{"id":"https://openalex.org/W3000463375","doi":"https://doi.org/10.3390/mi11010095","title":"A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect","display_name":"A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect","publication_year":2020,"publication_date":"2020-01-16","ids":{"openalex":"https://openalex.org/W3000463375","doi":"https://doi.org/10.3390/mi11010095","mag":"3000463375","pmid":"https://pubmed.ncbi.nlm.nih.gov/31963142","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/7019797"},"language":"en","primary_location":{"id":"doi:10.3390/mi11010095","doi":"https://doi.org/10.3390/mi11010095","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11010095","pdf_url":"https://www.mdpi.com/2072-666X/11/1/95/pdf?version=1579164146","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/11/1/95/pdf?version=1579164146","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101649465","display_name":"Xiaoyu Chen","orcid":"https://orcid.org/0000-0003-2103-2215","observed_orcids":["https://orcid.org/0000-0003-2103-2215"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoyu Chen","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4405270085"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112358034","display_name":"Yuyu Xia","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391768224","display_name":"State Key Laboratory of Surface Physics","ror":"https://ror.org/000nbq540","country_code":"CN","type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391768224"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuyu Xia","raw_affiliation_strings":["Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391768224"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074350160","display_name":"Yifei Mao","orcid":"https://orcid.org/0000-0003-3508-2555","observed_orcids":["https://orcid.org/0000-0003-3508-2555"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yifei Mao","raw_affiliation_strings":["State Key Lab for Mesoscopic Physics and School of Physics, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab for Mesoscopic Physics and School of Physics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069000255","display_name":"Yun Hua Huang","orcid":"https://orcid.org/0000-0003-3083-3313","observed_orcids":["https://orcid.org/0000-0003-3083-3313"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Huang","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4405270085"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jia Zhu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jia Zhu","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4405270085"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049891057","display_name":"Jun Xu","orcid":"https://orcid.org/0009-0000-0465-6195","observed_orcids":["https://orcid.org/0009-0000-0465-6195"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Xu","raw_affiliation_strings":["Electron Microscopy Laboratory, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electron Microscopy Laboratory, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078606508","display_name":"Rui Zhu","orcid":"https://orcid.org/0000-0002-4396-7292","observed_orcids":["https://orcid.org/0000-0002-4396-7292"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rui Zhu","raw_affiliation_strings":["Electron Microscopy Laboratory, Peking University, Beijing 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electron Microscopy Laboratory, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100607273","display_name":"Lei Shi","orcid":"https://orcid.org/0000-0001-8458-3941","observed_orcids":["https://orcid.org/0000-0001-8458-3941"]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391768224","display_name":"State Key Laboratory of Surface Physics","ror":"https://ror.org/000nbq540","country_code":"CN","type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391768224"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Shi","raw_affiliation_strings":["Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391768224"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103181371","display_name":"Wengang Wu","orcid":"https://orcid.org/0000-0001-5045-6717","observed_orcids":["https://orcid.org/0000-0001-5045-6717"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4405270085","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":"https://ror.org/002822p09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405270085"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wengang Wu","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China"],"raw_orcid":"https://orcid.org/0000-0001-5045-6717","affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4405270085"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5103181371"],"corresponding_institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4405270085"],"apc_list":{"value":1600,"currency":"CHF","value_usd":1690},"apc_paid":{"value":1600,"currency":"CHF","value_usd":1690},"fwci":0.8214,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.76087812,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":"11","issue":"1","first_page":"95","last_page":"95"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.9696999788284302,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.9696999788284302,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.007000000216066837,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11383","display_name":"Advanced Antenna and Metasurface Technologies","score":0.0066999997943639755,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metamaterials","display_name":"metamaterials","score":0.6769999861717224},{"id":"https://openalex.org/keywords/periodic-nanostructure-arrays","display_name":"periodic nanostructure arrays","score":0.6779999732971191},{"id":"https://openalex.org/keywords/infrared-excitation","display_name":"infrared excitation","score":0.4350000023841858}],"concepts":[{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.8423441052436829},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5940619707107544},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4767414331436157},{"id":"https://openalex.org/C160892712","wikidata":"https://www.wikidata.org/wiki/Q901559","display_name":"Fourier transform infrared spectroscopy","level":2,"score":0.4702143967151642},{"id":"https://openalex.org/C58312451","wikidata":"https://www.wikidata.org/wiki/Q4817200","display_name":"Atom (system on chip)","level":2,"score":0.4444378614425659},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36995062232017517},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3517167270183563},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.33871978521347046},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14135989546775818},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1396685540676117},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/mi11010095","doi":"https://doi.org/10.3390/mi11010095","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11010095","pdf_url":"https://www.mdpi.com/2072-666X/11/1/95/pdf?version=1579164146","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:europepmc.org:6007779","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7019797","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":null,"raw_type":"Text"},{"id":"pmid:31963142","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31963142","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"Journal Article"},{"id":"pmh:oai:pubmedcentral.nih.gov:7019797","doi":null,"is_oa":true,"landing_page_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC7019797/","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:55cf838c9604429da8a710b62743058c","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/55cf838c9604429da8a710b62743058c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 11, Iss 1, p 95 (2020)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi11010095","doi":"https://doi.org/10.3390/mi11010095","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi11010095","pdf_url":"https://www.mdpi.com/2072-666X/11/1/95/pdf?version=1579164146","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G1441723721","display_name":null,"funder_award_id":"No. 2015CB352100","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G1544701233","display_name":null,"funder_award_id":"2015CB352100","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G1828425977","display_name":null,"funder_award_id":"973 Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5677343115","display_name":"\u8868\u9762\u7535\u78c1\u6a21\u5f0f\u5171\u632f\u9ad8\u5149\u8c31\u6210\u50cf\u751f\u5316\u68c0\u6d4b\u65b9\u6cd5\u7814\u7a76","funder_award_id":"61931018","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5779572849","display_name":null,"funder_award_id":"61974004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8016679505","display_name":null,"funder_award_id":"No. 61974004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3000463375.pdf","grobid_xml":"https://content.openalex.org/works/W3000463375.grobid-xml"},"referenced_works_count":44,"referenced_works":["https://openalex.org/W118426303","https://openalex.org/W1501029566","https://openalex.org/W1783109283","https://openalex.org/W1854512137","https://openalex.org/W1990391890","https://openalex.org/W1995575412","https://openalex.org/W2010592878","https://openalex.org/W2015408750","https://openalex.org/W2016733616","https://openalex.org/W2027652501","https://openalex.org/W2047464369","https://openalex.org/W2058054515","https://openalex.org/W2074259402","https://openalex.org/W2077932185","https://openalex.org/W2080270235","https://openalex.org/W2087741292","https://openalex.org/W2097584792","https://openalex.org/W2099775407","https://openalex.org/W2114725128","https://openalex.org/W2115442481","https://openalex.org/W2117294637","https://openalex.org/W2136686805","https://openalex.org/W2167668670","https://openalex.org/W2263199969","https://openalex.org/W2411079084","https://openalex.org/W2481407830","https://openalex.org/W2538936330","https://openalex.org/W2589238065","https://openalex.org/W2593698718","https://openalex.org/W2603973970","https://openalex.org/W2752763894","https://openalex.org/W2773251468","https://openalex.org/W2789920674","https://openalex.org/W2793927969","https://openalex.org/W2803827993","https://openalex.org/W2804443679","https://openalex.org/W2804605932","https://openalex.org/W2880870049","https://openalex.org/W2894769065","https://openalex.org/W2901187905","https://openalex.org/W2902369332","https://openalex.org/W2969349760","https://openalex.org/W2972557268","https://openalex.org/W4211065133"],"related_works":["https://openalex.org/W2594106575","https://openalex.org/W4312112350","https://openalex.org/W2990313402","https://openalex.org/W327360334","https://openalex.org/W2396073886","https://openalex.org/W2023023177","https://openalex.org/W1995980598","https://openalex.org/W2115442481","https://openalex.org/W4280545706","https://openalex.org/W2520530197"],"abstract_inverted_index":{"Due":[0],"to":[1,13,31,95,112],"their":[2],"unique":[3],"electromagnetic":[4],"properties,":[5],"meta-atom":[6,24,44,75,107],"arrays":[7],"have":[8],"always":[9],"been":[10],"a":[11,67,72,86,136,161,170,182],"hotspot":[12],"realize":[14],"all":[15],"kinds":[16],"of":[17,41,91,103,159,165,174,193],"particular":[18],"functions,":[19],"and":[20,52,84,118,128,156,190],"the":[21,38,46,97,104,114,150,166,187,191],"research":[22],"on":[23,78],"structure":[25],"has":[26,57],"extended":[27],"from":[28],"two-dimensions":[29],"(2D)":[30],"three-dimensions":[32],"(3D)":[33],"in":[34,181],"recent":[35],"years.":[36],"With":[37],"continuous":[39],"pursuit":[40],"complex":[42,73,153,175],"3D":[43,74,93,106,154,176],"arrays,":[45,108],"increasing":[47],"demand":[48],"for":[49,71,152],"more":[50,53,162],"efficient":[51],"precise":[54],"nanofabrication":[55,69],"methods":[56],"encountered":[58],"challenges.":[59],"To":[60],"explore":[61],"better":[62],"fabrication":[63,102],"methods,":[64],"we":[65],"presented":[66,98],"programmable":[68],"method":[70,167],"array":[76,89,172],"based":[77],"focused-ion-beam":[79],"stress-induced":[80],"deformation":[81],"(FIB-SID)":[82],"effect":[83],"designed":[85,105],"distinctive":[87],"nanostructure":[88],"composed":[90,173],"periodic":[92],"meta-atoms":[94,155,177],"demonstrate":[96],"method.":[99],"After":[100],"successful":[101],"measurements":[109],"were":[110],"conducted":[111],"investigate":[113],"electric/magnetic":[115],"field":[116],"properties":[117],"infrared":[119,131],"spectral":[120],"characteristics":[121],"using":[122],"scanning":[123],"cathodoluminescence":[124],"(CL)":[125],"microscopic":[126],"imaging":[127],"Fourier":[129],"transform":[130],"(FTIR)":[132],"spectroscopy,":[133],"which":[134,185],"revealed":[135],"certain":[137],"excitation":[138],"mode":[139],"induced":[140],"by":[141],"polarized":[142],"incident":[143],"IR":[144],"light":[145],"near":[146],"8":[147],"\u03bcm.":[148],"Besides":[149],"programmability":[151],"wide":[157],"applicability":[158],"materials,":[160],"significant":[163],"advantage":[164],"is":[168],"that":[169],"large-scale":[171],"can":[178],"be":[179],"processed":[180],"quasi-parallel":[183],"way,":[184],"improves":[186],"processing":[188],"efficiency":[189],"consistency":[192],"unit":[194],"cells":[195],"dramatically.":[196]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2020-01-23T00:00:00"}