{"id":"https://openalex.org/W3127084336","doi":"https://doi.org/10.1109/ted.2021.3055171","title":"Inelastic Electron Tunneling Spectroscopy: Investigation of Bulk Dielectrics and Molecules","display_name":"Inelastic Electron Tunneling Spectroscopy: Investigation of Bulk Dielectrics and Molecules","publication_year":2021,"publication_date":"2021-02-09","ids":{"openalex":"https://openalex.org/W3127084336","doi":"https://doi.org/10.1109/ted.2021.3055171","mag":"3127084336"},"language":"en","primary_location":{"id":"doi:10.1109/ted.2021.3055171","doi":"https://doi.org/10.1109/ted.2021.3055171","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ted.2021.3055171","pdf_url":null,"source":{"id":"https://openalex.org/S162355128","display_name":"IEEE Transactions on Electron Devices","issn_l":"0018-9383","issn":["0018-9383","1557-9646"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-3","norway-2","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Electron Devices","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100713609","display_name":"Young-Sang Kim","orcid":"https://orcid.org/0000-0002-8994-4897","observed_orcids":["https://orcid.org/0000-0002-8994-4897"]},"institutions":[{"id":"https://openalex.org/I4405270614","display_name":"Defense Microelectronics Activity","ror":"https://ror.org/0118apn21","country_code":"US","type":"government","lineage":["https://openalex.org/I4405270614"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Youngsang Kim","raw_affiliation_strings":["Manufacturing Division, Defense Microelectronics Activity (DMEA), McClellan Park, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Manufacturing Division, Defense Microelectronics Activity (DMEA), McClellan Park, CA, USA","institution_ids":["https://openalex.org/I4405270614"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062846696","display_name":"Soon Woong Chang","orcid":"https://orcid.org/0000-0002-6005-1796","observed_orcids":["https://orcid.org/0000-0002-6005-1796"]},"institutions":[{"id":"https://openalex.org/I4405270614","display_name":"Defense Microelectronics Activity","ror":"https://ror.org/0118apn21","country_code":"US","type":"government","lineage":["https://openalex.org/I4405270614"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Soon W. Chang","raw_affiliation_strings":["Manufacturing Division, Defense Microelectronics Activity (DMEA), McClellan Park, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Manufacturing Division, Defense Microelectronics Activity (DMEA), McClellan Park, CA, USA","institution_ids":["https://openalex.org/I4405270614"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4405270614"],"apc_list":{"value":2045,"currency":"USD","value_usd":2045},"apc_paid":null,"fwci":0.2203,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.3924453,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"68","issue":"4","first_page":"1411","last_page":"1419"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10913","display_name":"Molecular Junctions and Nanostructures","score":0.7968999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10913","display_name":"Molecular Junctions and Nanostructures","score":0.7968999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.06920000165700912,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.0681999996304512,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inelastic-electron-tunneling-spectroscopy","display_name":"inelastic electron tunneling spectroscopy","score":1.0},{"id":"https://openalex.org/keywords/thin-gate-dielectrics","display_name":"thin gate dielectrics","score":0.9480000138282776},{"id":"https://openalex.org/keywords/dna-molecules","display_name":"DNA molecules","score":0.7360000014305115},{"id":"https://openalex.org/keywords/functional-molecules","display_name":"functional molecules","score":0.7820000052452087},{"id":"https://openalex.org/keywords/diatomic-molecules","display_name":"diatomic molecules","score":0.9990000128746033},{"id":"https://openalex.org/keywords/molecular-devices","display_name":"molecular devices","score":0.6460000276565552},{"id":"https://openalex.org/keywords/molecular-conformation","display_name":"molecular conformation","score":0.6679999828338623},{"id":"https://openalex.org/keywords/isomerization","display_name":"isomerization","score":0.8489999771118164},{"id":"https://openalex.org/keywords/mos-structures","display_name":"MOS structures","score":0.6669999957084656},{"id":"https://openalex.org/keywords/contact-geometry","display_name":"contact geometry","score":0.6100000143051147}],"concepts":[{"id":"https://openalex.org/C2779762857","wikidata":"https://www.wikidata.org/wiki/Q6028389","display_name":"Inelastic electron tunneling spectroscopy","level":4,"score":0.925834059715271},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6363186836242676},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.5824942588806152},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.5590798854827881},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.5431666374206543},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.505530834197998},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.50407874584198},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.4874310791492462},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.478675901889801},{"id":"https://openalex.org/C111806078","wikidata":"https://www.wikidata.org/wiki/Q1751859","display_name":"Diatomic molecule","level":3,"score":0.46183064579963684},{"id":"https://openalex.org/C194577767","wikidata":"https://www.wikidata.org/wiki/Q1651687","display_name":"Scanning tunneling spectroscopy","level":3,"score":0.4152040183544159},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.41023126244544983},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3988904356956482},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.25030168890953064},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1298178732395172},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ted.2021.3055171","doi":"https://doi.org/10.1109/ted.2021.3055171","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ted.2021.3055171","pdf_url":null,"source":{"id":"https://openalex.org/S162355128","display_name":"IEEE Transactions on Electron Devices","issn_l":"0018-9383","issn":["0018-9383","1557-9646"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-3","norway-2","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Electron Devices","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":89,"referenced_works":["https://openalex.org/W1538206158","https://openalex.org/W1560170789","https://openalex.org/W1659392096","https://openalex.org/W1968083598","https://openalex.org/W1969609962","https://openalex.org/W1970486930","https://openalex.org/W1971622317","https://openalex.org/W1975002766","https://openalex.org/W1979561235","https://openalex.org/W1982028521","https://openalex.org/W1982932882","https://openalex.org/W1983972377","https://openalex.org/W1983979841","https://openalex.org/W1984183774","https://openalex.org/W1986611774","https://openalex.org/W1987498339","https://openalex.org/W1990212565","https://openalex.org/W1991016768","https://openalex.org/W2006395161","https://openalex.org/W2006414802","https://openalex.org/W2009115958","https://openalex.org/W2011625501","https://openalex.org/W2012342076","https://openalex.org/W2012630472","https://openalex.org/W2015267621","https://openalex.org/W2017151946","https://openalex.org/W2017965567","https://openalex.org/W2018485676","https://openalex.org/W2020204456","https://openalex.org/W2021348697","https://openalex.org/W2023150460","https://openalex.org/W2024597379","https://openalex.org/W2024636847","https://openalex.org/W2026328391","https://openalex.org/W2028820467","https://openalex.org/W2033012411","https://openalex.org/W2034554140","https://openalex.org/W2035742635","https://openalex.org/W2040413069","https://openalex.org/W2040437019","https://openalex.org/W2045725637","https://openalex.org/W2047652924","https://openalex.org/W2051961045","https://openalex.org/W2052112789","https://openalex.org/W2052677803","https://openalex.org/W2053885132","https://openalex.org/W2055299579","https://openalex.org/W2060705569","https://openalex.org/W2061945872","https://openalex.org/W2064227131","https://openalex.org/W2064668711","https://openalex.org/W2065947846","https://openalex.org/W2072472745","https://openalex.org/W2072579171","https://openalex.org/W2073544476","https://openalex.org/W2080604257","https://openalex.org/W2083536928","https://openalex.org/W2087634138","https://openalex.org/W2090426257","https://openalex.org/W2092226069","https://openalex.org/W2092637018","https://openalex.org/W2096415328","https://openalex.org/W2097541628","https://openalex.org/W2110629172","https://openalex.org/W2113946341","https://openalex.org/W2117027185","https://openalex.org/W2120295732","https://openalex.org/W2124075039","https://openalex.org/W2128234908","https://openalex.org/W2130267420","https://openalex.org/W2142436266","https://openalex.org/W2149758671","https://openalex.org/W2150948628","https://openalex.org/W2152297286","https://openalex.org/W2152818524","https://openalex.org/W2167470295","https://openalex.org/W2247876845","https://openalex.org/W2301968276","https://openalex.org/W2318626006","https://openalex.org/W2332166052","https://openalex.org/W2477417691","https://openalex.org/W2620855158","https://openalex.org/W2773864838","https://openalex.org/W2787257147","https://openalex.org/W2800927632","https://openalex.org/W2810770499","https://openalex.org/W2951154957","https://openalex.org/W3015927617","https://openalex.org/W4245555130"],"related_works":["https://openalex.org/W2183981536","https://openalex.org/W2090426257","https://openalex.org/W2156933559","https://openalex.org/W2334423365","https://openalex.org/W1825610206","https://openalex.org/W4206371751","https://openalex.org/W2060705569","https://openalex.org/W2107204181","https://openalex.org/W2318626006","https://openalex.org/W2520818675"],"abstract_inverted_index":{"To":[0],"overcome":[1],"the":[2,6,41,51,70,82],"numerous":[3],"challenges":[4],"for":[5],"miniaturization":[7],"of":[8,44,84,89],"complementary":[9],"metal-oxide-semiconductor":[10,64],"(CMOS)":[11],"technology,":[12],"diverse":[13],"materials":[14],"have":[15],"been":[16,28],"examined":[17],"using":[18],"various":[19],"characterization":[20],"methods.":[21],"Inelastic":[22],"electron":[23],"tunneling":[24],"spectroscopy":[25],"(IETS)":[26],"has":[27],"regarded":[29],"as":[30,67,69],"a":[31],"critical":[32],"measurement":[33],"technique":[34],"to":[35],"scrutinize":[36],"materials.":[37],"This":[38,79],"is":[39],"because":[40],"high":[42],"sensitivity":[43],"IETS":[45,85,90],"can":[46],"provide":[47],"important":[48],"information":[49],"regarding":[50],"material":[52],"structures":[53],"and":[54,61,73,86,100],"molecular":[55,71,77],"compositions":[56],"(bonding":[57],"structures,":[58,66],"impurities,":[59],"defects,":[60],"traps)":[62],"in":[63,76],"(MOS)":[65],"well":[68],"conformation/isomerization,":[72],"contact":[74],"geometry":[75],"devices.":[78],"review":[80],"introduces":[81],"background":[83],"recent":[87],"applications":[88],"on":[91],"thin":[92],"gate":[93],"dielectrics,":[94],"large":[95],"DNA":[96],"molecules,":[97,99],"functional":[98],"diatomic":[101],"molecules.":[102]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2021-02-15T00:00:00"}