{"id":"https://openalex.org/W2962486845","doi":"https://doi.org/10.1063/1.5097624","title":"Dual-frequency piezoelectric micromachined ultrasonic transducers","display_name":"Dual-frequency piezoelectric micromachined ultrasonic transducers","publication_year":2019,"publication_date":"2019-07-08","ids":{"openalex":"https://openalex.org/W2962486845","doi":"https://doi.org/10.1063/1.5097624","mag":"2962486845"},"language":"en","primary_location":{"id":"doi:10.1063/1.5097624","doi":"https://doi.org/10.1063/1.5097624","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.5097624","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038165106","display_name":"Lixiang Wu","orcid":"https://orcid.org/0000-0003-3441-2137","observed_orcids":["https://orcid.org/0000-0003-3441-2137"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I2801380234","display_name":"University of South-Eastern Norway","ror":"https://ror.org/05ecg5h20","country_code":"NO","type":"education","lineage":["https://openalex.org/I2801380234"]},{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN","NO","US"],"is_corresponding":false,"raw_author_name":"Lixiang Wu","raw_affiliation_strings":["Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","School of Electronics and Information, Hangzhou Dianzi University 1 , Hangzhou 310018, China","3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway"],"raw_orcid":"https://orcid.org/0000-0003-3441-2137","affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"School of Electronics and Information, Hangzhou Dianzi University 1 , Hangzhou 310018, China","institution_ids":["https://openalex.org/I50760025"]},{"raw_affiliation_string":"3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway","institution_ids":["https://openalex.org/I2801380234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049536621","display_name":"Xuyuan Chen","orcid":"https://orcid.org/0000-0003-0526-0648","observed_orcids":["https://orcid.org/0000-0003-0526-0648"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I2801380234","display_name":"University of South-Eastern Norway","ror":"https://ror.org/05ecg5h20","country_code":"NO","type":"education","lineage":["https://openalex.org/I2801380234"]},{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN","NO","US"],"is_corresponding":false,"raw_author_name":"Xuyuan Chen","raw_affiliation_strings":["Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","Department of Microsystems, University of Southeast Norway 3 , Borre N-3184, Norway","1School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Department of Microsystems, University of Southeast Norway 3 , Borre N-3184, Norway","institution_ids":["https://openalex.org/I2801380234"]},{"raw_affiliation_string":"1School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114929531","display_name":"Gaofeng Wang","orcid":"https://orcid.org/0000-0001-8599-7249","observed_orcids":["https://orcid.org/0000-0001-8599-7249"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I2801380234","display_name":"University of South-Eastern Norway","ror":"https://ror.org/05ecg5h20","country_code":"NO","type":"education","lineage":["https://openalex.org/I2801380234"]},{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN","NO","US"],"is_corresponding":false,"raw_author_name":"Gaofeng Wang","raw_affiliation_strings":["School of Electronics and Information, Hangzhou Dianzi University 1 , Hangzhou 310018, China","2Department of Biomedical Engineering and Ophthalmology, University of Southern California, Los Angeles, California 90089, USA","3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway"],"raw_orcid":"https://orcid.org/0000-0001-8599-7249","affiliations":[{"raw_affiliation_string":"School of Electronics and Information, Hangzhou Dianzi University 1 , Hangzhou 310018, China","institution_ids":["https://openalex.org/I50760025"]},{"raw_affiliation_string":"2Department of Biomedical Engineering and Ophthalmology, University of Southern California, Los Angeles, California 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway","institution_ids":["https://openalex.org/I2801380234"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081250646","display_name":"Qifa Zhou","orcid":"https://orcid.org/0000-0003-1527-3020","observed_orcids":["https://orcid.org/0000-0003-1527-3020"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I2801380234","display_name":"University of South-Eastern Norway","ror":"https://ror.org/05ecg5h20","country_code":"NO","type":"education","lineage":["https://openalex.org/I2801380234"]},{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN","NO","US"],"is_corresponding":false,"raw_author_name":"Qifa Zhou","raw_affiliation_strings":["Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","1School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China","3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering and Ophthalmology, University of Southern California 2 , Los Angeles, California 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"1School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China","institution_ids":["https://openalex.org/I50760025"]},{"raw_affiliation_string":"3Department of Microsystems, University of Southeast Norway, Borre N-3184, Norway","institution_ids":["https://openalex.org/I2801380234"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.324,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.75472733,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"115","issue":"2","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.8393999934196472,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.8393999934196472,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.05469999834895134,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.03460000082850456,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectric-micromachined-ultrasonic-transducers","display_name":"piezoelectric micromachined ultrasonic transducers","score":0.9599999785423279},{"id":"https://openalex.org/keywords/dual-frequency-ultrasound","display_name":"dual-frequency ultrasound","score":0.7239999771118164},{"id":"https://openalex.org/keywords/ring-electrode","display_name":"ring electrode","score":0.6349999904632568},{"id":"https://openalex.org/keywords/mode-superposition-method","display_name":"mode superposition","score":0.9480000138282776},{"id":"https://openalex.org/keywords/electrode-configuration-optimization","display_name":"electrode configuration optimization","score":0.7749999761581421},{"id":"https://openalex.org/keywords/biomedical-ultrasound","display_name":"biomedical ultrasound","score":0.5699999928474426}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7070804834365845},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.7010703086853027},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.690220057964325},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.6889374256134033},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.6272414922714233},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5263386964797974},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.4918944835662842},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.4902251362800598},{"id":"https://openalex.org/C27753989","wikidata":"https://www.wikidata.org/wiki/Q284885","display_name":"Superposition principle","level":2,"score":0.4542865753173828},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4442417025566101},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29002970457077026},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16704916954040527},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.16398298740386963},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08901709318161011},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.5097624","doi":"https://doi.org/10.1063/1.5097624","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.5097624","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/6","score":0.6200000047683716,"display_name":"Clean water and sanitation"}],"study_designs":[],"awards":[{"id":"https://openalex.org/G1550300136","display_name":null,"funder_award_id":"201708330397","funder_id":"https://openalex.org/F4320322725","funder_display_name":"China Scholarship Council"}],"funders":[{"id":"https://openalex.org/F4320322725","display_name":"China Scholarship Council","ror":"https://ror.org/04atp4p48"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1966291038","https://openalex.org/W1989658657","https://openalex.org/W1992641410","https://openalex.org/W2006491141","https://openalex.org/W2008460904","https://openalex.org/W2012779095","https://openalex.org/W2016291486","https://openalex.org/W2019123650","https://openalex.org/W2021948108","https://openalex.org/W2025118092","https://openalex.org/W2030197027","https://openalex.org/W2046989780","https://openalex.org/W2056326110","https://openalex.org/W2092950681","https://openalex.org/W2101842933","https://openalex.org/W2103517951","https://openalex.org/W2114345001","https://openalex.org/W2124204395","https://openalex.org/W2125702072","https://openalex.org/W2139398381","https://openalex.org/W2153087427","https://openalex.org/W2754704101","https://openalex.org/W2789587647","https://openalex.org/W2899363593","https://openalex.org/W4255484388"],"related_works":["https://openalex.org/W2995752895","https://openalex.org/W3179318984","https://openalex.org/W4411171953","https://openalex.org/W1978089044","https://openalex.org/W7124883247","https://openalex.org/W4415718375","https://openalex.org/W3164456493","https://openalex.org/W4416582957","https://openalex.org/W7126411703","https://openalex.org/W4322731806"],"abstract_inverted_index":{"A":[0],"piezoelectric":[1],"micromachined":[2],"ultrasonic":[3,153],"transducer":[4],"(pMUT)":[5],"operating":[6],"at":[7],"dual":[8],"frequencies":[9],"(3.75":[10],"MHz":[11],"and":[12,83,85,98,121,137],"18":[13],"MHz)":[14],"was":[15,40,89],"designed":[16],"to":[17,75,106,155],"achieve":[18],"an":[19],"ultrasound-on-a-chip":[20],"solution":[21],"for":[22,29,116],"next-generation":[23],"biomedical":[24],"applications.":[25],"Optimal":[26],"electrode":[27,79],"configurations":[28],"the":[30,53,56,61,66,96,102,127],"dual-frequency":[31,50,141,157,162],"pMUT":[32],"were":[33],"analyzed":[34],"using":[35,148],"finite":[36],"element":[37,160],"methods.":[38],"It":[39,88],"found":[41,91],"that":[42,60,92,126],"a":[43,112],"configuration":[44],"with":[45,73,118],"two":[46,63,128,149],"ring":[47,123],"electrodes":[48,124],"enabled":[49],"actuations":[51],"of":[52,55,65,95,101,161],"diaphragm":[54,67],"pMUT.":[57],"Simulations":[58,115],"showed":[59,125],"first":[62],"resonances":[64],"can":[68],"be":[69],"tuned":[70],"independently,":[71],"especially":[72],"regard":[74],"amplitude,":[76],"by":[77],"optimizing":[78],"parameters":[80],"(e.g.,":[81],"position":[82],"dimension)":[84],"applied":[86],"voltage.":[87],"also":[90],"optimized":[93],"distribution":[94],"R":[97],"Z":[99],"components":[100],"displacement":[103],"field":[104],"contributes":[105],"near":[107],"ideal":[108],"mode":[109],"superposition":[110],"in":[111,139,144],"single":[113],"diaphragm.":[114],"dual-actuations":[117],"both":[119],"inner":[120],"outer":[122],"resonant":[129],"modes":[130],"are":[131],"superimposed":[132],"without":[133],"significant":[134],"vibrational":[135],"crosstalk":[136],"result":[138],"high-quality":[140],"acoustic":[142],"radiation":[143],"water.":[145],"Unlike":[146],"transducers":[147],"or":[150],"more":[151],"single-frequency":[152],"resonators":[154],"generate":[156],"ultrasound,":[158],"every":[159],"pMUTs":[163],"exhibits":[164],"dual-resonant":[165],"response":[166],"simultaneously.":[167]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":7},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":4}],"updated_date":"2026-07-28T07:46:37.118299","created_date":"2019-07-23T00:00:00"}