{"id":"https://openalex.org/W2990250536","doi":"https://doi.org/10.23919/eumic.2019.8909558","title":"MOM Capacitance Characterization in G-Band using On-wafer 3D-TRL Calibration","display_name":"MOM Capacitance Characterization in G-Band using On-wafer 3D-TRL Calibration","publication_year":2019,"publication_date":"2019-09-01","ids":{"openalex":"https://openalex.org/W2990250536","doi":"https://doi.org/10.23919/eumic.2019.8909558","mag":"2990250536"},"language":"en","primary_location":{"id":"doi:10.23919/eumic.2019.8909558","doi":"https://doi.org/10.23919/eumic.2019.8909558","is_oa":false,"landing_page_url":"https://doi.org/10.23919/eumic.2019.8909558","pdf_url":null,"source":{"id":"https://openalex.org/S4306418365","display_name":"European Microwave Integrated Circuits Conference","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 14th European Microwave Integrated Circuits Conference (EuMIC)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045238145","display_name":"Abdelhalim A. Saadi","orcid":"https://orcid.org/0000-0003-4092-1384","observed_orcids":["https://orcid.org/0000-0003-4092-1384"]},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A.A. Saadi","raw_affiliation_strings":["CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France","institution_ids":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060386386","display_name":"Marc Margalef\u2010Rovira","orcid":"https://orcid.org/0000-0002-6049-7915","observed_orcids":["https://orcid.org/0000-0002-6049-7915"]},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Margalef","raw_affiliation_strings":["CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France","institution_ids":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5106430211","display_name":"Sylvie L\u00e9pilliet","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Le Pilliet","raw_affiliation_strings":["IEMN Universit\u00e9 de Lille, Av Poincar\u00e9, CS, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IEMN Universit\u00e9 de Lille, Av Poincar\u00e9, CS, France","institution_ids":["https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008879645","display_name":"Christophe Gaqui\u00e8re","orcid":"https://orcid.org/0000-0003-3082-2489","observed_orcids":["https://orcid.org/0000-0003-3082-2489"]},"institutions":[{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210095849","https://openalex.org/I4210116330","https://openalex.org/I4210123471","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Gaquiere","raw_affiliation_strings":["IEMN Universit\u00e9 de Lille, Av Poincar\u00e9, CS, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IEMN Universit\u00e9 de Lille, Av Poincar\u00e9, CS, France","institution_ids":["https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102821697","display_name":"Daniel Gloria","orcid":"https://orcid.org/0000-0003-2763-8453","observed_orcids":["https://orcid.org/0000-0003-2763-8453"]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Gloria","raw_affiliation_strings":["STMicroelectronics, 850 rue Jean Monnet, Crolles, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081645961","display_name":"C. Durand","orcid":"https://orcid.org/0009-0004-0863-163X","observed_orcids":["https://orcid.org/0009-0004-0863-163X"]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Durand","raw_affiliation_strings":["STMicroelectronics, 850 rue Jean Monnet, Crolles, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026379358","display_name":"Philippe Ferrari","orcid":"https://orcid.org/0000-0002-2803-4830","observed_orcids":["https://orcid.org/0000-0002-2803-4830"]},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Ferrari","raw_affiliation_strings":["CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Grenoble INP*, RFIC-Lab, Univ. Grenoble Alpes, France","institution_ids":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I899635006"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.1852,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.71487463,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"136","last_page":"139"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.2858999967575073,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.2858999967575073,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.23440000414848328,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.1964000016450882,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metal-oxide-metal-capacitors","display_name":"metal-oxide-metal capacitors","score":0.9580000042915344},{"id":"https://openalex.org/keywords/on-wafer-calibration","display_name":"on-wafer calibration","score":0.7540000081062317},{"id":"https://openalex.org/keywords/g-band","display_name":"G-band","score":0.7689999938011169},{"id":"https://openalex.org/keywords/electromagnetic-simulation","display_name":"electromagnetic simulation","score":0.5879999995231628}],"concepts":[{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.7620915174484253},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.721960723400116},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7133967280387878},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5302730798721313},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5085488557815552},{"id":"https://openalex.org/C2780033567","wikidata":"https://www.wikidata.org/wiki/Q6823720","display_name":"Method of moments (probability theory)","level":3,"score":0.45886513590812683},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.454362690448761},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.42304155230522156},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.41824275255203247},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36425358057022095},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2589935064315796},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.215078204870224},{"id":"https://openalex.org/C185429906","wikidata":"https://www.wikidata.org/wiki/Q1130160","display_name":"Estimator","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/eumic.2019.8909558","doi":"https://doi.org/10.23919/eumic.2019.8909558","is_oa":false,"landing_page_url":"https://doi.org/10.23919/eumic.2019.8909558","pdf_url":null,"source":{"id":"https://openalex.org/S4306418365","display_name":"European Microwave Integrated Circuits Conference","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 14th European Microwave Integrated Circuits Conference (EuMIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1686563111","https://openalex.org/W1972379777","https://openalex.org/W2111068907","https://openalex.org/W2187003240","https://openalex.org/W2408248310","https://openalex.org/W2620735264","https://openalex.org/W2903066284"],"related_works":["https://openalex.org/W2165804878","https://openalex.org/W2583270594","https://openalex.org/W2941903509","https://openalex.org/W1988169393","https://openalex.org/W1980496481","https://openalex.org/W2100256619","https://openalex.org/W2098894727","https://openalex.org/W2113835852","https://openalex.org/W2130442305","https://openalex.org/W7099187633"],"abstract_inverted_index":{"In":[0],"this":[1,123],"paper":[2],"Metal-Oxide-Metal":[3],"(MOM)":[4],"capacitors":[5,118],"integrated":[6],"in":[7,100,122],"a":[8],"BiCMOS":[9],"55-nm":[10],"process":[11],"are":[12,119],"characterized":[13,121],"by":[14],"using":[15],"3D-TRL":[16,25,86,99],"calibration":[17],"technique.":[18],"Using":[19],"3D":[20,64],"electromagnetic":[21],"(EM)":[22],"simulation,":[23,66,84],"optimized":[24],"standards":[26],"were":[27,55],"designed":[28],"to":[29,77,89],"cancel":[30],"the":[31,34,42,72,85,90,95,98,101,106,113],"impact":[32],"of":[33,97,108],"Back-End-of-Line":[35],"and":[36,58,69],"define":[37],"new":[38],"reference":[39],"planes":[40],"at":[41],"MOM":[43,53,117],"access-line":[44],"on":[45,82],"low":[46],"level":[47],"metal":[48],"(Metal":[49],"4).":[50],"The":[51],"intrinsic":[52],"parameters":[54],"well":[56],"extracted":[57],"good":[59],"agreement":[60],"was":[61,87],"reached":[62],"between,":[63],"EM":[65,83],"Design-kit":[67],"simulation":[68],"measurement":[70],"within":[71],"frequency":[73,124],"range":[74],"from":[75],"140":[76],"220":[78],"GHz.":[79],"Further,":[80],"based":[81],"compared":[88],"conventional":[91],"TRL.":[92],"This":[93],"proved":[94],"advantage":[96],"parasitic":[102],"resistance":[103],"extraction.":[104],"To":[105],"best":[107],"author's":[109],"knowledge,":[110],"it":[111],"is":[112],"first":[114],"time":[115],"that":[116],"accurately":[120],"range.":[125]},"counts_by_year":[{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2019-12-05T00:00:00"}