{"id":"https://openalex.org/W3163677035","doi":null,"title":"Investigation of titanium nitride synthesized by ion beam enhanced deposition.","display_name":"Investigation of titanium nitride synthesized by ion beam enhanced deposition.","publication_year":1989,"publication_date":"1989-01-01","ids":{"openalex":"https://openalex.org/W3163677035","mag":"3163677035"},"language":"en","primary_location":{"id":"mag:3163677035","doi":null,"is_oa":false,"landing_page_url":"https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=200902037365124429","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"article","indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014700382","display_name":"Jk Zhou","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jk Zhou","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Xiaoming Liu","orcid":"https://orcid.org/0000-0001-8285-5528","observed_orcids":["https://orcid.org/0000-0001-8285-5528"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xiaoming Liu","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-8285-5528","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044070161","display_name":"Y Chen","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Y Chen","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100741497","display_name":"Zhong Zheng","orcid":"https://orcid.org/0000-0002-3955-2510","observed_orcids":["https://orcid.org/0000-0002-3955-2510","https://orcid.org/0009-0001-7686-3561"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhong Zheng","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-3955-2510","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069288503","display_name":"Weiqi Huang","orcid":"https://orcid.org/0000-0001-9819-0380","observed_orcids":["https://orcid.org/0000-0001-9819-0380"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Weiqi Huang","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-9819-0380","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015020180","display_name":"Zhu Ying Zhou","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhu Ying Zhou","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":null,"display_name":"Shurong Zou","orcid":"https://orcid.org/0009-0006-9066-2519","observed_orcids":["https://orcid.org/0009-0006-9066-2519"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shurong Zou","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0009-0006-9066-2519","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.49501873,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"73","last_page":"78"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.7372999787330627,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.7372999787330627,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.14499999582767487,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.02500000037252903,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/titanium-nitride","display_name":"titanium nitride","score":1.0},{"id":"https://openalex.org/keywords/ion-beam-enhanced-deposition","display_name":"ion beam enhanced deposition","score":0.9900000095367432},{"id":"https://openalex.org/keywords/thin-film-fabrication","display_name":"thin film fabrication","score":0.8740000128746033},{"id":"https://openalex.org/keywords/nitride-coatings","display_name":"nitride coatings","score":0.3449999988079071}],"concepts":[{"id":"https://openalex.org/C2778489163","wikidata":"https://www.wikidata.org/wiki/Q415638","display_name":"Titanium nitride","level":4,"score":0.5909583568572998},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.5883374214172363},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5526243448257446},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.5214214324951172},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5071208477020264},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.4527251720428467},{"id":"https://openalex.org/C2781463530","wikidata":"https://www.wikidata.org/wiki/Q904053","display_name":"Ion beam-assisted deposition","level":4,"score":0.43161624670028687},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4081740081310272},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.4066905379295349},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.34816795587539673},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.34291183948516846},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.28381282091140747},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.06423979997634888},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.06345787644386292},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:3163677035","doi":null,"is_oa":false,"landing_page_url":"https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=200902037365124429","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3206871099","https://openalex.org/W2091676694","https://openalex.org/W2361605745","https://openalex.org/W7066663600","https://openalex.org/W2012481605","https://openalex.org/W7002138126","https://openalex.org/W1969496546","https://openalex.org/W2033793152","https://openalex.org/W4251877162","https://openalex.org/W3036778918"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-27T08:07:27.782135","created_date":"2021-05-24T00:00:00"}