{"id":"https://openalex.org/W2983508142","doi":"https://doi.org/10.1016/j.tsf.2019.137701","title":"Optical characterization of sputtered aluminum nitride thin films \u2013 correlating refractive index with degree of c-axis orientation","display_name":"Optical characterization of sputtered aluminum nitride thin films \u2013 correlating refractive index with degree of c-axis orientation","publication_year":2019,"publication_date":"2019-11-15","ids":{"openalex":"https://openalex.org/W2983508142","doi":"https://doi.org/10.1016/j.tsf.2019.137701","mag":"2983508142"},"language":"en","primary_location":{"id":"doi:10.1016/j.tsf.2019.137701","doi":"https://doi.org/10.1016/j.tsf.2019.137701","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2019.137701","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5090186090","display_name":"Abdallah Ababneh","orcid":"https://orcid.org/0000-0002-3746-7507","observed_orcids":["https://orcid.org/0000-0002-3746-7507"]},"institutions":[{"id":"https://openalex.org/I85507684","display_name":"Yarmouk University","ror":"https://ror.org/004mbaj56","country_code":"JO","type":"education","lineage":["https://openalex.org/I85507684"]},{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE","JO"],"is_corresponding":true,"raw_author_name":"A. Ababneh","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany","Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany; Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan"],"raw_orcid":"https://orcid.org/0000-0002-3746-7507","affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany","institution_ids":["https://openalex.org/I91712215"]},{"raw_affiliation_string":"Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","institution_ids":["https://openalex.org/I85507684"]},{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany; Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","institution_ids":["https://openalex.org/I85507684","https://openalex.org/I91712215"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019227804","display_name":"Zaid M. Albataineh","orcid":"https://orcid.org/0000-0001-9990-4189","observed_orcids":["https://orcid.org/0000-0001-9990-4189"]},"institutions":[{"id":"https://openalex.org/I85507684","display_name":"Yarmouk University","ror":"https://ror.org/004mbaj56","country_code":"JO","type":"education","lineage":["https://openalex.org/I85507684"]}],"countries":["JO"],"is_corresponding":false,"raw_author_name":"Z. Albataineh","raw_affiliation_strings":["Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","institution_ids":["https://openalex.org/I85507684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033289244","display_name":"Ahmad Dagamseh","orcid":"https://orcid.org/0000-0001-5885-1201","observed_orcids":["https://orcid.org/0000-0001-5885-1201"]},"institutions":[{"id":"https://openalex.org/I85507684","display_name":"Yarmouk University","ror":"https://ror.org/004mbaj56","country_code":"JO","type":"education","lineage":["https://openalex.org/I85507684"]}],"countries":["JO"],"is_corresponding":false,"raw_author_name":"A.M.K. Dagamseh","raw_affiliation_strings":["Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","institution_ids":["https://openalex.org/I85507684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033801960","display_name":"Idrees S. Al-Kofahi","orcid":"https://orcid.org/0000-0002-6256-8190","observed_orcids":["https://orcid.org/0000-0002-6256-8190"]},"institutions":[{"id":"https://openalex.org/I85507684","display_name":"Yarmouk University","ror":"https://ror.org/004mbaj56","country_code":"JO","type":"education","lineage":["https://openalex.org/I85507684"]}],"countries":["JO"],"is_corresponding":false,"raw_author_name":"I.S. Al-kofahi","raw_affiliation_strings":["Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Jordan","institution_ids":["https://openalex.org/I85507684"]}]},{"author_position":"middle","author":{"id":null,"display_name":"B. Sch\u00e4fer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210091344","display_name":"Leibniz-Institute for New Materials","ror":"https://ror.org/00g656d67","country_code":"DE","type":"facility","lineage":["https://openalex.org/I315704651","https://openalex.org/I4210091344","https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Sch\u00e4fer","raw_affiliation_strings":["INM\u2014Leibniz Institute for New Materials, Campus D2 2, 66123 Saarbr\u00fccken, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"INM\u2014Leibniz Institute for New Materials, Campus D2 2, 66123 Saarbr\u00fccken, Germany","institution_ids":["https://openalex.org/I4210091344"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000006591","display_name":"Tobias Zengerle","orcid":"https://orcid.org/0000-0003-0590-9443","observed_orcids":["https://orcid.org/0000-0003-0590-9443"]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Zengerle","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003465410","display_name":"Karin Bauer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Bauer","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026915398","display_name":"Helmut Seidel","orcid":"https://orcid.org/0000-0003-4210-2964","observed_orcids":["https://orcid.org/0000-0003-4210-2964"]},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Seidel","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Germany","institution_ids":["https://openalex.org/I91712215"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5090186090"],"corresponding_institution_ids":["https://openalex.org/I85507684","https://openalex.org/I91712215"],"apc_list":{"value":2900,"currency":"USD","value_usd":2900},"apc_paid":null,"fwci":0.542,"has_fulltext":false,"cited_by_count":28,"citation_normalized_percentile":{"value":0.60681714,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"693","issue":null,"first_page":"137701","last_page":"137701"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9003999829292297,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9003999829292297,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.0835999995470047,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.010099999606609344,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aluminum-nitride-thin-films","display_name":"aluminum nitride thin films","score":0.8989999890327454},{"id":"https://openalex.org/keywords/refractive-index","display_name":"refractive index","score":0.8519999980926514},{"id":"https://openalex.org/keywords/c-axis-orientation","display_name":"c-axis orientation","score":0.996999979019165},{"id":"https://openalex.org/keywords/sputtered-thin-films","display_name":"sputtered thin films","score":0.5590000152587891},{"id":"https://openalex.org/keywords/piezoelectric-materials","display_name":"piezoelectric materials","score":0.8560000061988831},{"id":"https://openalex.org/keywords/optical-properties","display_name":"optical properties","score":0.5419999957084656},{"id":"https://openalex.org/keywords/x-ray-reflectivity","display_name":"X-ray reflectivity","score":0.6389999985694885},{"id":"https://openalex.org/keywords/spectroscopic-ellipsometry","display_name":"spectroscopic ellipsometry","score":0.7770000100135803}],"concepts":[{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.7584899663925171},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.756394624710083},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6638562083244324},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.6270383596420288},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5358665585517883},{"id":"https://openalex.org/C2775997480","wikidata":"https://www.wikidata.org/wiki/Q586277","display_name":"Degree (music)","level":2,"score":0.5229825973510742},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.5139979720115662},{"id":"https://openalex.org/C16345878","wikidata":"https://www.wikidata.org/wiki/Q107472979","display_name":"Orientation (vector space)","level":2,"score":0.49003922939300537},{"id":"https://openalex.org/C2777382242","wikidata":"https://www.wikidata.org/wiki/Q6017816","display_name":"Index (typography)","level":2,"score":0.45474645495414734},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.44223278760910034},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.37418287992477417},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28399932384490967},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1457279920578003},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09324482083320618},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09197694063186646},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.08781930804252625},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.07748749852180481},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.0},{"id":"https://openalex.org/C136764020","wikidata":"https://www.wikidata.org/wiki/Q466","display_name":"World Wide Web","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.tsf.2019.137701","doi":"https://doi.org/10.1016/j.tsf.2019.137701","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2019.137701","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G5682084596","display_name":null,"funder_award_id":"SE1425/14-1","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"}],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W352538250","https://openalex.org/W1966200157","https://openalex.org/W1971353140","https://openalex.org/W1976407798","https://openalex.org/W1977707585","https://openalex.org/W1987820481","https://openalex.org/W1988476997","https://openalex.org/W2009231714","https://openalex.org/W2014352302","https://openalex.org/W2019552165","https://openalex.org/W2021845484","https://openalex.org/W2025060984","https://openalex.org/W2026648097","https://openalex.org/W2029275116","https://openalex.org/W2032261336","https://openalex.org/W2038867669","https://openalex.org/W2040714211","https://openalex.org/W2043289735","https://openalex.org/W2056798887","https://openalex.org/W2067425773","https://openalex.org/W2074143600","https://openalex.org/W2074814291","https://openalex.org/W2077882838","https://openalex.org/W2082067277","https://openalex.org/W2082884091","https://openalex.org/W2090476860","https://openalex.org/W2095382286","https://openalex.org/W2106436394","https://openalex.org/W2108233417","https://openalex.org/W2132276428","https://openalex.org/W2142023360","https://openalex.org/W2158773423","https://openalex.org/W2166006468","https://openalex.org/W2172124160","https://openalex.org/W2214785442","https://openalex.org/W2727694211","https://openalex.org/W2780373132","https://openalex.org/W2802938218"],"related_works":["https://openalex.org/W1973726126","https://openalex.org/W1999084265","https://openalex.org/W2074768930","https://openalex.org/W3023228069","https://openalex.org/W1533199957","https://openalex.org/W2351507805","https://openalex.org/W2727694211","https://openalex.org/W2779875503","https://openalex.org/W2026648097","https://openalex.org/W2026518641"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2019-11-22T00:00:00"}