{"id":"https://openalex.org/W3099059591","doi":"https://doi.org/10.1134/s1028335820100031","title":"A Novel Model of a Mode-Localized MEMS Accelerometer","display_name":"A Novel Model of a Mode-Localized MEMS Accelerometer","publication_year":2020,"publication_date":"2020-10-01","ids":{"openalex":"https://openalex.org/W3099059591","doi":"https://doi.org/10.1134/s1028335820100031","mag":"3099059591"},"language":"en","primary_location":{"id":"doi:10.1134/s1028335820100031","doi":"https://doi.org/10.1134/s1028335820100031","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1028335820100031","pdf_url":null,"source":{"id":"https://openalex.org/S97976655","display_name":"Doklady Physics","issn_l":"1028-3358","issn":["1028-3358","1562-6903"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Doklady Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5091716956","display_name":"Nikita Fedorovich Morozov","orcid":"https://orcid.org/0000-0003-3890-522X","observed_orcids":["https://orcid.org/0000-0003-3890-522X"]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]},{"id":"https://openalex.org/I172901346","display_name":"St Petersburg University","ror":"https://ror.org/023znxa73","country_code":"RU","type":"education","lineage":["https://openalex.org/I172901346"]},{"id":"https://openalex.org/I4210142628","display_name":"Institute of Problems of Mechanical Engineering","ror":"https://ror.org/047pt5178","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210142628","https://openalex.org/I4210164537"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"N. F. Morozov","raw_affiliation_strings":["Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","St. Petersburg University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I4210142628"]},{"raw_affiliation_string":"St. Petersburg University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I172901346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081766331","display_name":"\u0414. \u0410. \u0418\u043d\u0434\u0435\u0439\u0446\u0435\u0432","orcid":"https://orcid.org/0000-0001-9090-6970","observed_orcids":["https://orcid.org/0000-0001-9090-6970"]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]},{"id":"https://openalex.org/I212220629","display_name":"Peter the Great St. Petersburg Polytechnic University","ror":"https://ror.org/02x91aj62","country_code":"RU","type":"education","lineage":["https://openalex.org/I212220629"]},{"id":"https://openalex.org/I4210142628","display_name":"Institute of Problems of Mechanical Engineering","ror":"https://ror.org/047pt5178","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210142628","https://openalex.org/I4210164537"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"D. A. Indeitsev","raw_affiliation_strings":["Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I4210142628"]},{"raw_affiliation_string":"Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I212220629"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012444792","display_name":"V. S. Igumnova","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I212220629","display_name":"Peter the Great St. Petersburg Polytechnic University","ror":"https://ror.org/02x91aj62","country_code":"RU","type":"education","lineage":["https://openalex.org/I212220629"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. S. Igumnova","raw_affiliation_strings":["Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I212220629"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055788698","display_name":"Ya. V. Belyaev","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210144352","display_name":"State Research Center of the Russian Federation","ror":"https://ror.org/04qpssw85","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210144352"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Ya. V. Belyaev","raw_affiliation_strings":["Concern CSRI Elektropribor, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Concern CSRI Elektropribor, St. Petersburg, Russia","institution_ids":["https://openalex.org/I4210144352"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075740256","display_name":"Alexey V. Lukin","orcid":"https://orcid.org/0000-0003-2016-8612","observed_orcids":["https://orcid.org/0000-0003-2016-8612"]},"institutions":[{"id":"https://openalex.org/I212220629","display_name":"Peter the Great St. Petersburg Polytechnic University","ror":"https://ror.org/02x91aj62","country_code":"RU","type":"education","lineage":["https://openalex.org/I212220629"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. V. Lukin","raw_affiliation_strings":["Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I212220629"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011052775","display_name":"\u0418. \u0410. \u041f\u043e\u043f\u043e\u0432","orcid":"https://orcid.org/0000-0003-4425-9172","observed_orcids":["https://orcid.org/0000-0003-4425-9172","https://orcid.org/0009-0002-2708-2651"]},"institutions":[{"id":"https://openalex.org/I212220629","display_name":"Peter the Great St. Petersburg Polytechnic University","ror":"https://ror.org/02x91aj62","country_code":"RU","type":"education","lineage":["https://openalex.org/I212220629"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"I. A. Popov","raw_affiliation_strings":["Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I212220629"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079123363","display_name":"\u0428\u0442\u0443\u043a\u0438\u043d \u041b\u0435\u0432 \u0412\u0430\u0441\u0438\u043b\u044c\u0435\u0432\u0438\u0447","orcid":"https://orcid.org/0000-0002-8584-619X","observed_orcids":["https://orcid.org/0000-0002-8584-619X"]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]},{"id":"https://openalex.org/I212220629","display_name":"Peter the Great St. Petersburg Polytechnic University","ror":"https://ror.org/02x91aj62","country_code":"RU","type":"education","lineage":["https://openalex.org/I212220629"]},{"id":"https://openalex.org/I4210142628","display_name":"Institute of Problems of Mechanical Engineering","ror":"https://ror.org/047pt5178","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210142628","https://openalex.org/I4210164537"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"L. V. Shtukin","raw_affiliation_strings":["Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Problems in Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia","institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I4210142628"]},{"raw_affiliation_string":"Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia","institution_ids":["https://openalex.org/I212220629"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5011052775","https://openalex.org/A5091716956"],"corresponding_institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I172901346","https://openalex.org/I212220629","https://openalex.org/I4210142628"],"apc_list":null,"apc_paid":null,"fwci":0.6024,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.62023426,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"65","issue":"10","first_page":"371","last_page":"375"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-accelerometer","display_name":"MEMS accelerometer","score":0.9959999918937683},{"id":"https://openalex.org/keywords/mode-localization","display_name":"mode localization","score":0.7850000262260437},{"id":"https://openalex.org/keywords/electrostatic-coupling","display_name":"electrostatic coupling","score":0.7400000095367432},{"id":"https://openalex.org/keywords/sensor-sensitivity","display_name":"sensor sensitivity","score":0.6710000038146973},{"id":"https://openalex.org/keywords/natural-frequency-shift","display_name":"natural frequency shift","score":0.6399999856948853},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"microelectromechanical systems","score":0.6240000128746033}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7831538915634155},{"id":"https://openalex.org/C110407247","wikidata":"https://www.wikidata.org/wiki/Q122508","display_name":"Inertia","level":2,"score":0.6691668033599854},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6669458150863647},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.6538235545158386},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.6191677451133728},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5992996096611023},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5384156107902527},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5101628303527832},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.5093125104904175},{"id":"https://openalex.org/C71139939","wikidata":"https://www.wikidata.org/wiki/Q910194","display_name":"Modal","level":2,"score":0.4960196912288666},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4588845372200012},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.4128153920173645},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.39240413904190063},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3620193600654602},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.23036423325538635},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.230208158493042},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2298799455165863},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.22230255603790283},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11388722062110901},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.09588614106178284},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C188027245","wikidata":"https://www.wikidata.org/wiki/Q750446","display_name":"Polymer chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1134/s1028335820100031","doi":"https://doi.org/10.1134/s1028335820100031","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1028335820100031","pdf_url":null,"source":{"id":"https://openalex.org/S97976655","display_name":"Doklady Physics","issn_l":"1028-3358","issn":["1028-3358","1562-6903"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["anvur-scientific","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Doklady Physics","raw_type":"journal-article"},{"id":"pmh:oai:inspirehep.net:1831114","doi":null,"is_oa":false,"landing_page_url":"http://cds.cern.ch/record/2745528","pdf_url":null,"source":{"id":"https://openalex.org/S4306402195","display_name":"CERN Document Server (European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1789412032","https://openalex.org/W1994506390","https://openalex.org/W2264002775","https://openalex.org/W2478441865","https://openalex.org/W2777998781","https://openalex.org/W2854605067","https://openalex.org/W2883806265","https://openalex.org/W2893105842","https://openalex.org/W2896788959","https://openalex.org/W2968114874","https://openalex.org/W2997719126","https://openalex.org/W2999676583","https://openalex.org/W3027027274","https://openalex.org/W4205101930"],"related_works":["https://openalex.org/W4226160096","https://openalex.org/W4312050373","https://openalex.org/W3215036527","https://openalex.org/W3188390534","https://openalex.org/W7202392412","https://openalex.org/W4394921255","https://openalex.org/W4384209023","https://openalex.org/W4309554412","https://openalex.org/W1521532381","https://openalex.org/W7164193808"],"abstract_inverted_index":{"Abstract":[0],"In":[1],"this":[2],"work,":[3],"a":[4,7,33,79],"model":[5],"of":[6,24,39,50,55,61,74,89,101,113,124,130,137],"microelectromechanical":[8],"accelerometer":[9],"with":[10,94],"two":[11,17],"movable":[12],"beam":[13],"elements":[14,68],"located":[15],"between":[16,65],"stationary":[18],"electrodes":[19],"is":[20,69,78],"proposed.":[21],"The":[22,53],"action":[23],"inertia":[25],"forces":[26],"in":[27,35,58,82,97],"the":[28,36,40,51,56,59,66,72,83,87,98,102,111,114,128,135],"longitudinal":[29],"direction":[30],"leads":[31],"to":[32],"change":[34,81],"spectral":[37],"properties":[38],"system,":[41],"which":[42,77],"can":[43,121],"be":[44,122],"used":[45],"as":[46],"an":[47],"output":[48],"signal":[49],"sensor.":[52],"dynamics":[54],"system":[57],"presence":[60],"weak":[62],"electrostatic":[63],"coupling":[64],"sensitive":[67],"characterized":[70],"by":[71],"phenomenon":[73],"modal":[75,119],"localization,":[76],"significant":[80],"amplitude":[84],"relationships":[85],"for":[86],"forms":[88],"in-phase":[90],"and":[91],"antiphase":[92],"oscillations":[93],"small":[95],"changes":[96],"measured":[99],"component":[100],"object\u2019s":[103],"acceleration":[104],"vector.":[105],"It":[106],"has":[107],"been":[108],"shown":[109],"that":[110],"sensitivity":[112,129],"proposed":[115],"sensor":[116],"based":[117,132],"on":[118,133],"localization":[120],"orders":[123],"magnitude":[125],"higher":[126],"than":[127],"systems":[131],"measuring":[134],"shift":[136],"natural":[138],"frequencies.":[139]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2020-11-23T00:00:00"}