{"id":"https://openalex.org/W2962148024","doi":"https://doi.org/10.1017/s1551929519000610","title":"Target Material Selection for Sputter Coating of SEM Samples","display_name":"Target Material Selection for Sputter Coating of SEM Samples","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2962148024","doi":"https://doi.org/10.1017/s1551929519000610","mag":"2962148024"},"language":"en","primary_location":{"id":"doi:10.1017/s1551929519000610","doi":"https://doi.org/10.1017/s1551929519000610","is_oa":true,"landing_page_url":"https://doi.org/10.1017/s1551929519000610","pdf_url":"https://www.cambridge.org/core/services/aop-cambridge-core/content/view/089A8657A8345CFFCF963BED868578D4/S1551929519000610a.pdf/div-class-title-target-material-selection-for-sputter-coating-of-sem-samples-div.pdf","source":{"id":"https://openalex.org/S74408252","display_name":"Microscopy Today","issn_l":"1551-9295","issn":["1551-9295","2150-3583"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy Today","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.cambridge.org/core/services/aop-cambridge-core/content/view/089A8657A8345CFFCF963BED868578D4/S1551929519000610a.pdf/div-class-title-target-material-selection-for-sputter-coating-of-sem-samples-div.pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006965162","display_name":"Rod Heu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Rod Heu","raw_affiliation_strings":["Rave Scientific, 8 Heller Park Lane, Somerset, NJ 08873"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Rave Scientific, 8 Heller Park Lane, Somerset, NJ 08873","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024420521","display_name":"Sina Shahbazmohamadi","orcid":"https://orcid.org/0000-0002-7268-5999","observed_orcids":["https://orcid.org/0000-0002-7268-5999"]},"institutions":[{"id":"https://openalex.org/I140172145","display_name":"University of Connecticut","ror":"https://ror.org/02der9h97","country_code":"US","type":"education","lineage":["https://openalex.org/I140172145"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sina Shahbazmohamadi","raw_affiliation_strings":["University of Connecticut, 159 Discovery Drive Storrs, CT 06269-3247"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Connecticut, 159 Discovery Drive Storrs, CT 06269-3247","institution_ids":["https://openalex.org/I140172145"]}]},{"author_position":"middle","author":{"id":null,"display_name":"John Yorston","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"John Yorston","raw_affiliation_strings":["Carl Zeiss Microscopy, One Zeiss Drive, Thornwood, NY 10594"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Carl Zeiss Microscopy, One Zeiss Drive, Thornwood, NY 10594","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5089159640","display_name":"Patrick Capeder","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Patrick Capeder","raw_affiliation_strings":["Safematic GmbH, Elestastrasse 12, CH-7310 Bad Ragas, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Safematic GmbH, Elestastrasse 12, CH-7310 Bad Ragas, Switzerland","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5006965162"],"corresponding_institution_ids":[],"apc_list":{"value":3554,"currency":"USD","value_usd":3554},"apc_paid":null,"fwci":2.2078,"has_fulltext":true,"cited_by_count":89,"citation_normalized_percentile":{"value":0.87429392,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":93,"max":100},"biblio":{"volume":"27","issue":"4","first_page":"32","last_page":"36"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9570000171661377,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9570000171661377,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.03880000114440918,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.002300000051036477,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"sputter deposition","score":0.9710000157356262},{"id":"https://openalex.org/keywords/sem-sample-preparation","display_name":"SEM sample preparation","score":0.6830000281333923},{"id":"https://openalex.org/keywords/thin-metal-coatings","display_name":"thin metal coatings","score":0.7699999809265137},{"id":"https://openalex.org/keywords/charging-effects","display_name":"charge effects","score":0.6510000228881836},{"id":"https://openalex.org/keywords/x-ray-microanalysis","display_name":"X-ray microanalysis","score":0.7710000276565552}],"concepts":[{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6706933975219727},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.6516285538673401},{"id":"https://openalex.org/C81917197","wikidata":"https://www.wikidata.org/wiki/Q628760","display_name":"Selection (genetic algorithm)","level":2,"score":0.6346969604492188},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6134783029556274},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.36917781829833984},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.20268288254737854},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16054821014404297},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1458570659160614},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.06497111916542053}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1017/s1551929519000610","doi":"https://doi.org/10.1017/s1551929519000610","is_oa":true,"landing_page_url":"https://doi.org/10.1017/s1551929519000610","pdf_url":"https://www.cambridge.org/core/services/aop-cambridge-core/content/view/089A8657A8345CFFCF963BED868578D4/S1551929519000610a.pdf/div-class-title-target-material-selection-for-sputter-coating-of-sem-samples-div.pdf","source":{"id":"https://openalex.org/S74408252","display_name":"Microscopy Today","issn_l":"1551-9295","issn":["1551-9295","2150-3583"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy Today","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1017/s1551929519000610","doi":"https://doi.org/10.1017/s1551929519000610","is_oa":true,"landing_page_url":"https://doi.org/10.1017/s1551929519000610","pdf_url":"https://www.cambridge.org/core/services/aop-cambridge-core/content/view/089A8657A8345CFFCF963BED868578D4/S1551929519000610a.pdf/div-class-title-target-material-selection-for-sputter-coating-of-sem-samples-div.pdf","source":{"id":"https://openalex.org/S74408252","display_name":"Microscopy Today","issn_l":"1551-9295","issn":["1551-9295","2150-3583"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy Today","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2962148024.pdf","grobid_xml":"https://content.openalex.org/works/W2962148024.grobid-xml"},"referenced_works_count":5,"referenced_works":["https://openalex.org/W1504193762","https://openalex.org/W1540359784","https://openalex.org/W2158252203","https://openalex.org/W4302083512","https://openalex.org/W4302335775"],"related_works":["https://openalex.org/W2051227979","https://openalex.org/W4234587054","https://openalex.org/W7077052468","https://openalex.org/W3193329638","https://openalex.org/W2611957679","https://openalex.org/W4321055483","https://openalex.org/W2801593635","https://openalex.org/W2262603297","https://openalex.org/W4214606496","https://openalex.org/W2012063642"],"abstract_inverted_index":{"This":[0],"article":[1],"describes":[2],"target":[3,60],"material":[4,61,74],"options":[5],"for":[6],"sputter":[7],"coaters":[8],"that":[9],"deposit":[10],"a":[11,20,23,48,52],"thin":[12],"metal":[13,25,53],"coating":[14,43],"on":[15,36],"non-conductive":[16],"SEM":[17,38,44,70],"samples.":[18],"Coating":[19],"sample":[21,29],"with":[22,46],"conductive":[24,30],"renders":[26],"an":[27],"insulating":[28],"enough":[31],"to":[32],"minimize":[33],"charging":[34],"effects":[35],"the":[37,69,72],"image.":[39],"In":[40],"most":[41],"cases,":[42],"samples":[45],"only":[47],"few":[49],"nanometers":[50],"of":[51],"results":[54],"in":[55],"crisp,":[56],"clear":[57],"images.":[58],"Proper":[59],"selection":[62],"is":[63],"dictated":[64],"by":[65],"overall":[66],"imaging":[67],"requirements,":[68],"available,":[71],"specimen":[73],"being":[75],"evaluated,":[76],"and":[77],"whether":[78],"X-ray":[79],"microanalysis":[80],"will":[81],"be":[82],"required.":[83]},"counts_by_year":[{"year":2026,"cited_by_count":23},{"year":2025,"cited_by_count":16},{"year":2024,"cited_by_count":17},{"year":2023,"cited_by_count":11},{"year":2022,"cited_by_count":10},{"year":2021,"cited_by_count":10},{"year":2020,"cited_by_count":2}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2019-07-23T00:00:00"}
