{"id":"https://openalex.org/W3012989656","doi":"https://doi.org/10.1109/tps.2020.2979469","title":"Simplified Modeling of Charged Gas Particles Coupled With EM Field Using Monte Carlo and Finite Volume Methods","display_name":"Simplified Modeling of Charged Gas Particles Coupled With EM Field Using Monte Carlo and Finite Volume Methods","publication_year":2020,"publication_date":"2020-03-24","ids":{"openalex":"https://openalex.org/W3012989656","doi":"https://doi.org/10.1109/tps.2020.2979469","mag":"3012989656"},"language":"en","primary_location":{"id":"doi:10.1109/tps.2020.2979469","doi":"https://doi.org/10.1109/tps.2020.2979469","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tps.2020.2979469","pdf_url":null,"source":{"id":"https://openalex.org/S164692974","display_name":"IEEE Transactions on Plasma Science","issn_l":"0093-3813","issn":["0093-3813","1939-9375"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Plasma Science","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100444999","display_name":"Jihun Kim","orcid":"https://orcid.org/0000-0002-9752-2723","observed_orcids":["https://orcid.org/0000-0002-9752-2723","https://orcid.org/0000-0002-7548-6100"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jihun Kim","raw_affiliation_strings":["Research and Development Department, KyungWon Tech, Seongnam, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research and Development Department, KyungWon Tech, Seongnam, South Korea","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103238457","display_name":"Ilyoup Sohn","orcid":"https://orcid.org/0000-0002-8810-4343","observed_orcids":["https://orcid.org/0000-0002-8810-4343"]},"institutions":[{"id":"https://openalex.org/I878022262","display_name":"Korea Institute of Science & Technology Information","ror":"https://ror.org/01k4yrm29","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I878022262"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Ilyoup Sohn","raw_affiliation_strings":["Korea Institute of Science and Technology Information, University of Science and Technology, Daejeon, South Korea"],"raw_orcid":"https://orcid.org/0000-0002-8810-4343","affiliations":[{"raw_affiliation_string":"Korea Institute of Science and Technology Information, University of Science and Technology, Daejeon, South Korea","institution_ids":["https://openalex.org/I878022262","https://openalex.org/I88761825"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2045,"currency":"USD","value_usd":2045},"apc_paid":null,"fwci":0.3439,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.52939501,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":93},"biblio":{"volume":"48","issue":"4","first_page":"921","last_page":"929"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9125999808311462,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9125999808311462,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0340999998152256,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11012","display_name":"Gas Dynamics and Kinetic Theory","score":0.03280000016093254,"subfield":{"id":"https://openalex.org/subfields/2604","display_name":"Applied Mathematics"},"field":{"id":"https://openalex.org/fields/26","display_name":"Mathematics"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.9869999885559082},{"id":"https://openalex.org/keywords/plasma-simulation","display_name":"plasma simulation","score":0.7879999876022339},{"id":"https://openalex.org/keywords/electromagnetic-field-coupling","display_name":"electromagnetic field coupling","score":0.7480000257492065},{"id":"https://openalex.org/keywords/direct-simulation-monte-carlo","display_name":"direct simulation Monte Carlo","score":0.8159999847412109},{"id":"https://openalex.org/keywords/finite-volume-method","display_name":"finite volume method","score":0.9210000038146973},{"id":"https://openalex.org/keywords/erosion-rate","display_name":"erosion rate","score":0.7749999761581421},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.8370000123977661}],"concepts":[{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.7144870162010193},{"id":"https://openalex.org/C121864883","wikidata":"https://www.wikidata.org/wiki/Q677916","display_name":"Statistical physics","level":1,"score":0.511072039604187},{"id":"https://openalex.org/C50478463","wikidata":"https://www.wikidata.org/wiki/Q1401936","display_name":"Finite volume method","level":2,"score":0.5036439299583435},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4365246891975403},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.4330931305885315},{"id":"https://openalex.org/C20556612","wikidata":"https://www.wikidata.org/wiki/Q4469374","display_name":"Volume (thermodynamics)","level":2,"score":0.41408392786979675},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.3439614772796631},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08587184548377991},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.07718810439109802},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tps.2020.2979469","doi":"https://doi.org/10.1109/tps.2020.2979469","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tps.2020.2979469","pdf_url":null,"source":{"id":"https://openalex.org/S164692974","display_name":"IEEE Transactions on Plasma Science","issn_l":"0093-3813","issn":["0093-3813","1939-9375"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Plasma Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G262353586","display_name":null,"funder_award_id":"N051700001","funder_id":"https://openalex.org/F4320321681","funder_display_name":"Ministry of Trade, Industry and Energy"},{"id":"https://openalex.org/G2712978611","display_name":null,"funder_award_id":"K18L13C05S01","funder_id":"https://openalex.org/F4320322105","funder_display_name":"Korea Institute of Science and Technology Information"}],"funders":[{"id":"https://openalex.org/F4320321681","display_name":"Ministry of Trade, Industry and Energy","ror":"https://ror.org/008nkqk13"},{"id":"https://openalex.org/F4320322105","display_name":"Korea Institute of Science and Technology Information","ror":"https://ror.org/01k4yrm29"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W70668290","https://openalex.org/W1573918386","https://openalex.org/W1661820769","https://openalex.org/W1968326511","https://openalex.org/W1968718165","https://openalex.org/W1977270893","https://openalex.org/W1994609192","https://openalex.org/W2004890099","https://openalex.org/W2019044473","https://openalex.org/W2044756432","https://openalex.org/W2060234758","https://openalex.org/W2064630706","https://openalex.org/W2079374880","https://openalex.org/W2081811267","https://openalex.org/W2099760642","https://openalex.org/W2103454706","https://openalex.org/W2106005409","https://openalex.org/W2117225169","https://openalex.org/W2127791935","https://openalex.org/W2129874525","https://openalex.org/W2146736323","https://openalex.org/W2165215367","https://openalex.org/W2298772699","https://openalex.org/W2497443398","https://openalex.org/W2573097811","https://openalex.org/W3116923327","https://openalex.org/W4239227876"],"related_works":["https://openalex.org/W2018711622","https://openalex.org/W1983706128","https://openalex.org/W2160100310","https://openalex.org/W6983514396","https://openalex.org/W2152811804","https://openalex.org/W2188256250","https://openalex.org/W7096500115","https://openalex.org/W2313181284","https://openalex.org/W1998544721","https://openalex.org/W4398198023"],"abstract_inverted_index":{"A":[0],"simplified":[1,69],"numerical":[2],"model":[3,130],"to":[4,95,133],"simulate":[5],"plasma":[6,109,138,150],"occurring":[7],"in":[8,76,99,136],"a":[9,50,68,96,100],"magnetron":[10,101],"sputtering":[11,102],"device":[12],"is":[13,43,106,131],"presented.":[14],"Motions":[15],"and":[16,84,90,145],"collisions":[17],"of":[18,55,71,143],"charged":[19,61],"gas":[20,62],"particles":[21,63],"are":[22,87,93],"modeled":[23],"by":[24,45,65],"the":[25,46,56,60,111,116],"direct":[26],"simulation":[27,105,117],"Monte":[28],"Carlo":[29],"(DSMC)":[30],"method":[31],"on":[32],"an":[33],"adaptive":[34],"Cartesian":[35],"mesh":[36],"structure.":[37],"An":[38],"electromagnetic":[39],"(EM)":[40],"field":[41,58,82],"equation":[42],"solved":[44],"finite":[47],"volume":[48],"method,":[49],"discretization":[51],"method.":[52],"The":[53,79,128],"potential":[54],"EM":[57,81],"influences":[59],"calculated":[64],"DSMC":[66],"through":[67],"form":[70],"non-Sibson":[72],"interpolation":[73,85],"scheme":[74],"developed":[75],"this":[77],"article.":[78],"DSMC,":[80],"solver,":[83],"module":[86],"validated":[88],"separately,":[89],"integrated":[91],"calculations":[92,142],"applied":[94],"test":[97],"scenario":[98],"experiment.":[103],"Although":[104],"performed":[107],"without":[108,148],"calculation,":[110],"erosion":[112,144],"rates":[113,147],"obtained":[114],"from":[115],"agreed":[118],"well":[119],"with":[120,123],"experimental":[121],"data,":[122],"less":[124],"than":[125],"10%":[126],"difference.":[127],"proposed":[129],"expected":[132],"be":[134],"used":[135],"real":[137],"applications,":[139],"especially":[140],"for":[141],"deposition":[146],"rigorous":[149],"calculation.":[151]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2020-04-03T00:00:00"}