{"id":"https://openalex.org/W3010102271","doi":"https://doi.org/10.3390/mi11030267","title":"An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications","display_name":"An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications","publication_year":2020,"publication_date":"2020-03-04","ids":{"openalex":"https://openalex.org/W3010102271","doi":"https://doi.org/10.3390/mi11030267","mag":"3010102271","pmid":"https://pubmed.ncbi.nlm.nih.gov/32143465","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/7143079"},"language":"en","primary_location":{"id":"doi:10.3390/mi11030267","doi":"https://doi.org/10.3390/mi11030267","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11030267","pdf_url":"https://www.mdpi.com/2072-666X/11/3/267/pdf?version=1584878992","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/11/3/267/pdf?version=1584878992","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064440770","display_name":"Chikako Sano","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Chikako Sano","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111720477","display_name":"Manabu Ataka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Manabu Ataka","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048736602","display_name":"Gen Hashiguchi","orcid":"https://orcid.org/0000-0001-9018-5632","observed_orcids":["https://orcid.org/0000-0001-9018-5632"]},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]},{"id":"https://openalex.org/I4405287265","display_name":"Research Institute of Electronics, Shizuoka University","ror":"https://ror.org/04mdx9d04","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1298590031","https://openalex.org/I4405287265"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Gen Hashiguchi","raw_affiliation_strings":["Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan","institution_ids":["https://openalex.org/I1298590031","https://openalex.org/I4405287265"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004166791","display_name":"Hiroshi Toshiyoshi","orcid":"https://orcid.org/0000-0003-3678-7741","observed_orcids":["https://orcid.org/0000-0003-3678-7741"]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Hiroshi Toshiyoshi","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5004166791","https://openalex.org/A5064440770"],"corresponding_institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"],"apc_list":{"value":1600,"currency":"CHF","value_usd":1690},"apc_paid":{"value":1600,"currency":"CHF","value_usd":1690},"fwci":2.4071,"has_fulltext":true,"cited_by_count":36,"citation_normalized_percentile":{"value":0.89051639,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"11","issue":"3","first_page":"267","last_page":"267"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrets","display_name":"electrets","score":0.5630000233650208},{"id":"https://openalex.org/keywords/low-voltage-actuation","display_name":"low-voltage actuation","score":0.8820000290870667},{"id":"https://openalex.org/keywords/acoustic-transducers","display_name":"acoustic transducers","score":0.7620000243186951},{"id":"https://openalex.org/keywords/microspeaker","display_name":"microspeaker","score":0.9200000166893005},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"silicon-on-insulator","score":0.8709999918937683},{"id":"https://openalex.org/keywords/sound-pressure-level","display_name":"sound pressure level","score":0.8389999866485596},{"id":"https://openalex.org/keywords/energy-consumption-reduction","display_name":"energy consumption reduction","score":0.6520000100135803}],"concepts":[{"id":"https://openalex.org/C34455102","wikidata":"https://www.wikidata.org/wiki/Q1128459","display_name":"Electret","level":2,"score":0.9692498445510864},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7699980735778809},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7382752895355225},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6561964750289917},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.6460793018341064},{"id":"https://openalex.org/C20254490","wikidata":"https://www.wikidata.org/wiki/Q719550","display_name":"Biasing","level":3,"score":0.6262228488922119},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5903463363647461},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.556413471698761},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5341346263885498},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.45477789640426636},{"id":"https://openalex.org/C128624480","wikidata":"https://www.wikidata.org/wiki/Q1504817","display_name":"Low voltage","level":3,"score":0.43821412324905396},{"id":"https://openalex.org/C50587689","wikidata":"https://www.wikidata.org/wiki/Q4698328","display_name":"Air gap (plumbing)","level":2,"score":0.422984778881073},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.41064804792404175},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3909693956375122},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.36925578117370605},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.35126304626464844},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15958929061889648},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08732223510742188},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.06457933783531189},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/mi11030267","doi":"https://doi.org/10.3390/mi11030267","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11030267","pdf_url":"https://www.mdpi.com/2072-666X/11/3/267/pdf?version=1584878992","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:pubmedcentral.nih.gov:7143079","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7143079","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines (Basel)","raw_type":"Text"},{"id":"pmid:32143465","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/32143465","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"Journal Article"},{"id":"pmh:oai:doaj.org/article:b9310f708c294d909e41d1a9f2894bf4","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/b9310f708c294d909e41d1a9f2894bf4","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 11, Iss 3, p 267 (2020)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi11030267","doi":"https://doi.org/10.3390/mi11030267","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11030267","pdf_url":"https://www.mdpi.com/2072-666X/11/3/267/pdf?version=1584878992","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3516363199","display_name":"\u30a8\u30ec\u30af\u30c8\u30ec\u30c3\u30c8MEMS\u632f\u52d5\u30fb\u30c8\u30e9\u30a4\u30dc\u767a\u96fb","funder_award_id":"JPMJCR15Q4","funder_id":"https://openalex.org/F4320334789","funder_display_name":"Japan Science and Technology Agency"},{"id":"https://openalex.org/G4918437878","display_name":"\u30a4\u30aa\u30f3\u6db2\u4f53\u306e\u53ef\u5909\u5927\u5bb9\u91cf\u30ad\u30e3\u30d1\u30b7\u30bf\u3092\u5229\u7528\u3057\u305f\u30a8\u30ec\u30af\u30c8\u30ec\u30c3\u30c8\u632f\u52d5\u767a\u96fb\u7d20\u5b50\u306e\u958b\u767a","funder_award_id":"18J14159","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G4959665644","display_name":null,"funder_award_id":"JPMJCR15Q4","funder_id":"https://openalex.org/F4320338075","funder_display_name":"Core Research for Evolutional Science and Technology"},{"id":"https://openalex.org/G6718509927","display_name":null,"funder_award_id":"CREST","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G7340488329","display_name":null,"funder_award_id":"JPMJCR19Q2","funder_id":"https://openalex.org/F4320338075","funder_display_name":"Core Research for Evolutional Science and Technology"},{"id":"https://openalex.org/G7525274259","display_name":null,"funder_award_id":"JPMJCR19Q2","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"},{"id":"https://openalex.org/F4320334789","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19"},{"id":"https://openalex.org/F4320338075","display_name":"Core Research for Evolutional Science and Technology","ror":"https://ror.org/00097mb19"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3010102271.pdf","grobid_xml":"https://content.openalex.org/works/W3010102271.grobid-xml"},"referenced_works_count":24,"referenced_works":["https://openalex.org/W1978875347","https://openalex.org/W1981552805","https://openalex.org/W1989977164","https://openalex.org/W2003812114","https://openalex.org/W2018153518","https://openalex.org/W2025022766","https://openalex.org/W2033873351","https://openalex.org/W2046731204","https://openalex.org/W2072158500","https://openalex.org/W2073258280","https://openalex.org/W2078466513","https://openalex.org/W2089387597","https://openalex.org/W2092045603","https://openalex.org/W2098391472","https://openalex.org/W2099204213","https://openalex.org/W2140493152","https://openalex.org/W2152717583","https://openalex.org/W2171603448","https://openalex.org/W2171999566","https://openalex.org/W2184093808","https://openalex.org/W2292345755","https://openalex.org/W2292528118","https://openalex.org/W2914553494","https://openalex.org/W3046743848"],"related_works":["https://openalex.org/W2993871060","https://openalex.org/W4397026584","https://openalex.org/W1967987572","https://openalex.org/W1975263165","https://openalex.org/W2067266817","https://openalex.org/W2292345755","https://openalex.org/W2068388922","https://openalex.org/W4286377385","https://openalex.org/W2323716711","https://openalex.org/W4393234521"],"abstract_inverted_index":{"Despite":[0],"the":[1,45,60,77,84,129,137,142],"development":[2],"of":[3,47,63,80,102,110,141],"energy-efficient":[4],"devices":[5,123],"in":[6],"various":[7],"applications,":[8],"microelectromechanical":[9],"system":[10],"(MEMS)":[11],"electrostatic":[12],"actuators":[13],"yet":[14],"require":[15,127],"high":[16,78],"voltages":[17,33],"to":[18,34,41,76,135],"generate":[19],"large":[20,31],"displacements.":[21],"In":[22],"this":[23],"respect,":[24],"electrets":[25],"exhibiting":[26],"quasi-permanent":[27],"electrical":[28],"charges":[29],"allow":[30],"fixed":[32],"be":[35],"integrated":[36],"directly":[37],"within":[38],"electrode":[39],"structures":[40],"reduce":[42],"or":[43],"eliminate":[44],"need":[46],"DC":[48],"bias":[49],"electronics.":[50],"For":[51],"verification,":[52],"a":[53,64,71,97,113],"biased":[54],"electret":[55,125],"layer":[56],"was":[57],"fabricated":[58],"at":[59],"inner":[61],"surface":[62],"silicon":[65,81],"on":[66],"insulator":[67],"(SOI)":[68],"structure":[69],"facing":[70],"2":[72],"\u03bcm":[73],"gap":[74],"owing":[75],"compatibility":[79],"micromachining":[82],"and":[83],"potassium-ion-electret":[85],"fabrication":[86],"method.":[87],"A":[88],"electret-augmented":[89],"actuator":[90],"with":[91,106,124],"an":[92],"out-of-plane":[93],"motion":[94],"membrane":[95],"reached":[96],"sound":[98],"pressure":[99],"level":[100],"(SPL)":[101],"50":[103],"dB":[104],"maximum":[105],"AC":[107],"input":[108,130],"voltage":[109],"alone,":[111],"indicating":[112],"potential":[114],"for":[115],"acoustic":[116],"transducer":[117],"usage":[118],"such":[119],"as":[120],"microspeakers.":[121],"Such":[122],"biasing":[126],"only":[128],"signal":[131],"voltage,":[132],"thus":[133],"contributing":[134],"reducing":[136],"overall":[138],"power":[139],"consumption":[140],"device":[143],"system.":[144]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":15},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2020-03-13T00:00:00"}