{"id":"https://openalex.org/W3213466975","doi":"https://doi.org/10.1115/imece2001/mems-23874","title":"Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design","display_name":"Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design","publication_year":2001,"publication_date":"2001-11-11","ids":{"openalex":"https://openalex.org/W3213466975","doi":"https://doi.org/10.1115/imece2001/mems-23874","mag":"3213466975"},"language":"en","primary_location":{"id":"doi:10.1115/imece2001/mems-23874","doi":"https://doi.org/10.1115/imece2001/mems-23874","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece2001/mems-23874","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micro-Electro-Mechanical Systems (MEMS)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087152743","display_name":"Mohammad Kilani","orcid":"https://orcid.org/0000-0003-0482-7761","observed_orcids":["https://orcid.org/0000-0003-0482-7761"]},"institutions":[{"id":"https://openalex.org/I103163165","display_name":"Florida State University","ror":"https://ror.org/05g3dte14","country_code":"US","type":"education","lineage":["https://openalex.org/I103163165"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohammad I. Kilani","raw_affiliation_strings":["Florida State University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Florida State University","institution_ids":["https://openalex.org/I103163165"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009989016","display_name":"Paul C. Galambos","orcid":"https://orcid.org/0009-0006-4171-8280","observed_orcids":["https://orcid.org/0009-0006-4171-8280"]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]},{"id":"https://openalex.org/I4210104735","display_name":"Sandia National Laboratories","ror":"https://ror.org/01apwpt12","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Paul C. Galambos","raw_affiliation_strings":["Sandia National Laboratory"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratory","institution_ids":["https://openalex.org/I192454743","https://openalex.org/I4210104735"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039023347","display_name":"Yousef Haik","orcid":"https://orcid.org/0000-0002-3665-7456","observed_orcids":["https://orcid.org/0000-0002-3665-7456"]},"institutions":[{"id":"https://openalex.org/I103163165","display_name":"Florida State University","ror":"https://ror.org/05g3dte14","country_code":"US","type":"education","lineage":["https://openalex.org/I103163165"]},{"id":"https://openalex.org/I8248082","display_name":"Florida Agricultural and Mechanical University","ror":"https://ror.org/00c4wc133","country_code":"US","type":"education","lineage":["https://openalex.org/I8248082"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yousef S. Haik","raw_affiliation_strings":["Florida A&M University - Florida State University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Florida A&M University - Florida State University","institution_ids":["https://openalex.org/I103163165","https://openalex.org/I8248082"]}]},{"author_position":"last","author":{"id":null,"display_name":"Ching-Jen Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I103163165","display_name":"Florida State University","ror":"https://ror.org/05g3dte14","country_code":"US","type":"education","lineage":["https://openalex.org/I103163165"]},{"id":"https://openalex.org/I8248082","display_name":"Florida Agricultural and Mechanical University","ror":"https://ror.org/00c4wc133","country_code":"US","type":"education","lineage":["https://openalex.org/I8248082"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ching-Jen Chen","raw_affiliation_strings":["Florida A&M University - Florida State University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Florida A&M University - Florida State University","institution_ids":["https://openalex.org/I103163165","https://openalex.org/I8248082"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8451,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.79263834,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"515","last_page":"518"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9945999979972839,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9945999979972839,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.0026000000070780516,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11486","display_name":"Micro and Nano Robotics","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"surface micromachining","score":0.8399999737739563},{"id":"https://openalex.org/keywords/polysilicon-mems","display_name":"polysilicon MEMS","score":0.8500000238418579},{"id":"https://openalex.org/keywords/pumping-capacity","display_name":"pump capacity","score":0.6740000247955322}],"concepts":[{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.8138433694839478},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.6852315664291382},{"id":"https://openalex.org/C22486285","wikidata":"https://www.wikidata.org/wiki/Q2644088","display_name":"Gear train","level":3,"score":0.6404026746749878},{"id":"https://openalex.org/C129212681","wikidata":"https://www.wikidata.org/wiki/Q143899","display_name":"Gear pump","level":2,"score":0.5436571836471558},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.47697147727012634},{"id":"https://openalex.org/C132651336","wikidata":"https://www.wikidata.org/wiki/Q185571","display_name":"Fluidics","level":2,"score":0.43667739629745483},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4183924198150635},{"id":"https://openalex.org/C120308773","wikidata":"https://www.wikidata.org/wiki/Q7048863","display_name":"Non-circular gear","level":3,"score":0.4103759527206421},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.38319942355155945},{"id":"https://openalex.org/C136905703","wikidata":"https://www.wikidata.org/wiki/Q1641343","display_name":"Spiral bevel gear","level":2,"score":0.26589593291282654},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.24616238474845886},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.22357946634292603},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2178909182548523},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1115/imece2001/mems-23874","doi":"https://doi.org/10.1115/imece2001/mems-23874","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece2001/mems-23874","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micro-Electro-Mechanical Systems (MEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2122448988","https://openalex.org/W4378710517","https://openalex.org/W2110858696","https://openalex.org/W1980898726","https://openalex.org/W4321362127","https://openalex.org/W1944449114","https://openalex.org/W2283238741","https://openalex.org/W1910444679","https://openalex.org/W4297779836","https://openalex.org/W2073308496"],"abstract_inverted_index":{"Abstract":[0],"An":[1],"offset":[2,26],"planetary":[3,22,97],"pump":[4,14,38,67],"fabricated":[5],"in":[6,85],"five-level":[7],"polysilicon":[8],"surface":[9,87],"micromachining":[10],"is":[11,39,50],"introduced.":[12],"The":[13,37,61],"consists":[15],"of":[16,66,73,80],"a":[17,57,64],"ring":[18,54],"gear":[19,55,59,98],"enclosing":[20],"two":[21],"gears":[23],"and":[24,47,69,96],"an":[25,42],"sun":[27],"gear,":[28],"which":[29],"generates":[30],"pumping":[31],"due":[32],"to":[33,52],"its":[34,74],"eccentric":[35],"rotation.":[36],"driven":[40],"by":[41],"electrostatically":[43],"actuated":[44],"comb-drive":[45],"microengine":[46],"mechanical":[48,75,83],"power":[49],"transmitted":[51],"the":[53,70,78],"through":[56],"micro":[58],"train.":[60],"paper":[62],"presents":[63],"derivation":[65],"capacity":[68],"detailed":[71],"design":[72],"elements,":[76],"demonstrating":[77],"implementation":[79],"relatively":[81],"advanced":[82],"functions":[84],"multi-level":[86],"micromachining,":[88],"including":[89],"axial":[90],"roller":[91],"bearing":[92],"support,":[93],"fluidic":[94],"seal":[95],"transmission.":[99]},"counts_by_year":[],"updated_date":"2026-11-02T09:45:03.842371","created_date":"2021-11-22T00:00:00"}