{"id":"https://openalex.org/W2996648331","doi":null,"title":"Ion Beam Analysis of Thin Films on Silicon and Carbon Substrates","display_name":"Ion Beam Analysis of Thin Films on Silicon and Carbon Substrates","publication_year":2007,"publication_date":"2007-10-01","ids":{"openalex":"https://openalex.org/W2996648331","mag":"2996648331"},"language":"en","primary_location":{"id":"mag:2996648331","doi":null,"is_oa":false,"landing_page_url":"http://ui.adsabs.harvard.edu/abs/2007APS..TSF.B6007K/abstract","pdf_url":null,"source":{"id":"https://openalex.org/S4306502669","display_name":"APS Texas Sections Fall Meeting Abstracts","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"APS Texas Sections Fall Meeting Abstracts","raw_type":null},"volume":null,"type":"conference-abstract","indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063695234","display_name":"Pelham Keahey","orcid":"https://orcid.org/0000-0002-9504-9696","observed_orcids":["https://orcid.org/0000-0002-9504-9696"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Pelham Keahey","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-9504-9696","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028342044","display_name":"J'Nae Zwaschka","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J'nae Zwaschka","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076461184","display_name":"Lucas Phinney","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lucas Phinney","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075469905","display_name":"Lee J. Mitchell","orcid":"https://orcid.org/0000-0003-1016-2145","observed_orcids":["https://orcid.org/0000-0003-1016-2145"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lee J. Mitchell","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-1016-2145","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052596754","display_name":"Khalid Hossian","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Khalid Hossian","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5112606314","display_name":"Jerome L. Duggan","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jerome L. Duggan","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.000699999975040555,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ion-beam-analysis","display_name":"ion beam analysis","score":0.9639999866485596},{"id":"https://openalex.org/keywords/thin-films","display_name":"thin films","score":0.9959999918937683},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.9589999914169312},{"id":"https://openalex.org/keywords/carbon-substrates","display_name":"carbon substrates","score":0.9750000238418579},{"id":"https://openalex.org/keywords/thin-film-characterization","display_name":"thin film characterization","score":0.7089999914169312}],"concepts":[{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6504566669464111},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5387217998504639},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.5340100526809692},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.49378547072410583},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.48696741461753845},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.46455496549606323},{"id":"https://openalex.org/C93106096","wikidata":"https://www.wikidata.org/wiki/Q17125820","display_name":"Ion beam deposition","level":4,"score":0.4637055993080139},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.4631025493144989},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.45260587334632874},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4208669066429138},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.41791465878486633},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.34487900137901306},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3050509989261627},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1743103265762329},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17046496272087097},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16886696219444275},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.14332517981529236},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2996648331","doi":null,"is_oa":false,"landing_page_url":"http://ui.adsabs.harvard.edu/abs/2007APS..TSF.B6007K/abstract","pdf_url":null,"source":{"id":"https://openalex.org/S4306502669","display_name":"APS Texas Sections Fall Meeting Abstracts","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"APS Texas Sections Fall Meeting Abstracts","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3174374973","https://openalex.org/W7001309340","https://openalex.org/W3009259686","https://openalex.org/W2992145949","https://openalex.org/W2331365638","https://openalex.org/W4300630747","https://openalex.org/W7066882321","https://openalex.org/W3188153558","https://openalex.org/W2484808628","https://openalex.org/W3201350242"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-25T08:18:29.962427","created_date":"2019-12-26T00:00:00"}
