{"id":"https://openalex.org/W3135582239","doi":"https://doi.org/10.1299/jsmekanto.2020.17e04","title":"Detection of nano particles attached on thin films","display_name":"Detection of nano particles attached on thin films","publication_year":2020,"publication_date":"2020-03-13","ids":{"openalex":"https://openalex.org/W3135582239","doi":"https://doi.org/10.1299/jsmekanto.2020.17e04","mag":"3135582239"},"language":"en","primary_location":{"id":"doi:10.1299/jsmekanto.2020.17e04","doi":"https://doi.org/10.1299/jsmekanto.2020.17e04","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmekanto.2020.17e04","pdf_url":"https://www.jstage.jst.go.jp/article/jsmekanto/2020/0/2020_17E04/_pdf","source":{"id":"https://openalex.org/S4210228287","display_name":"The Proceedings of Conference of Kanto Branch","issn_l":"2424-2691","issn":["2424-2691"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310313571","host_organization_name":"Japan Society Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4310313571"],"host_organization_lineage_names":["Japan Society Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of Conference of Kanto Branch","raw_type":"journal-article"},"volume":null,"type":"conference-abstract","is_traditional":false,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.jstage.jst.go.jp/article/jsmekanto/2020/0/2020_17E04/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109035882","display_name":"Eiichi Kondoh","orcid":"https://orcid.org/0000-0002-6510-5597","observed_orcids":["https://orcid.org/0000-0002-6510-5597"]},"institutions":[{"id":"https://openalex.org/I66906201","display_name":"University of Yamanashi","ror":"https://ror.org/059x21724","country_code":"JP","type":"education","lineage":["https://openalex.org/I66906201"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Eiichi KONDOH","raw_affiliation_strings":["University of Yamanashi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Yamanashi","institution_ids":["https://openalex.org/I66906201"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102786614","display_name":"Atsushi Takahashi","orcid":"https://orcid.org/0000-0002-0757-0167","observed_orcids":["https://orcid.org/0000-0002-0757-0167"]},"institutions":[{"id":"https://openalex.org/I66906201","display_name":"University of Yamanashi","ror":"https://ror.org/059x21724","country_code":"JP","type":"education","lineage":["https://openalex.org/I66906201"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Atsushi TAKAHASHI","raw_affiliation_strings":["University of Yamanashi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Yamanashi","institution_ids":["https://openalex.org/I66906201"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028626214","display_name":"Koki Shimada","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I66906201","display_name":"University of Yamanashi","ror":"https://ror.org/059x21724","country_code":"JP","type":"education","lineage":["https://openalex.org/I66906201"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koki SHIMADA","raw_affiliation_strings":["\u5c71\u68a8\u5927\u5b66 University of Yamanashi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u5c71\u68a8\u5927\u5b66 University of Yamanashi","institution_ids":["https://openalex.org/I66906201"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047228575","display_name":"Katsuya Suzuki","orcid":"https://orcid.org/0009-0008-2930-5365","observed_orcids":["https://orcid.org/0009-0008-2930-5365","https://orcid.org/0009-0001-1554-6650","https://orcid.org/0009-0001-8684-6108"]},"institutions":[{"id":"https://openalex.org/I66906201","display_name":"University of Yamanashi","ror":"https://ror.org/059x21724","country_code":"JP","type":"education","lineage":["https://openalex.org/I66906201"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Katsuya SUZUKI","raw_affiliation_strings":["University of Yamanashi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Yamanashi","institution_ids":["https://openalex.org/I66906201"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052580942","display_name":"Lianhua Jin","orcid":"https://orcid.org/0000-0002-0202-6605","observed_orcids":["https://orcid.org/0000-0002-0202-6605"]},"institutions":[{"id":"https://openalex.org/I66906201","display_name":"University of Yamanashi","ror":"https://ror.org/059x21724","country_code":"JP","type":"education","lineage":["https://openalex.org/I66906201"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Lianhua JIN","raw_affiliation_strings":["University of Yamanashi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Yamanashi","institution_ids":["https://openalex.org/I66906201"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101931146","display_name":"Satomi Hamada","orcid":"https://orcid.org/0000-0002-6419-9587","observed_orcids":["https://orcid.org/0000-0002-6419-9587"]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satomi HAMADA","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086154672","display_name":"Ryota Koshino","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryota KOSHINO","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112293268","display_name":"Shohei Shima","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shohei SHIMA","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112555556","display_name":"Hirokuni Hiyama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hirokuni HIYAMA","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"2020","issue":"0","first_page":"17E04","last_page":"17E04"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.0019000000320374966,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanoparticle-detection","display_name":"nanoparticle detection","score":0.9259999990463257},{"id":"https://openalex.org/keywords/thin-films","display_name":"thin films","score":0.8109999895095825},{"id":"https://openalex.org/keywords/ellipsometry","display_name":"ellipsometry","score":0.9169999957084656},{"id":"https://openalex.org/keywords/optical-interference","display_name":"optical interference","score":0.9190000295639038},{"id":"https://openalex.org/keywords/polarization-of-reflected-light","display_name":"reflected light polarization","score":0.7910000085830688}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7616623044013977},{"id":"https://openalex.org/C18293161","wikidata":"https://www.wikidata.org/wiki/Q898774","display_name":"Ellipsometry","level":3,"score":0.7345247268676758},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7029575705528259},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.561116635799408},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.5537301301956177},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.5128207802772522},{"id":"https://openalex.org/C2778517922","wikidata":"https://www.wikidata.org/wiki/Q7140482","display_name":"Particle (ecology)","level":2,"score":0.5003218650817871},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.495414137840271},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4913159906864166},{"id":"https://openalex.org/C109693293","wikidata":"https://www.wikidata.org/wiki/Q1496072","display_name":"Inkwell","level":2,"score":0.4825936555862427},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.48144954442977905},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.47314774990081787},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.46046918630599976},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1747773289680481},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15384119749069214},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07626476883888245},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1299/jsmekanto.2020.17e04","doi":"https://doi.org/10.1299/jsmekanto.2020.17e04","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmekanto.2020.17e04","pdf_url":"https://www.jstage.jst.go.jp/article/jsmekanto/2020/0/2020_17E04/_pdf","source":{"id":"https://openalex.org/S4210228287","display_name":"The Proceedings of Conference of Kanto Branch","issn_l":"2424-2691","issn":["2424-2691"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310313571","host_organization_name":"Japan Society Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4310313571"],"host_organization_lineage_names":["Japan Society Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of Conference of Kanto Branch","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1299/jsmekanto.2020.17e04","doi":"https://doi.org/10.1299/jsmekanto.2020.17e04","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmekanto.2020.17e04","pdf_url":"https://www.jstage.jst.go.jp/article/jsmekanto/2020/0/2020_17E04/_pdf","source":{"id":"https://openalex.org/S4210228287","display_name":"The Proceedings of Conference of Kanto Branch","issn_l":"2424-2691","issn":["2424-2691"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310313571","host_organization_name":"Japan Society Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4310313571"],"host_organization_lineage_names":["Japan Society Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of Conference of Kanto Branch","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3135582239.pdf","grobid_xml":"https://content.openalex.org/works/W3135582239.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4380450356","https://openalex.org/W1620454851","https://openalex.org/W2714680181","https://openalex.org/W2569199703","https://openalex.org/W2314507852","https://openalex.org/W7073843430","https://openalex.org/W4391451594","https://openalex.org/W7001532573","https://openalex.org/W4248655123","https://openalex.org/W7010518306"],"abstract_inverted_index":{"The":[0,34],"paper":[1],"reports":[2],"the":[3,37,50,54,61,66],"detection":[4],"of":[5,36,39,63,65],"sub-100":[6],"nm":[7],"particles,":[8],"attached":[9],"on":[10],"SiO2-coated":[11],"wafers,":[12],"with":[13],"ellipsometry.":[14],"Particle":[15],"attachment":[16],"was":[17,42],"carried":[18],"out":[19],"by":[20],"using":[21],"an":[22],"industrial":[23],"ink-jet":[24],"printer":[25],"that":[26,49],"enables":[27],"precise,":[28],"accurate":[29],"and":[30],"reproducible":[31],"particle":[32],"attachment.":[33],"enhancement":[35],"change":[38,62],"ellipsometric":[40],"parameters":[41],"observed":[43],"at":[44],"particular":[45],"wavelengths.":[46],"This":[47],"suggest":[48],"optical":[51],"interference":[52],"within":[53],"films":[55],"plays":[56],"a":[57],"crucial":[58],"role":[59],"in":[60],"polarization":[64],"reflected":[67],"light.":[68]},"counts_by_year":[],"updated_date":"2026-10-26T11:51:55.731654","created_date":"2021-03-15T00:00:00"}