{"id":"https://openalex.org/W406578403","doi":null,"title":"Low temperature deposition SiO 2 films by SAPCVD","display_name":"Low temperature deposition SiO 2 films by SAPCVD","publication_year":2007,"publication_date":"2007-07-23","ids":{"openalex":"https://openalex.org/W406578403","mag":"406578403"},"language":"en","primary_location":{"id":"mag:406578403","doi":null,"is_oa":false,"landing_page_url":"https://dl.acm.org/citation.cfm?id=1348660","pdf_url":null,"source":{"id":"https://openalex.org/S4306419187","display_name":"International Conference on Circuits","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"International Conference on Circuits","raw_type":null},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101476439","display_name":"Hector Ju\u00e1rez","orcid":"https://orcid.org/0000-0001-8058-4189","observed_orcids":["https://orcid.org/0000-0001-8058-4189"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Ju\u00e1rez","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico"],"raw_orcid":"https://orcid.org/0000-0001-8058-4189","affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112861768","display_name":"T. D\u00edaz","orcid":"https://orcid.org/0009-0005-3943-9066","observed_orcids":["https://orcid.org/0009-0005-3943-9066"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. D\u00edaz","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073623018","display_name":"M. Pacio","orcid":"https://orcid.org/0000-0002-4053-9962","observed_orcids":["https://orcid.org/0000-0002-4053-9962"]},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]},{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"M. Pacio","raw_affiliation_strings":["Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#"],"raw_orcid":"https://orcid.org/0000-0002-4053-9962","affiliations":[{"raw_affiliation_string":"Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#","institution_ids":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039666421","display_name":"Enrique Rosendo","orcid":"https://orcid.org/0000-0003-3453-2753","observed_orcids":["https://orcid.org/0000-0003-3453-2753"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"E. Rosendo","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico"],"raw_orcid":"https://orcid.org/0000-0003-3453-2753","affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087972337","display_name":"G. Garc\u0131\u0301a-Salgado","orcid":"https://orcid.org/0000-0002-5276-5641","observed_orcids":["https://orcid.org/0000-0002-5276-5641"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Garc\u0131\u0301a-Salgado","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico"],"raw_orcid":"https://orcid.org/0000-0002-5276-5641","affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014959268","display_name":"M. Rub\u00edn","orcid":"https://orcid.org/0000-0002-2670-0887","observed_orcids":["https://orcid.org/0000-0002-2670-0887"]},"institutions":[{"id":"https://openalex.org/I721619","display_name":"Benem\u00e9rita Universidad Aut\u00f3noma de Puebla","ror":"https://ror.org/03p2z7827","country_code":"MX","type":"education","lineage":["https://openalex.org/I721619"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"M. Rub\u00edn","raw_affiliation_strings":["Facultad Ciencias de la Computaci\u00f3n, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico#TAB#"],"raw_orcid":"https://orcid.org/0000-0002-2670-0887","affiliations":[{"raw_affiliation_string":"Facultad Ciencias de la Computaci\u00f3n, Benem\u00e9rita Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico#TAB#","institution_ids":["https://openalex.org/I721619"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Gerardo Figueroa","orcid":"https://orcid.org/0009-0001-2513-5046","observed_orcids":["https://orcid.org/0009-0001-2513-5046"]},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]},{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Gerardo Figueroa","raw_affiliation_strings":["Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#"],"raw_orcid":"https://orcid.org/0009-0001-2513-5046","affiliations":[{"raw_affiliation_string":"Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#","institution_ids":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110092091","display_name":"Arturo Garc\u00eda","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]},{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Arturo Garc\u00eda","raw_affiliation_strings":["Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#","institution_ids":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060343144","display_name":"Carlos Iv\u00e1n del Valle Morales","orcid":"https://orcid.org/0000-0001-8463-3187","observed_orcids":["https://orcid.org/0000-0001-8463-3187"]},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]},{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Carlos Iv\u00e1n del Valle Morales","raw_affiliation_strings":["Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#"],"raw_orcid":"https://orcid.org/0000-0001-8463-3187","affiliations":[{"raw_affiliation_string":"Ingenier\u00eda El\u00e9ctrica, Secci\u00f3n Electr\u00f3nica del Estado S\u00f3lido, Centro de Investigaci\u00f3n y de Estudios Avanzados del I. P. N., Av. Instituto Polit\u00e9cnico Nacional, M& ...#TAB#","institution_ids":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}]},{"author_position":"last","author":{"id":null,"display_name":"Federico Mora","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Federico Mora","raw_affiliation_strings":["Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro de Investigaci\u00f3n en Dispositivos Semiconductores, Universidad Aut\u00f3noma de Puebla, San Manuel, Puebla, Mexico","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.01265285,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"250","last_page":"254"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.7724999785423279,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.7724999785423279,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.19349999725818634,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.013500000350177288,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-dioxide-thin-films","display_name":"SiO2 thin films","score":0.7990000247955322},{"id":"https://openalex.org/keywords/low-temperature-deposition","display_name":"low-temperature deposition","score":0.9110000133514404},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"plasma-enhanced chemical vapor deposition","score":0.6869999766349792}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6286669969558716},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6074496507644653},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3915093243122101},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.33515724539756775},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.11807829141616821},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10385718941688538},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:406578403","doi":null,"is_oa":false,"landing_page_url":"https://dl.acm.org/citation.cfm?id=1348660","pdf_url":null,"source":{"id":"https://openalex.org/S4306419187","display_name":"International Conference on Circuits","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"International Conference on Circuits","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2013406437"],"related_works":["https://openalex.org/W2600052076","https://openalex.org/W2465080288","https://openalex.org/W3088824680","https://openalex.org/W4234345051","https://openalex.org/W2604572032","https://openalex.org/W2573142224","https://openalex.org/W7099393167","https://openalex.org/W2748869897","https://openalex.org/W2476974992","https://openalex.org/W2988975901"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}