{"id":"https://openalex.org/W3111577458","doi":"https://doi.org/10.1088/1361-6528/abd278","title":"Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET","display_name":"Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET","publication_year":2020,"publication_date":"2020-12-10","ids":{"openalex":"https://openalex.org/W3111577458","doi":"https://doi.org/10.1088/1361-6528/abd278","mag":"3111577458","pmid":"https://pubmed.ncbi.nlm.nih.gov/33302263"},"language":"en","primary_location":{"id":"doi:10.1088/1361-6528/abd278","doi":"https://doi.org/10.1088/1361-6528/abd278","is_oa":false,"landing_page_url":"https://doi.org/10.1088/1361-6528/abd278","pdf_url":null,"source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102724635","display_name":"Kookjin Lee","orcid":"https://orcid.org/0000-0002-9896-1090","observed_orcids":["https://orcid.org/0000-0002-9896-1090"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Kookjin Lee","raw_affiliation_strings":["Department of Materials Science, KU Leuven, Leuven, Belgium","Imec, Leuven, Belgium"],"raw_orcid":"https://orcid.org/0000-0002-9896-1090","affiliations":[{"raw_affiliation_string":"Department of Materials Science, KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011162919","display_name":"Yeonsu Kim","orcid":"https://orcid.org/0000-0002-0393-8083","observed_orcids":["https://orcid.org/0000-0002-0393-8083","https://orcid.org/0009-0005-6703-1228"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yeonsu Kim","raw_affiliation_strings":["School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059420075","display_name":"Hyebin Lee","orcid":"https://orcid.org/0000-0002-1700-4169","observed_orcids":["https://orcid.org/0000-0002-1700-4169"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyebin Lee","raw_affiliation_strings":["Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea","School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea","institution_ids":["https://openalex.org/I4405259277"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101647024","display_name":"So Jeong Park","orcid":"https://orcid.org/0000-0002-5431-7690","observed_orcids":["https://orcid.org/0000-0002-5431-7690"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sojeong Park","raw_affiliation_strings":["School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-5431-7690","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100459264","display_name":"Yongwoo Lee","orcid":"https://orcid.org/0000-0003-3224-1960","observed_orcids":["https://orcid.org/0000-0003-3224-1960"]},"institutions":[{"id":"https://openalex.org/I110273157","display_name":"Kookmin University","ror":"https://ror.org/0049erg63","country_code":"KR","type":"education","lineage":["https://openalex.org/I110273157"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yongwoo Lee","raw_affiliation_strings":["School of Electrical Engineering, Kookmin University, Seoul 02707, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-3224-1960","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Kookmin University, Seoul 02707, Republic of Korea","institution_ids":["https://openalex.org/I110273157"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009137195","display_name":"Min\u2010Kyu Joo","orcid":"https://orcid.org/0000-0001-7537-1015","observed_orcids":["https://orcid.org/0000-0001-7537-1015"]},"institutions":[{"id":"https://openalex.org/I31766871","display_name":"Sookmyung Women's University","ror":"https://ror.org/00vvvt117","country_code":"KR","type":"education","lineage":["https://openalex.org/I31766871"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Min-Kyu Joo","raw_affiliation_strings":["Department of Applied Physics, Sookmyung Women's University, Seoul 04310, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0001-7537-1015","affiliations":[{"raw_affiliation_string":"Department of Applied Physics, Sookmyung Women's University, Seoul 04310, Republic of Korea","institution_ids":["https://openalex.org/I31766871"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101760275","display_name":"Hyunjin Ji","orcid":"https://orcid.org/0000-0002-3967-6900","observed_orcids":["https://orcid.org/0000-0002-3967-6900"]},"institutions":[{"id":"https://openalex.org/I40542001","display_name":"University of Ulsan","ror":"https://ror.org/02c2f8975","country_code":"KR","type":"education","lineage":["https://openalex.org/I40542001"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyunjin Ji","raw_affiliation_strings":["School of Electrical Engineering, University of Ulsan, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-3967-6900","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, University of Ulsan, Republic of Korea","institution_ids":["https://openalex.org/I40542001"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100415738","display_name":"Jae Wook Lee","orcid":"https://orcid.org/0000-0002-8756-0195","observed_orcids":["https://orcid.org/0000-0002-8756-0195","https://orcid.org/0009-0003-5670-1586"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaewoo Lee","raw_affiliation_strings":["Interdisciplinary Program for Artificial Intelligence Smart Convergence Technology, Korea University, Sejong 30019, Republic of Korea","School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interdisciplinary Program for Artificial Intelligence Smart Convergence Technology, Korea University, Sejong 30019, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078842673","display_name":"Jungu Chun","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jungu Chun","raw_affiliation_strings":["Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea","School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea","institution_ids":["https://openalex.org/I4405259277"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089828936","display_name":"Moonsoo Sung","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4405272917","display_name":"SK Hynix (South Korea)","ror":"https://ror.org/04z2p0w98","country_code":"KR","type":"company","lineage":["https://openalex.org/I4405272917"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Moonsoo Sung","raw_affiliation_strings":["SK Hynix, Gyeonggi-do, Icheon-si, Republic of Korea","School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SK Hynix, Gyeonggi-do, Icheon-si, Republic of Korea","institution_ids":["https://openalex.org/I4405272917"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100548447","display_name":"Young-Hoon Cho","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Young-Hoon Cho","raw_affiliation_strings":["Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Samsung Electronics Co. Ltd, 1 Samsung-ro, Yongin-si, Gyeonggi-do 17113, Republic of Korea","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101868247","display_name":"Doyoon Kim","orcid":"https://orcid.org/0000-0002-4080-4076","observed_orcids":["https://orcid.org/0000-0002-4080-4076"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Doyoon Kim","raw_affiliation_strings":["School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101970491","display_name":"Junhee Choi","orcid":"https://orcid.org/0000-0002-3898-4047","observed_orcids":["https://orcid.org/0000-0002-3898-4047"]},"institutions":[{"id":"https://openalex.org/I4405261534","display_name":"Defense Agency for Technology and Quality","ror":"https://ror.org/05f1c3n42","country_code":"KR","type":"facility","lineage":["https://openalex.org/I1327899338","https://openalex.org/I1344042128","https://openalex.org/I2801339556","https://openalex.org/I4405261534"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Junhee Choi","raw_affiliation_strings":["Defense agency for technology and quality, 420 Dongjin-ro, Jinju-si, Gyeongsangnam-do 52851, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Defense agency for technology and quality, 420 Dongjin-ro, Jinju-si, Gyeongsangnam-do 52851, Republic of Korea","institution_ids":["https://openalex.org/I4405261534"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100415733","display_name":"Jae Woo Lee","orcid":"https://orcid.org/0000-0002-4876-3109","observed_orcids":["https://orcid.org/0000-0002-4876-3109","https://orcid.org/0009-0005-4449-3358"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jae Woo Lee","raw_affiliation_strings":["Interdisciplinary Program for Artificial Intelligence Smart Convergence Technology, Korea University, Sejong 30019, Republic of Korea","School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-4876-3109","affiliations":[{"raw_affiliation_string":"Interdisciplinary Program for Artificial Intelligence Smart Convergence Technology, Korea University, Sejong 30019, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069631852","display_name":"Dae\u2010Young Jeon","orcid":"https://orcid.org/0000-0002-3781-8514","observed_orcids":["https://orcid.org/0000-0002-3781-8514"]},"institutions":[{"id":"https://openalex.org/I58716616","display_name":"Korea Institute of Science and Technology","ror":"https://ror.org/05kzfa883","country_code":"KR","type":"facility","lineage":["https://openalex.org/I27494661","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I58716616"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Dae-Young Jeon","raw_affiliation_strings":["Institute of Advanced Composite Materials, Korea Institute of Science and Technology, Joellabuk-do 55324, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-3781-8514","affiliations":[{"raw_affiliation_string":"Institute of Advanced Composite Materials, Korea Institute of Science and Technology, Joellabuk-do 55324, Republic of Korea","institution_ids":["https://openalex.org/I58716616"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030691472","display_name":"Sung\u2010Jin Choi","orcid":"https://orcid.org/0000-0003-1301-2847","observed_orcids":["https://orcid.org/0000-0003-1301-2847"]},"institutions":[{"id":"https://openalex.org/I110273157","display_name":"Kookmin University","ror":"https://ror.org/0049erg63","country_code":"KR","type":"education","lineage":["https://openalex.org/I110273157"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sung-Jin Choi","raw_affiliation_strings":["School of Electrical Engineering, Kookmin University, Seoul 02707, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-1301-2847","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Kookmin University, Seoul 02707, Republic of Korea","institution_ids":["https://openalex.org/I110273157"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5045786579","display_name":"Gyu\u2010Tae Kim","orcid":"https://orcid.org/0000-0003-1966-8572","observed_orcids":["https://orcid.org/0000-0003-1966-8572"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Gyu-Tae Kim","raw_affiliation_strings":["School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-1966-8572","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":10,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":0.2579,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.51558381,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":93},"biblio":{"volume":"32","issue":"16","first_page":"165202","last_page":"165202"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8403000235557556,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.8403000235557556,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.1454000025987625,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.0026000000070780516,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interface-trap-density","display_name":"interface trap density","score":0.7549999952316284},{"id":"https://openalex.org/keywords/charge-trapping","display_name":"charge trapping","score":0.8870000243186951},{"id":"https://openalex.org/keywords/subthreshold-swing","display_name":"subthreshold swing","score":0.6980000138282776},{"id":"https://openalex.org/keywords/1-f-noise","display_name":"1/f noise","score":0.7319999933242798},{"id":"https://openalex.org/keywords/generation-recombination-noise","display_name":"generation-recombination noise","score":0.9810000061988831},{"id":"https://openalex.org/keywords/current-noise","display_name":"current fluctuations","score":0.5479999780654907},{"id":"https://openalex.org/keywords/mobility-fluctuations","display_name":"mobility fluctuations","score":0.7910000085830688},{"id":"https://openalex.org/keywords/s-parameters","display_name":"S-parameters","score":0.6320000290870667},{"id":"https://openalex.org/keywords/top-down-fabrication","display_name":"top-down fabrication","score":0.7360000014305115}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.825825572013855},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.60523521900177},{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.5797234177589417},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.5192618370056152},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5122910737991333},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4953393042087555},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45551198720932007},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.4142776131629944},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19737496972084045},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1873714029788971},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1532829999923706},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1088/1361-6528/abd278","doi":"https://doi.org/10.1088/1361-6528/abd278","is_oa":false,"landing_page_url":"https://doi.org/10.1088/1361-6528/abd278","pdf_url":null,"source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},{"id":"pmid:33302263","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/33302263","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W658393943","https://openalex.org/W1587386427","https://openalex.org/W1977247641","https://openalex.org/W1989815901","https://openalex.org/W1991376963","https://openalex.org/W2007415108","https://openalex.org/W2009957482","https://openalex.org/W2035374584","https://openalex.org/W2050733227","https://openalex.org/W2051985204","https://openalex.org/W2069452468","https://openalex.org/W2086103622","https://openalex.org/W2097429659","https://openalex.org/W2106388223","https://openalex.org/W2106998413","https://openalex.org/W2111050400","https://openalex.org/W2117318603","https://openalex.org/W2128153923","https://openalex.org/W2131742842","https://openalex.org/W2134638736","https://openalex.org/W2135818056","https://openalex.org/W2146999569","https://openalex.org/W2147731882","https://openalex.org/W2157726871","https://openalex.org/W2162494392","https://openalex.org/W2170118308","https://openalex.org/W2533440639","https://openalex.org/W2748264243","https://openalex.org/W2773423577","https://openalex.org/W2782496992","https://openalex.org/W2884995603","https://openalex.org/W2913404074","https://openalex.org/W3019288186","https://openalex.org/W3024774361","https://openalex.org/W3033454557","https://openalex.org/W3034477137","https://openalex.org/W6677298556","https://openalex.org/W6728618514"],"related_works":["https://openalex.org/W3151610866","https://openalex.org/W2125612778","https://openalex.org/W4312970880","https://openalex.org/W4238985611","https://openalex.org/W4393145706","https://openalex.org/W7165176024","https://openalex.org/W2909489952","https://openalex.org/W4399659851","https://openalex.org/W3134066544","https://openalex.org/W2998294912"],"abstract_inverted_index":{"Abstract":[0],"Through":[1],"time-dependent":[2],"defect":[3],"spectroscopy":[4],"and":[5,11,99,196],"low-frequency":[6],"noise":[7],"measurements,":[8],"we":[9],"investigate":[10],"characterize":[12],"the":[13,25,41,44,47,52,56,63,66,69,87,93,100,125,130,162,173,183,197],"differences":[14],"of":[15,24,65,89,175],"carrier":[16,163],"trapping":[17],"processes":[18],"occurred":[19],"by":[20,40,207],"different":[21],"interfaces":[22],"(top/sidewall)":[23],"gate-all-around":[26],"silicon":[27],"nanosheet":[28],"field-effect":[29],"transistor":[30],"(GAA":[31],"SiNS":[32,37,180],"FET).":[33],"In":[34,84,123,177],"a":[35],"GAA":[36,179],"FET":[38],"fabricated":[39],"top-down":[42],"process,":[43],"traps":[45,90],"at":[46,92],"sidewall":[48,94],"interface":[49,95,185],"significantly":[50,97],"affect":[51],"device":[53,67],"performance":[54],"as":[55,62,107],"width":[57,64],"decreases.":[58],"Compare":[59],"to":[60,76],"expectations,":[61],"decreases,":[68],"subthreshold":[70],"swing":[71],"(SS)":[72],"increases":[73,206],"from":[74],"120":[75],"230":[77],"mV/dec,":[78],"resulting":[79],"in":[80,142,154],"less":[81],"gate":[82],"controllability.":[83],"narrow-width":[85,155,178],"devices,":[86,144],"effect":[88],"located":[91],"is":[96,111,159],"dominant,":[98,195],"1/":[101],"f":[102],"2":[103],"noise,":[104,110],"also":[105],"known":[106],"generation\u2013recombination":[108],"(G\u2013R)":[109],"clearly":[112],"appeared":[113],"with":[114,152,166],"an":[115],"increased":[116,153],"time":[117],"constant":[118],"(":[119,188,200],"\u03c4":[120],"i":[121],").":[122],"addition,":[124],"probability":[126],"density":[127],"distributions":[128],"for":[129],"normalized":[131],"current":[132],"fluctuations":[133,168],"(\u0394":[134],"I":[135],"D":[136],")":[137,191,204],"show":[138],"only":[139],"one":[140],"Gaussian":[141],"wide-width":[143],"whereas":[145],"they":[146],"are":[147],"separated":[148],"into":[149],"four":[150],"Gaussians":[151],"devices.":[156],"Therefore,":[157],"fitting":[158],"performed":[160],"through":[161],"number":[164],"fluctuation-correlated":[165],"mobility":[167],"model":[169],"that":[170],"separately":[171],"considered":[172],"effects":[174],"sidewall.":[176],"FETs,":[181],"consequently,":[182],"extracted":[184],"trap":[186],"densities":[187],"N":[189],"T":[190],"distribution":[192,205],"becomes":[193],"more":[194,208],"scattering":[198],"parameter":[199],"\u03b1":[201],"S":[202],"C":[203],"than":[209],"double.":[210]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2020-12-21T00:00:00"}