{"id":"https://openalex.org/W3209306196","doi":"https://doi.org/10.23919/empc53418.2021.9584986","title":"MEMS thermoelecctric multi-color photo-thermal detector","display_name":"MEMS thermoelecctric multi-color photo-thermal detector","publication_year":2021,"publication_date":"2021-09-13","ids":{"openalex":"https://openalex.org/W3209306196","doi":"https://doi.org/10.23919/empc53418.2021.9584986","mag":"3209306196"},"language":"en","primary_location":{"id":"doi:10.23919/empc53418.2021.9584986","doi":"https://doi.org/10.23919/empc53418.2021.9584986","is_oa":false,"landing_page_url":"https://doi.org/10.23919/empc53418.2021.9584986","pdf_url":null,"source":{"id":"https://openalex.org/S4306418362","display_name":"European Microelectronics and Packaging Conference","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Zekun Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zekun Liu","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070651990","display_name":"Shuai Zhang","orcid":"https://orcid.org/0000-0002-1729-6165","observed_orcids":["https://orcid.org/0000-0002-1729-6165"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shuai Zhang","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069481232","display_name":"Erzhen Mu","orcid":"https://orcid.org/0000-0001-7839-2161","observed_orcids":["https://orcid.org/0000-0001-7839-2161"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Erzhen Mu","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011674202","display_name":"Zhenhua Wu","orcid":"https://orcid.org/0000-0002-5527-0310","observed_orcids":["https://orcid.org/0000-0002-5527-0310"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenhua Wu","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100906670","display_name":"Duo Yu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Duo Yu","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100371622","display_name":"Tianyu Chen","orcid":"https://orcid.org/0000-0002-3670-1824","observed_orcids":["https://orcid.org/0000-0002-3670-1824"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tianyu Chen","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011206060","display_name":"Zhiyu Hu","orcid":"https://orcid.org/0000-0003-1114-052X","observed_orcids":["https://orcid.org/0000-0003-1114-052X"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiyu Hu","raw_affiliation_strings":["Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","Shanghai Jiao Tong University, Shanghai, PR, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Nano/Micro Energy","institution_ids":["https://openalex.org/I4405270085"]},{"raw_affiliation_string":"Shanghai Jiao Tong University, Shanghai, PR, China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.6987000107765198,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.6987000107765198,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.09399999678134918,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11856","display_name":"Thermography and Photoacoustic Techniques","score":0.04740000143647194,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photothermal-effect","display_name":"photothermal effect","score":0.9100000262260437},{"id":"https://openalex.org/keywords/material-identification","display_name":"material identification","score":0.7099999785423279},{"id":"https://openalex.org/keywords/open-circuit-voltage","display_name":"open-circuit voltage","score":0.5889999866485596},{"id":"https://openalex.org/keywords/photothermal-conversion","display_name":"photothermal conversion","score":0.5559999942779541},{"id":"https://openalex.org/keywords/substrate-color","display_name":"substrate color","score":0.38600000739097595},{"id":"https://openalex.org/keywords/textile-materials","display_name":"textile materials","score":0.41200000047683716}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7923765778541565},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6384392976760864},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5304134488105774},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.506981372833252},{"id":"https://openalex.org/C182606246","wikidata":"https://www.wikidata.org/wiki/Q7187926","display_name":"Photothermal therapy","level":2,"score":0.46511155366897583},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.46005767583847046},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26432573795318604},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/empc53418.2021.9584986","doi":"https://doi.org/10.23919/empc53418.2021.9584986","is_oa":false,"landing_page_url":"https://doi.org/10.23919/empc53418.2021.9584986","pdf_url":null,"source":{"id":"https://openalex.org/S4306418362","display_name":"European Microelectronics and Packaging Conference","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322999","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W2041532378","https://openalex.org/W2065235250","https://openalex.org/W2148596493","https://openalex.org/W2163517070","https://openalex.org/W2168615523","https://openalex.org/W2804201823","https://openalex.org/W2898220358","https://openalex.org/W2961369000","https://openalex.org/W2962884206","https://openalex.org/W3036288926"],"related_works":["https://openalex.org/W4292263171","https://openalex.org/W2263196339","https://openalex.org/W2905447939","https://openalex.org/W2011786248","https://openalex.org/W1929584286","https://openalex.org/W2488373555","https://openalex.org/W2890084613","https://openalex.org/W7137384322","https://openalex.org/W2414811127","https://openalex.org/W4236070249"],"abstract_inverted_index":{"The":[0,70,169,187],"photothermal":[1,61,177,275],"effect":[2,62,276],"is":[3,77,110],"the":[4,37,42,60,78,85,104,122,153,159,173,176,184,215,218,236,247,272],"most":[5],"direct":[6],"and":[7,41,72,93,107,139,157,195,203,226,258,264,279],"simple":[8],"way":[9,51],"to":[10,58,68,112,182,213],"use":[11],"solar":[12],"energy.":[13],"Different":[14],"color":[15],"materials":[16,65],"have":[17,26],"different":[18,64,262],"thermal":[19],"effects":[20,161,178],"under":[21,164],"light":[22,167,220,252],"exposure,":[23],"which":[24,84,254],"will":[25],"wide":[27],"range":[28],"of":[29,39,44,52,63,74,80,175,240,249,261,274],"influences":[30],"on":[31,135],"people\u2019s":[32],"daily":[33],"life,":[34],"such":[35,89],"as":[36,90],"production":[38],"clothing":[40],"choice":[43],"paint.":[45],"This":[46],"article":[47],"innovatively":[48],"proposes":[49],"a":[50,114,136],"using":[53],"MEMS":[54,75],"micro-thermoelectric":[55],"generator":[56],"(\u03bc-TEG)":[57],"distinguish":[59,183,259],"after":[66],"exposure":[67],"light.":[69],"design":[71],"manufacture":[73],"\u03bc-TEG":[76],"focus":[79],"this":[81],"paper,":[82],"in":[83,133,217,227,271],"micro-nano":[86],"manufacturing":[87],"technologies":[88],"ultraviolet":[91],"lithography":[92,106],"magnetron":[94],"sputtering":[95],"are":[96],"mainly":[97],"used.":[98],"A":[99],"hybrid":[100],"fabrication":[101],"method":[102],"combining":[103],"non-contact":[105],"photoresist":[108],"melting":[109],"used":[111,181,212],"prepare":[113],"top":[115],"electrode":[116],"with":[117],"good":[118],"electrical":[119],"contact.":[120],"In":[121,148],"5":[123],"cm*5":[124],"cm":[125],"area,":[126],"we":[127],"integrated":[128],"46000":[129],"P-N":[130],"thermoelectric":[131],"units":[132],"series":[134],"silicon":[137],"wafer":[138],"its":[140],"ultra-thin":[141],"structure":[142],"offers":[143],"very":[144],"high":[145],"temperature":[146,224,277,282],"sensitivity.":[147],"our":[149],"experiment,":[150],"by":[151,246],"changing":[152],"substrate":[154],"materials\u2019":[155],"type":[156],"color,":[158],"light-to-heat":[160],"were":[162],"studied":[163],"monochromatic":[165,250],"LED":[166,251],"illumination.":[168],"results":[170],"demonstrated":[171],"that":[172],"difference":[174],"can":[179,243,255],"be":[180,244],"various":[185],"materials.":[186,265],"experimental":[188],"samples":[189,260],"include":[190],"cotton,":[191],"linen,":[192],"chemical":[193],"fiber,":[194],"paper.":[196],"Each":[197],"material":[198],"includes":[199],"red,":[200],"yellow,":[201],"green,":[202],"white.":[204],"For":[205],"each":[206],"sample,":[207],"ultraviolet/visible/near":[208],"infrared":[209],"spectrophotometer":[210],"was":[211],"measure":[214,257],"absorptivity":[216],"visible":[219],"range.":[221],"At":[222],"room":[223],"(298K)":[225],"an":[228],"enclosed":[229],"test":[230],"platform":[231],"(to":[232],"minimize":[233],"air":[234],"flow),":[235],"open":[237],"circuit":[238],"voltage":[239],"1~2":[241],"mV":[242],"detected":[245],"irradiation":[248],"source,":[253],"accurately":[256],"colors":[263],"It":[266],"has":[267],"broad":[268],"application":[269],"prospects":[270],"field":[273],"measurement":[278],"reaction":[280],"process":[281],"monitoring.":[283]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-10-26T11:51:55.731654","created_date":"2021-11-08T00:00:00"}