{"id":"https://openalex.org/W3000599998","doi":"https://doi.org/10.1002/pssa.201900955","title":"Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering","display_name":"Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering","publication_year":2020,"publication_date":"2020-01-14","ids":{"openalex":"https://openalex.org/W3000599998","doi":"https://doi.org/10.1002/pssa.201900955","mag":"3000599998"},"language":"en","primary_location":{"id":"doi:10.1002/pssa.201900955","doi":"https://doi.org/10.1002/pssa.201900955","is_oa":false,"landing_page_url":"https://doi.org/10.1002/pssa.201900955","pdf_url":null,"source":{"id":"https://openalex.org/S4210228582","display_name":"physica status solidi (a)","issn_l":"0031-8965","issn":["0031-8965","1521-396X","1862-6300","1862-6319"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"physica status solidi (a)","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054463213","display_name":"Maki Kushimoto","orcid":"https://orcid.org/0000-0003-3974-7139","observed_orcids":["https://orcid.org/0000-0003-3974-7139"]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Maki Kushimoto","raw_affiliation_strings":["Graduate School of Engineering, Nagoya University, Furo cho, Chikusa-ku, Nagoya, Aichi, 464-8603 Japan"],"raw_orcid":"https://orcid.org/0000-0003-3974-7139","affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Nagoya University, Furo cho, Chikusa-ku, Nagoya, Aichi, 464-8603 Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084022212","display_name":"Tadayoshi Sakai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tadayoshi Sakai","raw_affiliation_strings":["Graduate School of Engineering, Nagoya University, Furo cho, Chikusa-ku, Nagoya, Aichi, 464-8603 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Nagoya University, Furo cho, Chikusa-ku, Nagoya, Aichi, 464-8603 Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049819823","display_name":"Yoshihiro Ueoka","orcid":"https://orcid.org/0000-0001-6420-975X","observed_orcids":["https://orcid.org/0000-0001-6420-975X"]},"institutions":[{"id":"https://openalex.org/I4210087728","display_name":"Idemitsu Kosan (Japan)","ror":"https://ror.org/002v59719","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210087728"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshihiro Ueoka","raw_affiliation_strings":["Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan","institution_ids":["https://openalex.org/I4210087728"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071797039","display_name":"Shigekazu Tomai","orcid":"https://orcid.org/0000-0002-5401-6396","observed_orcids":["https://orcid.org/0000-0002-5401-6396"]},"institutions":[{"id":"https://openalex.org/I4210087728","display_name":"Idemitsu Kosan (Japan)","ror":"https://ror.org/002v59719","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210087728"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shigekazu Tomai","raw_affiliation_strings":["Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan","institution_ids":["https://openalex.org/I4210087728"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026737272","display_name":"Satoshi Katsumata","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210087728","display_name":"Idemitsu Kosan (Japan)","ror":"https://ror.org/002v59719","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210087728"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satoshi Katsumata","raw_affiliation_strings":["Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd., Sodegaura, Chiba, 299-0293 Japan","institution_ids":["https://openalex.org/I4210087728"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051704686","display_name":"Manato Deki","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405286711","display_name":"Institute of Materials and Systems for Sustainability, Nagoya University","ror":"https://ror.org/02wb1d827","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Manato Deki","raw_affiliation_strings":["Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan","institution_ids":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101771257","display_name":"Yoshio Honda","orcid":"https://orcid.org/0009-0003-3847-9408","observed_orcids":["https://orcid.org/0009-0003-3847-9408","https://orcid.org/0009-0003-6591-847X"]},"institutions":[{"id":"https://openalex.org/I4405286711","display_name":"Institute of Materials and Systems for Sustainability, Nagoya University","ror":"https://ror.org/02wb1d827","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]},{"id":"https://openalex.org/I4405287166","display_name":"Nagoya University Institute for Advanced Research","ror":"https://ror.org/049xpsw37","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287166","https://openalex.org/I60134161"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshio Honda","raw_affiliation_strings":["Institute of Advanced Research, Nagoya University, Nagoya, 464-8603 Japan","Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Advanced Research, Nagoya University, Nagoya, 464-8603 Japan","institution_ids":["https://openalex.org/I4405287166","https://openalex.org/I60134161"]},{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan","institution_ids":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5048399593","display_name":"Hiroshi Amano","orcid":"https://orcid.org/0000-0002-7598-2593","observed_orcids":["https://orcid.org/0000-0002-7598-2593"]},"institutions":[{"id":"https://openalex.org/I4405286711","display_name":"Institute of Materials and Systems for Sustainability, Nagoya University","ror":"https://ror.org/02wb1d827","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroshi Amano","raw_affiliation_strings":["Akasaki Research Center, Nagoya University, Nagoya, 464-8603 Japan","Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Akasaki Research Center, Nagoya University, Nagoya, 464-8603 Japan","institution_ids":["https://openalex.org/I60134161"]},{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601 Japan","institution_ids":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5054463213"],"corresponding_institution_ids":["https://openalex.org/I60134161"],"apc_list":{"value":3800,"currency":"USD","value_usd":3800},"apc_paid":null,"fwci":0.4669,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.55611724,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":96},"biblio":{"volume":"217","issue":"14","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mgzno-thin-films","display_name":"MgZnO thin films","score":0.972000002861023},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.8740000128746033},{"id":"https://openalex.org/keywords/phase-separation","display_name":"phase separation","score":0.9039999842643738},{"id":"https://openalex.org/keywords/wurtzite-structure","display_name":"wurtzite structure","score":0.9399999976158142},{"id":"https://openalex.org/keywords/rock-salt-structure","display_name":"rock salt structure","score":0.9950000047683716},{"id":"https://openalex.org/keywords/electrical-conductivity","display_name":"electrical conductivity","score":0.8679999709129333},{"id":"https://openalex.org/keywords/optical-transmittance","display_name":"optical transmittance","score":0.9350000023841858},{"id":"https://openalex.org/keywords/absorption-edge-red-shift","display_name":"absorption edge red shift","score":0.8970000147819519},{"id":"https://openalex.org/keywords/mg-incorporation","display_name":"Mg incorporation","score":0.6050000190734863},{"id":"https://openalex.org/keywords/crystal-distribution","display_name":"crystal distribution","score":0.37299999594688416}],"concepts":[{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.6940041780471802},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.6849791407585144},{"id":"https://openalex.org/C3045981","wikidata":"https://www.wikidata.org/wiki/Q8039317","display_name":"Wurtzite crystal structure","level":3,"score":0.6700149774551392},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6407738924026489},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.6358561515808105},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5440977215766907},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.4431266486644745},{"id":"https://openalex.org/C33347731","wikidata":"https://www.wikidata.org/wiki/Q285210","display_name":"Stacking","level":2,"score":0.4226091206073761},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41356226801872253},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.3937121033668518},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2474144697189331},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.22343876957893372},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2082459032535553},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1630759835243225},{"id":"https://openalex.org/C535196362","wikidata":"https://www.wikidata.org/wiki/Q758","display_name":"Zinc","level":2,"score":0.11391845345497131},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.08238548040390015},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/pssa.201900955","doi":"https://doi.org/10.1002/pssa.201900955","is_oa":false,"landing_page_url":"https://doi.org/10.1002/pssa.201900955","pdf_url":null,"source":{"id":"https://openalex.org/S4210228582","display_name":"physica status solidi (a)","issn_l":"0031-8965","issn":["0031-8965","1521-396X","1862-6300","1862-6319"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"physica status solidi (a)","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1486719486","https://openalex.org/W1610206726","https://openalex.org/W1969058744","https://openalex.org/W1981324130","https://openalex.org/W1982151314","https://openalex.org/W1982329048","https://openalex.org/W1989648848","https://openalex.org/W2005411066","https://openalex.org/W2012298429","https://openalex.org/W2017137003","https://openalex.org/W2039242390","https://openalex.org/W2058005250","https://openalex.org/W2072007463","https://openalex.org/W2075697249","https://openalex.org/W2092531990","https://openalex.org/W2335401129","https://openalex.org/W2885864581"],"related_works":["https://openalex.org/W2083176288","https://openalex.org/W2522167307","https://openalex.org/W2365314410","https://openalex.org/W249226127","https://openalex.org/W2370647828","https://openalex.org/W3133982343","https://openalex.org/W3141721995","https://openalex.org/W2568736657","https://openalex.org/W2547718175","https://openalex.org/W2587976701"],"abstract_inverted_index":{"The":[0,26],"properties":[1],"of":[2,15,51,128],"phase\u2010separated":[3],"MgZnO":[4,16,54,165],"induced":[5,71],"by":[6,18,23,72,83,99,160],"heat":[7,24,43,161],"treatment":[8],"are":[9,130],"investigated,":[10],"because":[11],"the":[12,34,37,49,78,84,91,94,100,110,117,121,133,146,157],"electrical":[13],"conductivity":[14],"deposited":[17],"sputtering":[19],"can":[20],"be":[21],"improved":[22],"treatment.":[25,44],"absorption":[27],"edge":[28],"shows":[29],"a":[30,56,61,67],"red":[31],"shift,":[32],"but":[33],"transmittance":[35,92],"in":[36,93,120,132],"ultraviolet":[38],"(UV)\u2010C":[39],"region":[40,96],"increases":[41],"after":[42,141],"This":[45,75],"is":[46,81,97,107,113,139,143,150,154,166],"due":[47],"to":[48],"formation":[50],"wurtzite":[52],"(WZ)":[53],"with":[55,66,87,103,116],"high":[57,104],"Zn":[58,69],"content":[59,70],"and":[60,90,163],"rock":[62],"salt":[63],"(RS)":[64],"structure":[65,112,138,159],"low":[68,88],"phase":[73],"separation.":[74],"suggests":[76],"that":[77,109,152],"current":[79],"path":[80],"formed":[82,140,144],"WZ":[85,118,137],"crystals":[86,102,129],"resistivity,":[89],"UV":[95],"increased":[98],"RS":[101,111,158],"transmittance.":[105],"It":[106,149],"confirmed":[108],"partially":[114],"mixed":[115],"crystal":[119],"in\u2010plane":[122],"direction.":[123,135],"In":[124],"contrast,":[125],"different":[126],"distributions":[127],"observed":[131],"stacking":[134],"A":[136],"RS\u2010MgZnO":[142],"on":[145],"substrate":[147],"interface.":[148],"found":[151],"Mg":[153],"incorporated":[155],"into":[156],"treatment,":[162],"Mg\u2010rich":[164],"formed.":[167]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2020-01-23T00:00:00"}