{"id":"https://openalex.org/W3112104331","doi":"https://doi.org/10.1134/s1063782620120246","title":"Calculation of the Ga+ FIB Ion Dose Distribution by SEM Image","display_name":"Calculation of the Ga+ FIB Ion Dose Distribution by SEM Image","publication_year":2020,"publication_date":"2020-12-01","ids":{"openalex":"https://openalex.org/W3112104331","doi":"https://doi.org/10.1134/s1063782620120246","mag":"3112104331"},"language":"en","primary_location":{"id":"doi:10.1134/s1063782620120246","doi":"https://doi.org/10.1134/s1063782620120246","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1063782620120246","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087062500","display_name":"Maxim I. Mitrofanov","orcid":"https://orcid.org/0000-0002-0351-8484","observed_orcids":["https://orcid.org/0000-0002-0351-8484"]},"institutions":[{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"M. I. Mitrofanov","raw_affiliation_strings":["Ioffe Institute, 194021, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ioffe Institute, 194021, St. Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074263020","display_name":"G. V. Voznyuk","orcid":"https://orcid.org/0009-0004-0718-1649","observed_orcids":["https://orcid.org/0009-0004-0718-1649"]},"institutions":[{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"G. V. Voznyuk","raw_affiliation_strings":["Ioffe Institute, 194021, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ioffe Institute, 194021, St. Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064069484","display_name":"Sergey N. Rodin","orcid":"https://orcid.org/0000-0003-2236-8642","observed_orcids":["https://orcid.org/0000-0003-2236-8642"]},"institutions":[{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"S. N. Rodin","raw_affiliation_strings":["Ioffe Institute, 194021, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ioffe Institute, 194021, St. Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010452163","display_name":"Wsevolod V. Lundin","orcid":"https://orcid.org/0000-0002-0852-9561","observed_orcids":["https://orcid.org/0000-0002-0852-9561"]},"institutions":[{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"W. V. Lundin","raw_affiliation_strings":["Ioffe Institute, 194021, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ioffe Institute, 194021, St. Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039607029","display_name":"V. P. Evtikhiev","orcid":"https://orcid.org/0000-0002-5608-2725","observed_orcids":["https://orcid.org/0000-0002-5608-2725"]},"institutions":[{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"V. P. Evtikhiev","raw_affiliation_strings":["Ioffe Institute, 194021, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ioffe Institute, 194021, St. Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029509861","display_name":"A. F. Tsatsul\u2019nikov","orcid":"https://orcid.org/0000-0002-5078-8946","observed_orcids":["https://orcid.org/0000-0002-5078-8946"]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"A. F. Tsatsulnikov","raw_affiliation_strings":["SHM R and E Center, RAS, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SHM R and E Center, RAS, St. Petersburg, Russia","institution_ids":["https://openalex.org/I1313323035"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5017499791","display_name":"M. A. Kaliteevski","orcid":"https://orcid.org/0000-0003-1408-9678","observed_orcids":["https://orcid.org/0000-0003-1408-9678"]},"institutions":[{"id":"https://openalex.org/I173089394","display_name":"ITMO University","ror":"https://ror.org/04txgxn49","country_code":"RU","type":"education","lineage":["https://openalex.org/I173089394"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"M. A. Kaliteevski","raw_affiliation_strings":["ITMO University, 197101, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ITMO University, 197101, St. Petersburg, Russia","institution_ids":["https://openalex.org/I173089394"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5010452163","https://openalex.org/A5017499791","https://openalex.org/A5029509861","https://openalex.org/A5039607029","https://openalex.org/A5064069484","https://openalex.org/A5074263020","https://openalex.org/A5087062500"],"corresponding_institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I173089394","https://openalex.org/I95568926"],"apc_list":null,"apc_paid":null,"fwci":0.3533,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.43996833,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"54","issue":"12","first_page":"1682","last_page":"1684"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9771000146865845,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9771000146865845,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.005200000014156103,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.004699999932199717,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"focused ion beam","score":0.8539999723434448},{"id":"https://openalex.org/keywords/gallium-ion-beam","display_name":"gallium ion beam","score":0.8190000057220459},{"id":"https://openalex.org/keywords/ion-irradiation","display_name":"ion irradiation","score":0.5450000166893005}],"concepts":[{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.6902653574943542},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.6544184684753418},{"id":"https://openalex.org/C34667332","wikidata":"https://www.wikidata.org/wiki/Q2582911","display_name":"Secondary electrons","level":3,"score":0.6242400407791138},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.6089247465133667},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5940272212028503},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.5106928944587708},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5047992467880249},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.46466386318206787},{"id":"https://openalex.org/C93106096","wikidata":"https://www.wikidata.org/wiki/Q17125820","display_name":"Ion beam deposition","level":4,"score":0.46189913153648376},{"id":"https://openalex.org/C93877712","wikidata":"https://www.wikidata.org/wiki/Q132560","display_name":"Electron microscope","level":2,"score":0.4106554090976715},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32096076011657715},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.29625803232192993},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2553551197052002},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.18555372953414917},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16524091362953186},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14851099252700806},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.10033616423606873},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.05965912342071533},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1134/s1063782620120246","doi":"https://doi.org/10.1134/s1063782620120246","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1063782620120246","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1996732969","https://openalex.org/W2007019865","https://openalex.org/W2039370162","https://openalex.org/W2917181432"],"related_works":["https://openalex.org/W1998904565","https://openalex.org/W2558162525","https://openalex.org/W2061333489","https://openalex.org/W2094383272","https://openalex.org/W2550140418","https://openalex.org/W2045309858","https://openalex.org/W6885059867","https://openalex.org/W1993374353","https://openalex.org/W1988293268","https://openalex.org/W2764780837"],"abstract_inverted_index":{"Abstract":[0],"A":[1],"new":[2],"approach":[3,19],"for":[4],"calculating":[5],"the":[6,12,23,26,32,36],"ion":[7,14,38],"dose":[8],"spatial":[9],"distribution":[10],"of":[11,25,31],"focused":[13,37],"beam":[15],"is":[16,20],"proposed.":[17],"The":[18],"based":[21],"on":[22],"analysis":[24],"secondary":[27],"electron":[28],"microscopy":[29],"image":[30],"area":[33],"irradiated":[34],"by":[35],"beam.":[39]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2020-12-21T00:00:00"}