{"id":"https://openalex.org/W384656607","doi":null,"title":"Quality Determination of Laser Scanning in Optical Mask Construction by Modulation Transfer Function","display_name":"Quality Determination of Laser Scanning in Optical Mask Construction by Modulation Transfer Function","publication_year":2015,"publication_date":"2015-03-15","ids":{"openalex":"https://openalex.org/W384656607","mag":"384656607"},"language":"en","primary_location":{"id":"mag:384656607","doi":null,"is_oa":false,"landing_page_url":"https://www.opsi.ir/article-1-865-en.pdf","pdf_url":null,"source":{"id":"https://openalex.org/S4306536487","display_name":"\u0627\u0646\u062c\u0645\u0646 \u0627\u067e\u062a\u06cc\u06a9 \u0648 \u0641\u0648\u062a\u0648\u0646\u06cc\u06a9 \u0627\u06cc\u0631\u0627\u0646","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Optics and Photonics Society of Iran","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011091273","display_name":"Amir Hossein Shahbazi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I23946033","display_name":"University of Tehran","ror":"https://ror.org/05vf56z40","country_code":"IR","type":"education","lineage":["https://openalex.org/I23946033"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"Amir Hossein Shahbazi","raw_affiliation_strings":["University\u00a0of\u00a0Tehran"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University\u00a0of\u00a0Tehran","institution_ids":["https://openalex.org/I23946033"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075435646","display_name":"Khosrow Madani Pour","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I158248296","display_name":"Amirkabir University of Technology","ror":"https://ror.org/04gzbav43","country_code":"IR","type":"education","lineage":["https://openalex.org/I158248296"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"Khosrow Madani Pour","raw_affiliation_strings":["Amirkabir University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Amirkabir University of Technology","institution_ids":["https://openalex.org/I158248296"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113773149","display_name":"A. Koohian","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I23946033","display_name":"University of Tehran","ror":"https://ror.org/05vf56z40","country_code":"IR","type":"education","lineage":["https://openalex.org/I23946033"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"A. Koohian","raw_affiliation_strings":["University\u00a0of\u00a0Tehran"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University\u00a0of\u00a0Tehran","institution_ids":["https://openalex.org/I23946033"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00523901,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"21","issue":"7","first_page":"989","last_page":"992"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9814000129699707,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9814000129699707,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.009600000455975533,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.0017000000225380063,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/modulation-transfer-function","display_name":"modulation transfer function","score":0.9879999756813049},{"id":"https://openalex.org/keywords/quality-factor","display_name":"quality factor","score":0.5360000133514404}],"concepts":[{"id":"https://openalex.org/C175231954","wikidata":"https://www.wikidata.org/wiki/Q1942321","display_name":"Optical transfer function","level":2,"score":0.8838202357292175},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7690026760101318},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6686474084854126},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5668982267379761},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.5544334650039673},{"id":"https://openalex.org/C102519508","wikidata":"https://www.wikidata.org/wiki/Q6520159","display_name":"Fourier transform","level":2,"score":0.5312103033065796},{"id":"https://openalex.org/C126780896","wikidata":"https://www.wikidata.org/wiki/Q899871","display_name":"Distortion (music)","level":4,"score":0.5220208764076233},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.48726406693458557},{"id":"https://openalex.org/C125287762","wikidata":"https://www.wikidata.org/wiki/Q1758948","display_name":"Absorption (acoustics)","level":2,"score":0.4259561598300934},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.41458332538604736},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3313088119029999},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15435856580734253},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.06314310431480408},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:384656607","doi":null,"is_oa":false,"landing_page_url":"https://www.opsi.ir/article-1-865-en.pdf","pdf_url":null,"source":{"id":"https://openalex.org/S4306536487","display_name":"\u0627\u0646\u062c\u0645\u0646 \u0627\u067e\u062a\u06cc\u06a9 \u0648 \u0641\u0648\u062a\u0648\u0646\u06cc\u06a9 \u0627\u06cc\u0631\u0627\u0646","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Optics and Photonics Society of Iran","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2161270541"],"related_works":["https://openalex.org/W2143004017","https://openalex.org/W2000787426","https://openalex.org/W3093691809","https://openalex.org/W2369284445","https://openalex.org/W2885618600","https://openalex.org/W2758028013","https://openalex.org/W2040225043","https://openalex.org/W7164621284","https://openalex.org/W1638050431","https://openalex.org/W2041876039"],"abstract_inverted_index":{"Laser":[0],"scanning":[1,63],"is":[2,28,32,65,69],"one":[3],"of":[4,25,74],"the":[5,75],"methods":[6],"used":[7],"in":[8,13,53],"Lithography.":[9],"It\u2019s":[10],"also":[11],"usefull":[12],"optical":[14,26,44],"masks":[15,27],"construction.":[16],"In":[17,39],"this":[18],"paper":[19],"a":[20,46,59,83],"method":[21,31],"for":[22],"quality":[23],"determination":[24],"presented.":[29],"The":[30],"based":[33],"on":[34],"Modulation":[35],"Transfer":[36],"Function":[37],"(MTF).":[38],"order":[40],"to":[41],"construct":[42],"an":[43],"mask,":[45],"copper":[47],"thin":[48],"film":[49],"(with":[50],"high":[51,60],"absorption":[52],"visible":[54],"and":[55,58],"UV":[56],"spectra)":[57],"power":[61],"235nm":[62],"laser":[64],"utilized.":[66],"Finialy":[67],"MTF":[68],"formed":[70],"using":[71],"Fourier":[72],"transform":[73],"mask":[76],"image":[77],"which":[78],"could":[79],"be":[80],"interpreted":[81],"as":[82],"qulity":[84],"factor.":[85]},"counts_by_year":[],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2016-06-24T00:00:00"}