{"id":"https://openalex.org/W2995591055","doi":"https://doi.org/10.3390/mi10120877","title":"Study on a High Performance MEMS Infrared Thermopile Detector","display_name":"Study on a High Performance MEMS Infrared Thermopile Detector","publication_year":2019,"publication_date":"2019-12-13","ids":{"openalex":"https://openalex.org/W2995591055","doi":"https://doi.org/10.3390/mi10120877","mag":"2995591055","pmid":"https://pubmed.ncbi.nlm.nih.gov/31847124","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/6953050"},"language":"en","primary_location":{"id":"doi:10.3390/mi10120877","doi":"https://doi.org/10.3390/mi10120877","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi10120877","pdf_url":"https://www.mdpi.com/2072-666X/10/12/877/pdf?version=1576229490","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/10/12/877/pdf?version=1576229490","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087386892","display_name":"Aida Bao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]},{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Aida Bao","raw_affiliation_strings":["School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China","School of Instrument and Electronics, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China","institution_ids":["https://openalex.org/I125839683"]},{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073284259","display_name":"Cheng Lei","orcid":"https://orcid.org/0000-0001-8439-4235","observed_orcids":["https://orcid.org/0000-0001-8439-4235"]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Cheng Lei","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101631234","display_name":"Haiyang Mao","orcid":"https://orcid.org/0000-0001-5620-2910","observed_orcids":["https://orcid.org/0000-0001-5620-2910","https://orcid.org/0000-0001-9713-5144"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haiyang Mao","raw_affiliation_strings":["Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049640298","display_name":"Ruirui Li","orcid":"https://orcid.org/0000-0002-2569-7444","observed_orcids":["https://orcid.org/0000-0002-2569-7444","https://orcid.org/0000-0001-8814-3265"]},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ruirui Li","raw_affiliation_strings":["Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China","School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101202985","display_name":"Yihao Guan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yihao Guan","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5073284259"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":{"value":1400,"currency":"CHF","value_usd":1418},"apc_paid":{"value":1400,"currency":"CHF","value_usd":1418},"fwci":1.1739,"has_fulltext":true,"cited_by_count":30,"citation_normalized_percentile":{"value":0.77554454,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":"10","issue":"12","first_page":"877","last_page":"877"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermocouples","display_name":"thermocouples","score":0.6470000147819519},{"id":"https://openalex.org/keywords/responsivity","display_name":"responsivity","score":0.7950000166893005},{"id":"https://openalex.org/keywords/response-time-sensor","display_name":"response time (sensor)","score":0.8830000162124634},{"id":"https://openalex.org/keywords/temperature-sensors","display_name":"temperature sensors","score":0.8650000095367432},{"id":"https://openalex.org/keywords/vacuum-sensors","display_name":"vacuum sensors","score":0.9660000205039978}],"concepts":[{"id":"https://openalex.org/C47279676","wikidata":"https://www.wikidata.org/wiki/Q915693","display_name":"Thermopile","level":3,"score":0.9530237317085266},{"id":"https://openalex.org/C178889773","wikidata":"https://www.wikidata.org/wiki/Q7316011","display_name":"Responsivity","level":3,"score":0.9024766087532043},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.8494775295257568},{"id":"https://openalex.org/C168068576","wikidata":"https://www.wikidata.org/wiki/Q190241","display_name":"Thermocouple","level":2,"score":0.7736771106719971},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7340739369392395},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6604025363922119},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5876725316047668},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.5174077749252319},{"id":"https://openalex.org/C2779818494","wikidata":"https://www.wikidata.org/wiki/Q909168","display_name":"Infrared detector","level":3,"score":0.4996623992919922},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.488262414932251},{"id":"https://openalex.org/C23125352","wikidata":"https://www.wikidata.org/wiki/Q210765","display_name":"Photodetector","level":2,"score":0.40622442960739136},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17475563287734985},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/mi10120877","doi":"https://doi.org/10.3390/mi10120877","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi10120877","pdf_url":"https://www.mdpi.com/2072-666X/10/12/877/pdf?version=1576229490","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:europepmc.org:5922994","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6953050","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6953050","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6953050","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines (Basel)","raw_type":"Text"},{"id":"pmid:31847124","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31847124","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.3390/mi10120877","doi":"https://doi.org/10.3390/mi10120877","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/mi10120877","pdf_url":"https://www.mdpi.com/2072-666X/10/12/877/pdf?version=1576229490","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G4518627583","display_name":null,"funder_award_id":"61401458","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5350222254","display_name":"\u65e0\u7ebf\u3001\u96c6\u6210\u5316\u65e0\u6e90\u4f20\u611f\u5668\u6280\u672f\u57fa\u7840\u7814\u7a76","funder_award_id":"61136006","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5934048918","display_name":null,"funder_award_id":"51205373","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6097457024","display_name":null,"funder_award_id":"61335008","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6434917019","display_name":null,"funder_award_id":"BK20131098","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2995591055.pdf","grobid_xml":"https://content.openalex.org/works/W2995591055.grobid-xml"},"referenced_works_count":12,"referenced_works":["https://openalex.org/W2005945418","https://openalex.org/W2017751259","https://openalex.org/W2037939724","https://openalex.org/W2045070703","https://openalex.org/W2049582610","https://openalex.org/W2076905969","https://openalex.org/W2130805504","https://openalex.org/W2132792996","https://openalex.org/W2149161391","https://openalex.org/W2158588569","https://openalex.org/W2296243579","https://openalex.org/W2308378258"],"related_works":["https://openalex.org/W2788392871","https://openalex.org/W4328092585","https://openalex.org/W4388469966","https://openalex.org/W4379799692","https://openalex.org/W3177249228","https://openalex.org/W2477657876","https://openalex.org/W3198961606","https://openalex.org/W1821472179","https://openalex.org/W2107838746","https://openalex.org/W1982074144"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,14,18,69,75],"high-performance":[4],"micro-electromechanical":[5],"systems":[6],"(MEMS)":[7],"thermopile":[8],"infrared":[9],"detector.":[10,28],"It":[11],"consists":[12],"of":[13,26,47],"double-end":[15],"beam":[16],"and":[17,53,73],"dual-layer":[19],"thermocouple":[20],"structure,":[21],"which":[22],"improves":[23],"the":[24,27,35,43,48,54,64],"responsivity":[25,46],"The":[29,45,61],"etch-stop":[30],"structure":[31],"is":[32],"integrated":[33],"into":[34],"detector":[36,49,62],"to":[37,66],"prevent":[38],"isotropic":[39],"etching-caused":[40],"damage":[41],"on":[42],"device.":[44],"achieved":[50],"1151.14":[51],"V/W,":[52],"measured":[55],"response":[56],"time":[57],"was":[58],"14.46":[59],"ms.":[60],"had":[63],"potential":[65],"work":[67],"as":[68,74],"high-precision":[70],"temperature":[71],"sensor":[72],"vacuum":[76],"sensor.":[77]},"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":4}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2019-12-26T00:00:00"}