{"id":"https://openalex.org/W2984635313","doi":"https://doi.org/10.1109/isdrs.2003.1272103","title":"Design and fabrication of Schottky diode, on-chip RF power defector","display_name":"Design and fabrication of Schottky diode, on-chip RF power defector","publication_year":2004,"publication_date":"2004-07-08","ids":{"openalex":"https://openalex.org/W2984635313","doi":"https://doi.org/10.1109/isdrs.2003.1272103","mag":"2984635313"},"language":"en","primary_location":{"id":"doi:10.1109/isdrs.2003.1272103","doi":"https://doi.org/10.1109/isdrs.2003.1272103","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isdrs.2003.1272103","pdf_url":null,"source":{"id":"https://openalex.org/S4306420058","display_name":"International Semiconductor Device Research Symposium","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Semiconductor Device Research Symposium, 2003","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085864474","display_name":"Woochul Jeon","orcid":"https://orcid.org/0000-0001-6251-761X","observed_orcids":["https://orcid.org/0000-0001-6251-761X"]},"institutions":[{"id":"https://openalex.org/I66946132","display_name":"University of Maryland, College Park","ror":"https://ror.org/047s2c258","country_code":"US","type":"education","lineage":["https://openalex.org/I66946132"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Woochul Jeon","raw_affiliation_strings":["Institute Research in Electronics and Applied Physics, University of Maryland, USA","Inst. Res. in Electron. & Appl. Phys., Maryland Univ., College Park, MD, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute Research in Electronics and Applied Physics, University of Maryland, USA","institution_ids":[]},{"raw_affiliation_string":"Inst. Res. in Electron. & Appl. Phys., Maryland Univ., College Park, MD, USA","institution_ids":["https://openalex.org/I66946132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072646746","display_name":"John Rodgers","orcid":"https://orcid.org/0000-0001-7553-008X","observed_orcids":["https://orcid.org/0000-0001-7553-008X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Rodgers","raw_affiliation_strings":["Institute Research in Electronics and Applied Physics, University of Maryland, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute Research in Electronics and Applied Physics, University of Maryland, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5097598769","display_name":"J. MeIngailis","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. MeIngailis","raw_affiliation_strings":["Institute Research in Electronics and Applied Physics, University of Maryland, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute Research in Electronics and Applied Physics, University of Maryland, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.54979897,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"139","issue":null,"first_page":"294","last_page":"295"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.7724999785423279,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.7724999785423279,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.0471000000834465,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.041099999099969864,"subfield":{"id":"https://openalex.org/subfields/3103","display_name":"Astronomy and Astrophysics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/schottky-diodes","display_name":"Schottky diodes","score":0.9900000095367432},{"id":"https://openalex.org/keywords/rf-power-detector","display_name":"RF power detector","score":0.8450000286102295},{"id":"https://openalex.org/keywords/photomask-design","display_name":"mask design","score":0.5440000295639038},{"id":"https://openalex.org/keywords/series-resistance","display_name":"series resistance","score":0.9509999752044678},{"id":"https://openalex.org/keywords/rapid-thermal-annealing","display_name":"rapid thermal annealing","score":0.9089999794960022},{"id":"https://openalex.org/keywords/sio2-patterning","display_name":"SiO2 patterning","score":0.7910000085830688},{"id":"https://openalex.org/keywords/rf-power-measurement","display_name":"RF power measurement","score":0.48399999737739563}],"concepts":[{"id":"https://openalex.org/C205200001","wikidata":"https://www.wikidata.org/wiki/Q176066","display_name":"Schottky diode","level":3,"score":0.9004405736923218},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.7681810259819031},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7389448881149292},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7043434381484985},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.7033789753913879},{"id":"https://openalex.org/C196054291","wikidata":"https://www.wikidata.org/wiki/Q7276624","display_name":"RF power amplifier","level":4,"score":0.5918056964874268},{"id":"https://openalex.org/C16115445","wikidata":"https://www.wikidata.org/wiki/Q2391942","display_name":"Schottky barrier","level":3,"score":0.5117899775505066},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4999814033508301},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.4597468972206116},{"id":"https://openalex.org/C14485415","wikidata":"https://www.wikidata.org/wiki/Q5384730","display_name":"Equivalent series resistance","level":3,"score":0.45641782879829407},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.4418559968471527},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.4285365343093872},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.25276052951812744},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.1659744381904602},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.14789649844169617},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08467763662338257},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isdrs.2003.1272103","doi":"https://doi.org/10.1109/isdrs.2003.1272103","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isdrs.2003.1272103","pdf_url":null,"source":{"id":"https://openalex.org/S4306420058","display_name":"International Semiconductor Device Research Symposium","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Semiconductor Device Research Symposium, 2003","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1597420946","https://openalex.org/W1901004128","https://openalex.org/W1975335818","https://openalex.org/W2057809047"],"related_works":["https://openalex.org/W2107816521","https://openalex.org/W2057809047","https://openalex.org/W2011379925","https://openalex.org/W2543317958","https://openalex.org/W2313197838","https://openalex.org/W1645950911","https://openalex.org/W2123347654","https://openalex.org/W7096705112","https://openalex.org/W1600451123","https://openalex.org/W2096222872"],"abstract_inverted_index":{"Schottky":[0,24],"diodes":[1,25],"are":[2,69],"fast":[3],"rectifying":[4],"devices":[5],"and":[6,30,37,58],"can":[7],"be":[8],"used":[9,42],"as":[10],"RF":[11,65,76],"power":[12,66,84],"detectors.":[13],"In":[14,78],"this":[15],"article":[16],"we":[17,81],"designed":[18],"a":[19],"mask":[20],"set":[21],"for":[22],"fabricating":[23,62],"with":[26,75],"reduced":[27],"contact":[28,86],"size":[29],"minimum":[31],"series":[32],"resistance":[33],"between":[34],"the":[35,63],"n":[36],"n+":[38],"regions.":[39],"Processing":[40],"steps":[41],"are:":[43],"patterning":[44],"of":[45],"SiO/sub":[46],"2/,":[47],"n/sup":[48],"+/":[49],"activation":[50],"by":[51,71,85],"rapid":[52],"thermal":[53],"annealing,":[54],"e-beam":[55],"Al":[56,59],"deposition,":[57],"patterning.":[60],"After":[61],"diodes,":[64],"detecting":[67],"characteristics":[68],"measured":[70],"directly":[72],"irradiating":[73],"chips":[74],"power.":[77],"some":[79],"cases,":[80],"also":[82],"injected":[83],"probes.":[87]},"counts_by_year":[{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2019-11-22T00:00:00"}