affiliation_string":"Frontiers Science Center for Flexible Electronics (FSCFE), MIIT Key Laboratory of Flexible Electronics (KLoFE), Shaanxi Key Laboratory of Flexible Electronics (KLoFE), Institute of Flexible Electronics (IFE), Ningbo Institute of Northwestern Polytechnical University, Northwestern Polytechnical University, Xi\u2019an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I890469752"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100773961","display_name":"Jian Yu Bai","orcid":"https://orcid.org/0000-0002-5128-2146","observed_orcids":["https://orcid.org/0000-0002-5128-2146"]},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jian Bai","raw_affiliation_strings":["State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China","institution_ids":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057932394","display_name":"Xiang Rong Xu","orcid":"https://orcid.org/0000-0002-5522-1316","observed_orcids":["https://orcid.org/0000-0002-5522-1316"]},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiang Xu","raw_affiliation_strings":["State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China","institution_ids":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075674109","display_name":"Yuan Yao","orcid":"https://orcid.org/0000-0002-8811-8200","observed_orcids":["https://orcid.org/0000-0002-8811-8200","https://orcid.org/0009-0000-5855-0011"]},"institutions":[{"id":"https://openalex.org/I4210138186","display_name":"Wuhan National Laboratory for Optoelectronics","ror":"https://ror.org/03c9ncn37","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210138186"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuan Yao","raw_affiliation_strings":["Huazhong Institute of Electro-Optics-Wuhan National Lab for Optoelectronics, Wuhan 430074, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong Institute of Electro-Optics-Wuhan National Lab for Optoelectronics, Wuhan 430074, China","institution_ids":["https://openalex.org/I4210138186"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062855968","display_name":"Weidong Fang","orcid":"https://orcid.org/0000-0002-3460-2259","observed_orcids":["https://orcid.org/0000-0002-3460-2259"]},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weidong Fang","raw_affiliation_strings":["State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China","institution_ids":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5066978921","https://openalex.org/A5100773961"],"corresponding_institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391767668","https://openalex.org/I76130692","https://openalex.org/I890469752"],"apc_list":{"value":1800,"currency":"CHF","value_usd":1944},"apc_paid":{"value":1800,"currency":"CHF","value_usd":1944},"fwci":1.3345,"has_fulltext":true,"cited_by_count":21,"citation_normalized_percentile":{"value":0.79425073,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":99},"biblio":{"volume":"12","issue":"12","first_page":"1511","last_page":"1511"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14225","display_name":"Advanced Sensor and Control Systems","score":0.864300012588501,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14225","display_name":"Advanced Sensor and Control Systems","score":0.864300012588501,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.05550000071525574,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10820","display_name":"Fuzzy Logic and Control Systems","score":0.025200000032782555,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/micro-accelerometer","display_name":"micro accelerometer","score":0.9049999713897705},{"id":"https://openalex.org/keywords/temperature-control","display_name":"temperature control","score":0.9290000200271606},{"id":"https://openalex.org/keywords/fuzzy-pid-control","display_name":"fuzzy PID control","score":0.7549999952316284},{"id":"https://openalex.org/keywords/genetic-algorithm","display_name":"genetic algorithm","score":0.699999988079071},{"id":"https://openalex.org/keywords/temperature-compensation","display_name":"temperature compensation","score":0.5590000152587891},{"id":"https://openalex.org/keywords/heating-resistor","display_name":"heating resistor","score":0.6290000081062317},{"id":"https://openalex.org/keywords/transfer-function-estimation","display_name":"transfer function identification","score":0.9229999780654907}],"concepts":[{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.8454619646072388},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6914764046669006},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.64666748046875},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.6119718551635742},{"id":"https://openalex.org/C2780323453","wikidata":"https://www.wikidata.org/wiki/Q7113957","display_name":"Overshoot (microwave communication)","level":2,"score":0.5156337022781372},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.4965086579322815},{"id":"https://openalex.org/C58166","wikidata":"https://www.wikidata.org/wiki/Q224821","display_name":"Fuzzy logic","level":2,"score":0.4802127778530121},{"id":"https://openalex.org/C195975749","wikidata":"https://www.wikidata.org/wiki/Q1475705","display_name":"Fuzzy control system","level":3,"score":0.41313743591308594},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39386531710624695},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.39220908284187317},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3587561845779419},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.32479482889175415},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1613309383392334},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/mi12121511","doi":"https://doi.org/10.3390/mi12121511","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi12121511","pdf_url":"https://www.mdpi.com/2072-666X/12/12/1511/pdf?version=1638754870","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:pubmedcentral.nih.gov:8703788","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8703788","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines (Basel)","raw_type":"Text"},{"id":"pmid:34945361","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34945361","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"Journal Article"},{"id":"pmh:oai:doaj.org/article:161a0af593a2435281e3f7e2918402c5","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/161a0af593a2435281e3f7e2918402c5","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 12, Iss 12, p 1511 (2021)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi12121511","doi":"https://doi.org/10.3390/mi12121511","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi12121511","pdf_url":"https://www.mdpi.com/2072-666X/12/12/1511/pdf?version=1638754870","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G1013230156","display_name":null,"funder_award_id":"TZ2016006","funder_id":"https://openalex.org/F4320336025","funder_display_name":"Science Challenge Project"},{"id":"https://openalex.org/G1895345708","display_name":null,"funder_award_id":"TZ2016006-0502-02","funder_id":"https://openalex.org/F4320336025","funder_display_name":"Science Challenge Project"},{"id":"https://openalex.org/G2472379481","display_name":null,"funder_award_id":"BX20200279","funder_id":"https://openalex.org/F4320335768","funder_display_name":"National Postdoctoral Program for Innovative Talents"},{"id":"https://openalex.org/G2803718689","display_name":null,"funder_award_id":"62175211","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4076257496","display_name":null,"funder_award_id":"31020190QD027","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G5957598458","display_name":null,"funder_award_id":"62004166","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6145922746","display_name":null,"funder_award_id":"202003N4062","funder_id":"https://openalex.org/F4320336025","funder_display_name":"Science Challenge Project"},{"id":"https://openalex.org/G6920492125","display_name":null,"funder_award_id":"202003N4062","funder_id":"https://openalex.org/F4320332587","funder_display_name":"Natural Science Foundation of Ningbo"},{"id":"https://openalex.org/G7235363402","display_name":null,"funder_award_id":"61875173","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320332587","display_name":"Natural Science Foundation of Ningbo","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335768","display_name":"National Postdoctoral Program for Innovative Talents","ror":null},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null},{"id":"https://openalex.org/F4320336025","display_name":"Science Challenge Project","ror":"https://ror.org/03m9a6y90"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4200318915.pdf","grobid_xml":"https://content.openalex.org/works/W4200318915.grobid-xml"},"referenced_works_count":31,"referenced_works":["https://openalex.org/W1789412032","https://openalex.org/W1949955622","https://openalex.org/W2000874318","https://openalex.org/W2010999095","https://openalex.org/W2012060173","https://openalex.org/W2022061958","https://openalex.org/W2033405633","https://openalex.org/W2037231732","https://openalex.org/W2041280856","https://openalex.org/W2043003550","https://openalex.org/W2071286792","https://openalex.org/W2109426336","https://openalex.org/W2134546517","https://openalex.org/W2150669536","https://openalex.org/W2156216918","https://openalex.org/W2157763436","https://openalex.org/W2174374417","https://openalex.org/W2287530299","https://openalex.org/W2305315853","https://openalex.org/W2313891224","https://openalex.org/W2384233550","https://openalex.org/W2496169819","https://openalex.org/W2512741479","https://openalex.org/W2541638406","https://openalex.org/W2572241292","https://openalex.org/W2611513333","https://openalex.org/W2887291463","https://openalex.org/W3005633856","https://openalex.org/W3030231285","https://openalex.org/W3030480862","https://openalex.org/W3142511774"],"related_works":["https://openalex.org/W3049273145","https://openalex.org/W2379008313","https://openalex.org/W2374997510","https://openalex.org/W2389136251","https://openalex.org/W2373134397","https://openalex.org/W2019559401","https://openalex.org/W2354149581","https://openalex.org/W2392805731","https://openalex.org/W2373057043","https://openalex.org/W2380419840"],"abstract_inverted_index":{"External":[0],"temperature":[1,128],"changes":[2],"can":[3,167],"detrimentally":[4],"affect":[5],"the":[6,18,23,36,63,80,84,88,102,108,123,126,132,151,165],"properties":[7],"of":[8,101,134,169],"a":[9,45,50,58,72,76,94,112,135],"microaccelerometer,":[10],"especially":[11],"for":[12],"high-precision":[13],"accelerometers.":[14],"Temperature":[15],"control":[16,31,40,129],"is":[17,91,115],"fundamental":[19],"method":[20,130,154,161],"to":[21,117,122,174],"reduce":[22],"thermal":[24],"effect":[25],"on":[26,49,79],"microaccelerometer":[27,69],"chips,":[28],"although":[29],"high-performance":[30],"has":[32,131],"remained":[33],"elusive":[34],"using":[35],"conventional":[37],"proportional-integral-derivative":[38],"(PID)":[39],"method.":[41,66],"This":[42,159],"paper":[43],"proposes":[44],"modified":[46,103],"approach":[47,166],"based":[48],"genetic":[51,109],"algorithm":[52],"and":[53,75,87,146,155,172],"fuzzy":[54,113],"PID,":[55],"which":[56],"yields":[57],"profound":[59],"improvement":[60],"compared":[61],"with":[62,71],"typical":[64],"PID":[65,104,153],"A":[67],"sandwiched":[68],"chip":[70],"measurement":[73,96],"resistor":[74,78],"heating":[77],"substrate":[81],"serves":[82],"as":[83,162,164],"hardware":[85],"object,":[86],"transfer":[89],"function":[90],"identified":[92],"by":[93],"self-built":[95],"system.":[97],"The":[98],"initial":[99],"parameters":[100],"are":[105],"obtained":[106],"through":[107],"algorithm,":[110],"whereas":[111],"strategy":[114],"implemented":[116],"enable":[118],"real-time":[119],"adjustment.":[120],"According":[121],"simulation":[124],"results,":[125],"proposed":[127],"advantages":[133],"fast":[136],"response,":[137],"short":[138],"settling":[139],"time,":[140],"small":[141,143],"overshoot,":[142],"steady-state":[144],"error,":[145],"strong":[147],"robustness.":[148],"It":[149],"outperforms":[150],"normal":[152],"previously":[156],"reported":[157],"counterparts.":[158],"design":[160],"well":[163],"be":[168],"practical":[170],"use":[171],"applied":[173],"chip-level":[175],"package":[176],"structures.":[177]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":3}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2021-12-31T00:00:00"}