{"id":"https://openalex.org/W2969948857","doi":"https://doi.org/10.1109/transducers.2019.8808616","title":"Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection","display_name":"Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection","publication_year":2019,"publication_date":"2019-06-01","ids":{"openalex":"https://openalex.org/W2969948857","doi":"https://doi.org/10.1109/transducers.2019.8808616","mag":"2969948857"},"language":"en","primary_location":{"id":"doi:10.1109/transducers.2019.8808616","doi":"https://doi.org/10.1109/transducers.2019.8808616","is_oa":false,"landing_page_url":"https://doi.org/10.1109/transducers.2019.8808616","pdf_url":null,"source":{"id":"https://openalex.org/S4306419851","display_name":"International Conference on Solid-State Sensors, Actuators and Microsystems","issn_l":"2167-0021","issn":["2167-0021"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101487263","display_name":"Zhuqing Wang","orcid":"https://orcid.org/0000-0002-0270-7451","observed_orcids":["https://orcid.org/0000-0002-0270-7451"]},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Zhuqing Wang","raw_affiliation_strings":["Graduate School of Engineering, Tohoku University, Sendai, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tohoku University, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001866742","display_name":"Takumi Hokama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takumi Hokama","raw_affiliation_strings":["Graduate School of Engineering, Tohoku University, Sendai, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tohoku University, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081063389","display_name":"Masaya Toda","orcid":"https://orcid.org/0000-0003-3849-6948","observed_orcids":["https://orcid.org/0000-0003-3849-6948"]},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masaya Toda","raw_affiliation_strings":["Graduate School of Engineering, Tohoku University, Sendai, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Tohoku University, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110355659","display_name":"Mai Yamazaki","orcid":"https://orcid.org/0009-0003-2461-455X","observed_orcids":["https://orcid.org/0009-0003-2461-455X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mai Yamazaki","raw_affiliation_strings":["Mitsui Chemicals, Inc., Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mitsui Chemicals, Inc., Tokyo, Japan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077592706","display_name":"Krzysztof Moorthi","orcid":"https://orcid.org/0000-0001-7947-9445","observed_orcids":["https://orcid.org/0000-0001-7947-9445"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Krzysztof Moorthi","raw_affiliation_strings":["Mitsui Chemicals, Inc., Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mitsui Chemicals, Inc., Tokyo, Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077280543","display_name":"Takahito Ono","orcid":"https://orcid.org/0000-0002-0927-9066","observed_orcids":["https://orcid.org/0000-0002-0927-9066"]},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]},{"id":"https://openalex.org/I4405286487","display_name":"Micro System Integration Center, Tohoku University","ror":"https://ror.org/029k66978","country_code":"JP","type":"facility","lineage":["https://openalex.org/I201537933","https://openalex.org/I4405286487"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takahito Ono","raw_affiliation_strings":["Micro System Integration Center, Tohoku University, Sendai, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro System Integration Center, Tohoku University, Sendai, Japan","institution_ids":["https://openalex.org/I201537933","https://openalex.org/I4405286487"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"2107","last_page":"2109"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.5565999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.5565999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.43650001287460327,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistors","display_name":"piezoresistors","score":0.8149999976158142},{"id":"https://openalex.org/keywords/stress-concentration","display_name":"stress concentration","score":0.9810000061988831},{"id":"https://openalex.org/keywords/polymer-composite-membranes","display_name":"polymer composite membranes","score":0.7210000157356262},{"id":"https://openalex.org/keywords/humidity-sensing","display_name":"humidity sensing","score":0.8659999966621399},{"id":"https://openalex.org/keywords/acetone-sensing","display_name":"acetone detection","score":0.7699999809265137},{"id":"https://openalex.org/keywords/ethanol-detection","display_name":"ethanol detection","score":0.9909999966621399},{"id":"https://openalex.org/keywords/sensor-sensitivity-enhancement","display_name":"sensor sensitivity enhancement","score":0.5019999742507935}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9556698799133301},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7752334475517273},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.7478920817375183},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.738449215888977},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.5874772071838379},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5823950171470642},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.5301616787910461},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4156908392906189},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35351669788360596},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.13488438725471497},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/transducers.2019.8808616","doi":"https://doi.org/10.1109/transducers.2019.8808616","is_oa":false,"landing_page_url":"https://doi.org/10.1109/transducers.2019.8808616","pdf_url":null,"source":{"id":"https://openalex.org/S4306419851","display_name":"International Conference on Solid-State Sensors, Actuators and Microsystems","issn_l":"2167-0021","issn":["2167-0021"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2048541209","https://openalex.org/W2110357888","https://openalex.org/W2274657429","https://openalex.org/W2805069109","https://openalex.org/W2889194459","https://openalex.org/W2909218646"],"related_works":["https://openalex.org/W4411799941","https://openalex.org/W3170448600","https://openalex.org/W4390887470","https://openalex.org/W4312766503","https://openalex.org/W1994167154","https://openalex.org/W2910692275","https://openalex.org/W3121930367","https://openalex.org/W1973711110","https://openalex.org/W2908373970","https://openalex.org/W1977103659"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3,11,17,25,38,84],"nanomechanical":[4],"gas":[5,44],"sensor":[6,14,126,134],"using":[7],"stress":[8,39,47,85],"concentration":[9],"at":[10,31,64],"piezoresistor.":[12],"The":[13,34,46,71,87,119],"consist":[15],"of":[16,43,54,61,68,76,102,123],"functional":[18],"polymer":[19],"embedded":[20],"into":[21],"Si":[22,26],"comb":[23],"and":[24,79,100,132,138],"cantilever":[27,56,78],"with":[28],"the":[29,32,51,55,58,62,65,69,74,77,80,103,124],"piezoresistor":[30,63],"support.":[33],"composite":[35],"membrane":[36],"generates":[37],"depending":[40],"on":[41],"absorption":[42],"species.":[45],"is":[48,110,127],"converted":[49],"via":[50],"lateral":[52],"deflection":[53],"to":[57,112,121],"enhanced":[59],"strain":[60],"support":[66],"part":[67,82],"cantilever.":[70],"difference":[72],"in":[73],"stiffness":[75],"piezoresistive":[81],"induces":[83],"concentration.":[86],"proposed":[88],"design":[89,105],"gives":[90],"approximately":[91],"20":[92],"times":[93],"higher":[94],"sensitivity":[95,120],"than":[96],"other":[97],"conventional":[98],"sensors,":[99],"\u0394R/R":[101,114],"final":[104],"for":[106],"1%RH":[107],"humidity":[108,122],"change":[109],"estimated":[111],"be":[113],"=":[115],"2.34":[116],"\u00d7":[117,129],"10-3.":[118],"fabricated":[125],"3.92":[128],"10-5":[130],"/%RH":[131],"this":[133],"can":[135],"distinguish":[136],"acetone":[137],"ethanol.":[139]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-10-26T11:51:55.731654","created_date":"2019-08-29T00:00:00"}