{"id":"https://openalex.org/W3192135652","doi":"https://doi.org/10.1109/transducers50396.2021.9495482","title":"Self-Deformable Flexible Mems Tweezer Made of Poly (Vinylidene Fluoride) /Ionic Liquid Gel with Electrical Measurement Capability","display_name":"Self-Deformable Flexible Mems Tweezer Made of Poly (Vinylidene Fluoride) /Ionic Liquid Gel with Electrical Measurement Capability","publication_year":2021,"publication_date":"2021-06-20","ids":{"openalex":"https://openalex.org/W3192135652","doi":"https://doi.org/10.1109/transducers50396.2021.9495482","mag":"3192135652"},"language":"en","primary_location":{"id":"doi:10.1109/transducers50396.2021.9495482","doi":"https://doi.org/10.1109/transducers50396.2021.9495482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/transducers50396.2021.9495482","pdf_url":null,"source":{"id":"https://openalex.org/S4306419851","display_name":"International Conference on Solid-State Sensors, Actuators and Microsystems","issn_l":"2167-0021","issn":["2167-0021"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-03426266","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102893722","display_name":"Takafumi Yamaguchi","orcid":"https://orcid.org/0000-0003-3407-2830","observed_orcids":["https://orcid.org/0000-0003-3407-2830"]},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takafumi Yamaguchi","raw_affiliation_strings":["The University of Tokyo (UTokyo),Tokyo,Japan","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo (UTokyo),Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078019076","display_name":"Naoto Usami","orcid":"https://orcid.org/0000-0001-5609-9781","observed_orcids":["https://orcid.org/0000-0001-5609-9781"]},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoto Usami","raw_affiliation_strings":["The University of Tokyo (UTokyo),Tokyo,Japan","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo (UTokyo),Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040015874","display_name":"Kei Misumi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kei Misumi","raw_affiliation_strings":["The University of Tokyo (UTokyo),Tokyo,Japan","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo (UTokyo),Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023914564","display_name":"Atsushi Toyokura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Atsushi Toyokura","raw_affiliation_strings":["The University of Tokyo (UTokyo),Tokyo,Japan","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo (UTokyo),Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000680886","display_name":"Akio Higo","orcid":"https://orcid.org/0000-0002-4595-0929","observed_orcids":["https://orcid.org/0000-0002-4595-0929"]},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akio Higo","raw_affiliation_strings":["The University of Tokyo (UTokyo),Tokyo,Japan","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The University of Tokyo (UTokyo),Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047109593","display_name":"Shimpei Ono","orcid":"https://orcid.org/0000-0003-1514-8879","observed_orcids":["https://orcid.org/0000-0003-1514-8879"]},"institutions":[{"id":"https://openalex.org/I130416959","display_name":"Central Research Institute of Electric Power Industry","ror":"https://ror.org/041jswc25","country_code":"JP","type":"nonprofit","lineage":["https://openalex.org/I130416959"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shimpei Ono","raw_affiliation_strings":["Central Research Institute of Electric Power Industry,Kanagawa,Japan","Central Research Institute of Electrical Power Industry (1646 Abiko, Abiko-shi, Chiba-ken 270-1194, Japan - Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research Institute of Electric Power Industry,Kanagawa,Japan","institution_ids":["https://openalex.org/I130416959"]},{"raw_affiliation_string":"Central Research Institute of Electrical Power Industry (1646 Abiko, Abiko-shi, Chiba-ken 270-1194, Japan - Japan)","institution_ids":["https://openalex.org/I130416959"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053394643","display_name":"Gilgueng Hwang","orcid":"https://orcid.org/0000-0003-3232-3085","observed_orcids":["https://orcid.org/0000-0003-3232-3085"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210088231","display_name":"Laboratory for Integrated Micro-Mechatronic Systems","ror":"https://ror.org/0059vr703","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4210095849","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4210100562","display_name":"Centre de Nanosciences et de Nanotechnologies","ror":"https://ror.org/00zay3w86","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I204730241","https://openalex.org/I277688954","https://openalex.org/I4210100562"]},{"id":"https://openalex.org/I4405287223","display_name":"Laboratories for International Research on Multi-disciplinary Micro Systems, The University of Tokyo","ror":"https://ror.org/04fgtfe66","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287223","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["FR","JP"],"is_corresponding":false,"raw_author_name":"Gilgueng Hwang","raw_affiliation_strings":["C2N-CNRS,Paris-Sacray,France","C2N - Centre de Nanosciences et de Nanotechnologies (10 Boulevard Thomas Gobert, 91120, Palaiseau - France)","LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"C2N-CNRS,Paris-Sacray,France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210100562"]},{"raw_affiliation_string":"C2N - Centre de Nanosciences et de Nanotechnologies (10 Boulevard Thomas Gobert, 91120, Palaiseau - France)","institution_ids":["https://openalex.org/I4210100562"]},{"raw_affiliation_string":"LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4405287223","https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039115636","display_name":"Guilhem Larrieu","orcid":"https://orcid.org/0000-0001-5157-2277","observed_orcids":["https://orcid.org/0000-0001-5157-2277"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Guilhem Larrieu","raw_affiliation_strings":["LAAS-CNRS,Toulouse,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS-CNRS,Toulouse,France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051282867","display_name":"Yoshiho Ikeuchi","orcid":"https://orcid.org/0000-0002-2829-3840","observed_orcids":["https://orcid.org/0000-0002-2829-3840"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210088231","display_name":"Laboratory for Integrated Micro-Mechatronic Systems","ror":"https://ror.org/0059vr703","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4210095849","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287223","display_name":"Laboratories for International Research on Multi-disciplinary Micro Systems, The University of Tokyo","ror":"https://ror.org/04fgtfe66","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287223","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["FR","JP"],"is_corresponding":false,"raw_author_name":"Yoshiho Ikeuchi","raw_affiliation_strings":["Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231"]},{"raw_affiliation_string":"LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4405287223","https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031822007","display_name":"Agn\u00e8s Tixier\u2010Mita","orcid":"https://orcid.org/0000-0002-0067-6989","observed_orcids":["https://orcid.org/0000-0002-0067-6989"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210088231","display_name":"Laboratory for Integrated Micro-Mechatronic Systems","ror":"https://ror.org/0059vr703","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4210095849","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287223","display_name":"Laboratories for International Research on Multi-disciplinary Micro Systems, The University of Tokyo","ror":"https://ror.org/04fgtfe66","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287223","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["FR","JP"],"is_corresponding":false,"raw_author_name":"Agnes Tixier-Mita","raw_affiliation_strings":["Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231"]},{"raw_affiliation_string":"LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4405287223","https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086546709","display_name":"Ken Saito","orcid":"https://orcid.org/0000-0001-7126-3025","observed_orcids":["https://orcid.org/0000-0001-7126-3025"]},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ken Saito","raw_affiliation_strings":["Nihon University,Chiba,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nihon University,Chiba,Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062093506","display_name":"Timoth\u00e9e Levi","orcid":"https://orcid.org/0000-0003-0378-8529","observed_orcids":["https://orcid.org/0000-0003-0378-8529"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I15057530","display_name":"Universit\u00e9 de Bordeaux","ror":"https://ror.org/057qpr032","country_code":"FR","type":"education","lineage":["https://openalex.org/I15057530"]},{"id":"https://openalex.org/I4210157089","display_name":"Laboratoire de l'Int\u00e9gration du Mat\u00e9riau au Syst\u00e8me","ror":"https://ror.org/04nabhy78","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I15057530","https://openalex.org/I4210091158","https://openalex.org/I4210095849","https://openalex.org/I4210157089","https://openalex.org/I4210160189"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Timothee Levi","raw_affiliation_strings":["IMS-CNRS, University of Bordeaux,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMS-CNRS, University of Bordeaux,France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I15057530","https://openalex.org/I4210157089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038609514","display_name":"Yoshio Mita","orcid":"https://orcid.org/0000-0003-3655-1245","observed_orcids":["https://orcid.org/0000-0003-3655-1245"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210088231","display_name":"Laboratory for Integrated Micro-Mechatronic Systems","ror":"https://ror.org/0059vr703","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4210095849","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287223","display_name":"Laboratories for International Research on Multi-disciplinary Micro Systems, The University of Tokyo","ror":"https://ror.org/04fgtfe66","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287223","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["FR","JP"],"is_corresponding":false,"raw_author_name":"Yoshio Mita","raw_affiliation_strings":["Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS)-U,Tokyo,Japan","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231"]},{"raw_affiliation_string":"LIMMS - Laboratory for Integrated Micro Mechatronics Systems (LIMMS/CNRS-IIS(UMI 2820)/ Institute of Industrial Science, University of Tokyo/ 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 Japan/ - Japan)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210088231","https://openalex.org/I4405287223","https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"raw_affiliation_string":"UTokyo - Graduate School of Engineering [The Univ of Tokyo] (Japan)","institution_ids":["https://openalex.org/I74801974"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":11,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0751,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.67168972,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"113","issue":null,"first_page":"18","last_page":"21"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ionic-polymer-metal-composite","display_name":"ionic polymer-metal composite","score":0.8949999809265137},{"id":"https://openalex.org/keywords/poly-vinylidene-fluoride-trifluoroethylene","display_name":"poly(vinylidene fluoride-trifluoroethylene)","score":0.9049999713897705},{"id":"https://openalex.org/keywords/ion-gels","display_name":"ionic gels","score":0.9629999995231628},{"id":"https://openalex.org/keywords/silver-nanowire-electrodes","display_name":"silver nanowire electrodes","score":0.859000027179718},{"id":"https://openalex.org/keywords/electrical-signal-measurement","display_name":"electrical signal measurement","score":0.5019999742507935},{"id":"https://openalex.org/keywords/acetone","display_name":"acetone","score":0.421999990940094},{"id":"https://openalex.org/keywords/low-voltage-actuation","display_name":"low-voltage actuation","score":0.6269999742507935},{"id":"https://openalex.org/keywords/strain-sensing","display_name":"strain sensing","score":0.40799999237060547}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.738202691078186},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6622682809829712},{"id":"https://openalex.org/C87210426","wikidata":"https://www.wikidata.org/wiki/Q1072476","display_name":"Bending","level":2,"score":0.6467182040214539},{"id":"https://openalex.org/C2182769","wikidata":"https://www.wikidata.org/wiki/Q62500","display_name":"Ionic bonding","level":3,"score":0.545634925365448},{"id":"https://openalex.org/C154881586","wikidata":"https://www.wikidata.org/wiki/Q898579","display_name":"Ionic liquid","level":3,"score":0.532770574092865},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5208183526992798},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4830763638019562},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.4490540325641632},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.4243195056915283},{"id":"https://openalex.org/C167266352","wikidata":"https://www.wikidata.org/wiki/Q543275","display_name":"Electroactive polymers","level":3,"score":0.41257545351982117},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.36769813299179077},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3421257734298706},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3278336822986603},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.19148984551429749},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1735011637210846},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.0949067771434784},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.08601930737495422},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/transducers50396.2021.9495482","doi":"https://doi.org/10.1109/transducers50396.2021.9495482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/transducers50396.2021.9495482","pdf_url":null,"source":{"id":"https://openalex.org/S4306419851","display_name":"International Conference on Solid-State Sensors, Actuators and Microsystems","issn_l":"2167-0021","issn":["2167-0021"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-03371653v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.laas.fr/hal-03371653","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:HAL:hal-03426266v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-03426266","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2021, Orlando (on line), United States. pp.18-21, ⟨10.1109/Transducers50396.2021.9495482⟩","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-03426266v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-03426266","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2021, Orlando (on line), United States. pp.18-21, ⟨10.1109/Transducers50396.2021.9495482⟩","raw_type":"info:eu-repo/semantics/conferenceObject"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G6397635009","display_name":null,"funder_award_id":"JPMJCR20T2","funder_id":"https://openalex.org/F4320320907","funder_display_name":"Japan Science and Technology Corporation"}],"funders":[{"id":"https://openalex.org/F4320320907","display_name":"Japan Science and Technology Corporation","ror":"https://ror.org/00097mb19"},{"id":"https://openalex.org/F4320338075","display_name":"Core Research for Evolutional Science and Technology","ror":"https://ror.org/00097mb19"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W21562669","https://openalex.org/W2030407993","https://openalex.org/W2041166773","https://openalex.org/W2115084607","https://openalex.org/W2333382209","https://openalex.org/W2514434695","https://openalex.org/W2525079048","https://openalex.org/W2605798812","https://openalex.org/W2901600155","https://openalex.org/W3004485614"],"related_works":["https://openalex.org/W4288776765","https://openalex.org/W2338202060","https://openalex.org/W1986765244","https://openalex.org/W4293786421","https://openalex.org/W2111648270","https://openalex.org/W2901600155","https://openalex.org/W2099023866","https://openalex.org/W1976684327","https://openalex.org/W2018958913","https://openalex.org/W2071207474"],"abstract_inverted_index":{"We":[0],"demonstrated":[1],"a":[2,123],"self-bending":[3],"flexible":[4,68],"tweezer":[5],"capable":[6],"of":[7,50,67,91,101,130,133],"simultaneous":[8],"mechanical":[9],"handling":[10],"and":[11,28,45,85,94,138],"electrical":[12,29,128],"measurement.":[13],"A":[14],"soft":[15],"cantilever":[16,69,116],"of$2\\":[17],"\\text{mm}":[18,21],"\\times":[19,22],"8\\":[20],"75\\":[23],"\\mu":[24],"\\mathrm{m}$bent":[25],"by":[26,89],"itself,":[27],"signal":[30],"observation":[31,129],"through":[32],"touched":[33,121],"surface":[34],"was":[35,42,48,76,80,141],"successful.":[36],"The":[37,78,99,115],"working":[38],"voltage":[39,132],"(1.5":[40],"V)":[41],"the":[43,51,105,118],"lowest,":[44],"normalized":[46],"strain":[47],"one":[49],"highest":[52],"values":[53],"as":[54],"compared":[55],"to":[56,60],"world's":[57],"similar":[58],"devices,":[59],"our":[61],"best":[62],"knowledge.":[63],"Unique":[64],"fabrication":[65],"process":[66],"with":[70,117],"novel":[71],"ionic":[72,86],"polymer-metal":[73],"composites":[74],"(IPMCs)":[75],"developed.":[77],"material":[79],"poly":[81],"(vinylidene":[82],"fluoride-co-trifluoroethylene)":[83],"(PVDF-TrFE)":[84],"liquid":[87],"(IL)":[88],"use":[90],"acetone":[92],"solvent,":[93],"silver":[95],"nanowire":[96],"for":[97],"electrodes.":[98],"IL":[100],"50":[102],"wt%":[103],"gave":[104],"largest":[106],"7":[107],"mm":[108],"bending":[109],"displacement":[110],"at":[111],"+":[112],"1.5":[113],"VDC.":[114],"above":[119],"actuator":[120],"on":[122],"gold":[124],"test":[125],"surface,":[126],"then":[127],"alternating":[131],"700":[134],"mV":[135],"(1":[136],"kHz":[137],"4":[139],"kHz)":[140],"confirmed.":[142]},"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2026-10-25T09:29:13.331239","created_date":"2021-08-16T00:00:00"}