{"id":"https://openalex.org/W3116530367","doi":"https://doi.org/10.31438/trf.hh2000.17","title":"A High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump","display_name":"A High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump","publication_year":2000,"publication_date":"2000-06-04","ids":{"openalex":"https://openalex.org/W3116530367","doi":"https://doi.org/10.31438/trf.hh2000.17","mag":"3116530367"},"language":"en","primary_location":{"id":"doi:10.31438/trf.hh2000.17","doi":"https://doi.org/10.31438/trf.hh2000.17","is_oa":true,"landing_page_url":"https://doi.org/10.31438/trf.hh2000.17","pdf_url":"https://doi.org/10.31438/trf.hh2000.17","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.31438/trf.hh2000.17","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085125863","display_name":"Hanqing Li","orcid":"https://orcid.org/0000-0002-8837-532X","observed_orcids":["https://orcid.org/0000-0002-8837-532X"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H.Q. Li","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109131933","display_name":"David C. Roberts","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.C. Roberts","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":null,"display_name":"J.L. Steyn","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.L. Steyn","raw_affiliation_strings":["Massachusetts Institute of Technology Cambridge, MA 02139","Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022108747","display_name":"Kevin T. Turner","orcid":"https://orcid.org/0000-0003-4963-4568","observed_orcids":["https://orcid.org/0000-0003-4963-4568"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.T. Turner","raw_affiliation_strings":["Massachusetts Institute of Technology Cambridge, MA 02139","Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089574101","display_name":"Jorge A. Carretero","orcid":"https://orcid.org/0000-0002-6203-958X","observed_orcids":["https://orcid.org/0000-0002-6203-958X"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.A. Carretero","raw_affiliation_strings":["Massachusetts Institute of Technology Cambridge, MA 02139","Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091737494","display_name":"Onnik Yaglioglu","orcid":"https://orcid.org/0000-0002-5779-9891","observed_orcids":["https://orcid.org/0000-0002-5779-9891"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"O. Yaglioglu","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044954332","display_name":"Yu\u2010Hsuan Su","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y.-H. Su","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053171053","display_name":"Laxman Saggere","orcid":"https://orcid.org/0000-0001-6429-6240","observed_orcids":["https://orcid.org/0000-0001-6429-6240"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Saggere","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023705717","display_name":"Nesbitt W. Hagood","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"N.W. Hagood","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058736457","display_name":"L. Spearing","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Spearing","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032540012","display_name":"Richard Mlcak","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Mlcak","raw_affiliation_strings":["Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","Massachusetts Institute of Technology Cambridge, MA 02139"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]},{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067000740","display_name":"Kenneth Breuer","orcid":"https://orcid.org/0000-0002-5122-2231","observed_orcids":["https://orcid.org/0000-0002-5122-2231"]},"institutions":[{"id":"https://openalex.org/I27804330","display_name":"Brown University","ror":"https://ror.org/05gq02987","country_code":"US","type":"education","lineage":["https://openalex.org/I27804330"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.S. Breuer","raw_affiliation_strings":["Massachusetts Institute of Technology Cambridge, MA 02139","Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology Cambridge, MA 02139","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Boston Microsystems, Inc. Brown University Woburn, MA 01801 Providence, RI 02912","institution_ids":["https://openalex.org/I27804330"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101956235","display_name":"Martin A. Schmidt","orcid":"https://orcid.org/0000-0003-3669-7877","observed_orcids":["https://orcid.org/0000-0003-3669-7877","https://orcid.org/0000-0003-4012-0608"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M.A. Schmidt","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":11.4633,"has_fulltext":true,"cited_by_count":38,"citation_normalized_percentile":{"value":0.98807192,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"69","last_page":"72"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9146000146865845,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9146000146865845,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.08089999854564667,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.002400000113993883,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectric-micropump","display_name":"piezoelectric micropump","score":0.8920000195503235},{"id":"https://openalex.org/keywords/mems-micropump","display_name":"MEMS micropump","score":0.9350000023841858},{"id":"https://openalex.org/keywords/high-flow-rate","display_name":"high flow rate","score":0.7570000290870667},{"id":"https://openalex.org/keywords/piezoelectric-actuation","display_name":"piezoelectric actuation","score":0.7889999747276306},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"silicon-on-insulator","score":0.8149999976158142},{"id":"https://openalex.org/keywords/eutectic-bonding","display_name":"eutectic bonding","score":0.9430000185966492},{"id":"https://openalex.org/keywords/anodic-bonding","display_name":"anodic bonding","score":1.0},{"id":"https://openalex.org/keywords/thin-membranes","display_name":"thin membranes","score":0.4819999933242798},{"id":"https://openalex.org/keywords/passive-valves","display_name":"passive valves","score":0.7879999876022339},{"id":"https://openalex.org/keywords/stress-reduction","display_name":"stress reduction","score":0.4339999854564667},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.6399999856948853}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8537982702255249},{"id":"https://openalex.org/C76272257","wikidata":"https://www.wikidata.org/wiki/Q1933964","display_name":"Micropump","level":2,"score":0.8522226214408875},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7780991792678833},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.704649806022644},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6380171775817871},{"id":"https://openalex.org/C201414436","wikidata":"https://www.wikidata.org/wiki/Q567503","display_name":"Anodic bonding","level":3,"score":0.60157710313797},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.591032087802887},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5387023687362671},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.5305381417274475},{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.510767936706543},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5069558620452881},{"id":"https://openalex.org/C37487178","wikidata":"https://www.wikidata.org/wiki/Q5414402","display_name":"Eutectic bonding","level":4,"score":0.4697473645210266},{"id":"https://openalex.org/C18168003","wikidata":"https://www.wikidata.org/wiki/Q628595","display_name":"Eutectic system","level":3,"score":0.4606075584888458},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3866526484489441},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.33985716104507446},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19405874609947205},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2780026712","wikidata":"https://www.wikidata.org/wiki/Q37756","display_name":"Alloy","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.31438/trf.hh2000.17","doi":"https://doi.org/10.31438/trf.hh2000.17","is_oa":true,"landing_page_url":"https://doi.org/10.31438/trf.hh2000.17","pdf_url":"https://doi.org/10.31438/trf.hh2000.17","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"}],"best_oa_location":{"id":"doi:10.31438/trf.hh2000.17","doi":"https://doi.org/10.31438/trf.hh2000.17","is_oa":true,"landing_page_url":"https://doi.org/10.31438/trf.hh2000.17","pdf_url":"https://doi.org/10.31438/trf.hh2000.17","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320332180","display_name":"Defense Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3116530367.pdf","grobid_xml":"https://content.openalex.org/works/W3116530367.grobid-xml"},"referenced_works_count":6,"referenced_works":["https://openalex.org/W1763956801","https://openalex.org/W2016525941","https://openalex.org/W2019014472","https://openalex.org/W2035261140","https://openalex.org/W2108060081","https://openalex.org/W2111487050"],"related_works":["https://openalex.org/W2392123276","https://openalex.org/W2162132620","https://openalex.org/W2372106990","https://openalex.org/W2182258582","https://openalex.org/W2369178060","https://openalex.org/W2364757449","https://openalex.org/W2601581961","https://openalex.org/W2054487527","https://openalex.org/W2566534803","https://openalex.org/W3000419419"],"abstract_inverted_index":{"A":[0],"piezoelectrically":[1],"driven":[2],"fluidic":[3],"micropump":[4],"was":[5,13,102],"fabricated":[6],"and":[7,28,34,53,60,87,90,104,118,127],"tested.Microelectromechanical":[8],"systems":[9],"(MEMS)":[10],"fabrication":[11],"technology":[12],"used.Small":[14],"cylindrical":[15],"piezoelectric":[16,123],"material":[17,124],"elements":[18],"were":[19,39,93],"integrated":[20],"with":[21],"microfabricated":[22],"silicon,":[23],"silicon":[24],"on":[25,115,121],"insulator":[26],"(SOI),":[27],"glass":[29],"chips":[30],"using":[31],"eutectic":[32,89],"bonding":[33,36,92],"anodic":[35,91],"processes.SO1":[37],"wafers":[38],"used":[40],"to":[41],"form":[42],"the":[43,47,63,78,81,108,111,116,122],"thin":[44],"membranes":[45,83],"within":[46],"moving":[48],"parts":[49],"(a":[50],"drive":[51],"element":[52],"two":[54],"passive":[55],"valves).The":[56],"design,":[57],"microfabrication":[58],"process,":[59],"assembly":[61],"of":[62,74,80,107,110],"device":[64],"are":[65,125],"described":[66],"in":[67],"this":[68],"paper.Fabrication":[69],"issues":[70],"such":[71],"as":[72,97,99],"control":[73],"fillet":[75],"radii":[76],"at":[77],"feet":[79],"Si":[82],"for":[84],"stress":[85],"reduction":[86],"simultaneous":[88],"discussed.A":[94],"flow":[95,113],"rate":[96,114],"high":[98],"3000":[100],"ul/min":[101],"recorded.Experimental":[103],"simulation":[105],"results":[106],"dependences":[109],"pump":[112],"voltage":[117],"frequency":[119],"applied":[120],"shown":[126],"discussed.":[128]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2021-01-05T00:00:00"}