{"id":"https://openalex.org/W3195954465","doi":null,"title":"Analysis of copper/fluoropolymer film systems for multilevel interconnects","display_name":"Analysis of copper/fluoropolymer film systems for multilevel interconnects","publication_year":1998,"publication_date":"1998-01-01","ids":{"openalex":"https://openalex.org/W3195954465","mag":"3195954465"},"language":"en","primary_location":{"id":"pmh:oai:publications.polymtl.ca:6754","doi":null,"is_oa":true,"landing_page_url":"https://publications.polymtl.ca/6754/","pdf_url":"https://publications.polymtl.ca/6754/1/1998_Alptekin.pdf","source":{"id":"https://openalex.org/S4306401013","display_name":"PolyPublie (\u00c9cole Polytechnique de Montr\u00e9al)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I45683168","host_organization_name":"Polytechnique Montr\u00e9al","host_organization_lineage":["https://openalex.org/I45683168"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Alptekin, A. (1998). Analysis of copper/fluoropolymer film systems for multilevel interconnects [Master's thesis, \u00c9cole Polytechnique de Montr\u00e9al].","raw_type":"m\u00e9moire de ma\u00eetrise"},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://publications.polymtl.ca/6754/1/1998_Alptekin.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5069972778","display_name":"Avni Alptekin","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Avni Alptekin","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5069972778"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12084","display_name":"Synthesis and properties of polymers","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multilevel-interconnects","display_name":"multilevel interconnects","score":0.8899999856948853},{"id":"https://openalex.org/keywords/copper-films","display_name":"copper films","score":0.7960000038146973},{"id":"https://openalex.org/keywords/fluoropolymer-films","display_name":"fluoropolymer films","score":0.9919999837875366},{"id":"https://openalex.org/keywords/dielectric-properties","display_name":"dielectric properties","score":0.8640000224113464},{"id":"https://openalex.org/keywords/metal-adhesion","display_name":"metal adhesion","score":0.703000009059906},{"id":"https://openalex.org/keywords/thin-film-fabrication","display_name":"thin film fabrication","score":0.6169999837875366},{"id":"https://openalex.org/keywords/integrated-circuit-metallization","display_name":"integrated circuit metallization","score":0.6019999980926514}],"concepts":[{"id":"https://openalex.org/C2780708225","wikidata":"https://www.wikidata.org/wiki/Q1818706","display_name":"Fluoropolymer","level":3,"score":0.9996751546859741},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.7904038429260254},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7707350254058838},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7020062208175659},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.607869565486908},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.49060145020484924},{"id":"https://openalex.org/C84416704","wikidata":"https://www.wikidata.org/wiki/Q188666","display_name":"Adhesion","level":2,"score":0.4649578034877777},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.21956473588943481},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.16190209984779358},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1424611508846283},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:publications.polymtl.ca:6754","doi":null,"is_oa":true,"landing_page_url":"https://publications.polymtl.ca/6754/","pdf_url":"https://publications.polymtl.ca/6754/1/1998_Alptekin.pdf","source":{"id":"https://openalex.org/S4306401013","display_name":"PolyPublie (\u00c9cole Polytechnique de Montr\u00e9al)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I45683168","host_organization_name":"Polytechnique Montr\u00e9al","host_organization_lineage":["https://openalex.org/I45683168"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Alptekin, A. (1998). Analysis of copper/fluoropolymer film systems for multilevel interconnects [Master's thesis, \u00c9cole Polytechnique de Montr\u00e9al].","raw_type":"m\u00e9moire de ma\u00eetrise"},{"id":"mag:3195954465","doi":null,"is_oa":false,"landing_page_url":"https://publications.polymtl.ca/6754/","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"pmh:oai:publications.polymtl.ca:6754","doi":null,"is_oa":true,"landing_page_url":"https://publications.polymtl.ca/6754/","pdf_url":"https://publications.polymtl.ca/6754/1/1998_Alptekin.pdf","source":{"id":"https://openalex.org/S4306401013","display_name":"PolyPublie (\u00c9cole Polytechnique de Montr\u00e9al)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I45683168","host_organization_name":"Polytechnique Montr\u00e9al","host_organization_lineage":["https://openalex.org/I45683168"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Alptekin, A. (1998). Analysis of copper/fluoropolymer film systems for multilevel interconnects [Master's thesis, \u00c9cole Polytechnique de Montr\u00e9al].","raw_type":"m\u00e9moire de ma\u00eetrise"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3195954465.pdf","grobid_xml":"https://content.openalex.org/works/W3195954465.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7065228987","https://openalex.org/W7023891545","https://openalex.org/W7037310306","https://openalex.org/W4229749660","https://openalex.org/W2009209800","https://openalex.org/W2009912433","https://openalex.org/W3045762598","https://openalex.org/W2041081525","https://openalex.org/W1902611936","https://openalex.org/W578011278"],"abstract_inverted_index":{"Characteristics":[0],"of":[1,13,18,23,32,37,42,48,53],"film":[2,43],"materials":[3,44],"considered":[4],"for":[5],"multilevel":[6],"interconnects":[7],"--":[8,16,21,27,30,35,40,45,51],"Structure":[9],"and":[10],"dielectric":[11],"properties":[12,47],"fluoropolymer":[14,33,49],"films":[15,20,34,39,50],"Properties":[17],"copper":[19,38,54],"Adhesion":[22,52],"metals":[24],"to":[25,55],"fluoropolymers":[26],"Experimental":[28],"methodology":[29],"Fabrication":[31,36],"Characterization":[41],"Dielectric":[46],"fluoropolymers.":[56]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2021-08-30T00:00:00"}