{"id":"https://openalex.org/W2953673777","doi":"https://doi.org/10.1364/ome.9.003132","title":"Laser plasma-induced damage characteristics of Ta 2 O 5 films","display_name":"Laser plasma-induced damage characteristics of Ta 2 O 5 films","publication_year":2019,"publication_date":"2019-06-26","ids":{"openalex":"https://openalex.org/W2953673777","doi":"https://doi.org/10.1364/ome.9.003132","mag":"2953673777"},"language":"en","primary_location":{"id":"doi:10.1364/ome.9.003132","doi":"https://doi.org/10.1364/ome.9.003132","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.9.003132","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1364/ome.9.003132","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Hongyuan Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24185976","display_name":"Sichuan University","ror":"https://ror.org/011ashp19","country_code":"CN","type":"education","lineage":["https://openalex.org/I24185976"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongyuan Chen","raw_affiliation_strings":["College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China","institution_ids":["https://openalex.org/I24185976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027606942","display_name":"Guoying Feng","orcid":"https://orcid.org/0000-0002-4533-1423","observed_orcids":["https://orcid.org/0000-0002-4533-1423"]},"institutions":[{"id":"https://openalex.org/I24185976","display_name":"Sichuan University","ror":"https://ror.org/011ashp19","country_code":"CN","type":"education","lineage":["https://openalex.org/I24185976"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guoying Feng","raw_affiliation_strings":["College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China","institution_ids":["https://openalex.org/I24185976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007454648","display_name":"Weixing Fan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24185976","display_name":"Sichuan University","ror":"https://ror.org/011ashp19","country_code":"CN","type":"education","lineage":["https://openalex.org/I24185976"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weixing Fan","raw_affiliation_strings":["College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China","institution_ids":["https://openalex.org/I24185976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001230731","display_name":"Jinghua Han","orcid":"https://orcid.org/0000-0002-0056-3992","observed_orcids":["https://orcid.org/0000-0002-0056-3992"]},"institutions":[{"id":"https://openalex.org/I24185976","display_name":"Sichuan University","ror":"https://ror.org/011ashp19","country_code":"CN","type":"education","lineage":["https://openalex.org/I24185976"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinghua Han","raw_affiliation_strings":["College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China","institution_ids":["https://openalex.org/I24185976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043780028","display_name":"Yaguo Li","orcid":"https://orcid.org/0000-0003-1839-3351","observed_orcids":["https://orcid.org/0000-0003-1839-3351"]},"institutions":[{"id":"https://openalex.org/I4402554102","display_name":"Chengdu Fine Optical Engineering Research Center","ror":"https://ror.org/05r2q4835","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4402554102"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaguo Li","raw_affiliation_strings":["Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China"],"raw_orcid":"https://orcid.org/0000-0003-1839-3351","affiliations":[{"raw_affiliation_string":"Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China","institution_ids":["https://openalex.org/I4402554102"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027266390","display_name":"Qiuyu Lai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24185976","display_name":"Sichuan University","ror":"https://ror.org/011ashp19","country_code":"CN","type":"education","lineage":["https://openalex.org/I24185976"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiuyu Lai","raw_affiliation_strings":["College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Electronics and Information Engineering, Sichuan University , Chengdu , 610064 , China","institution_ids":["https://openalex.org/I24185976"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":1843,"currency":"USD","value_usd":1843},"apc_paid":{"value":1843,"currency":"USD","value_usd":1843},"fwci":2.1535,"has_fulltext":false,"cited_by_count":22,"citation_normalized_percentile":{"value":0.87790615,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"9","issue":"7","first_page":"3132","last_page":"3132"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9253000020980835,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9253000020980835,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.054999999701976776,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma","score":0.0024999999441206455,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ta2o5","display_name":"tantalum pentoxide","score":0.8069999814033508},{"id":"https://openalex.org/keywords/ta2o5-thin-films","display_name":"Ta2O5 thin films","score":0.9819999933242798},{"id":"https://openalex.org/keywords/laser-induced-damage","display_name":"laser-induced damage","score":0.8069999814033508},{"id":"https://openalex.org/keywords/laser-produced-plasma","display_name":"laser-produced plasma","score":0.5419999957084656},{"id":"https://openalex.org/keywords/plasma-shocks","display_name":"plasma shocks","score":0.9190000295639038},{"id":"https://openalex.org/keywords/thermal-ablation","display_name":"thermal ablation","score":0.9779999852180481},{"id":"https://openalex.org/keywords/surface-cracking","display_name":"surface cracking","score":0.8339999914169312},{"id":"https://openalex.org/keywords/film-peeling","display_name":"film peeling","score":0.7229999899864197},{"id":"https://openalex.org/keywords/amorphous-to-crystalline-transition","display_name":"amorphous-to-crystalline transition","score":0.8190000057220459}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8848749995231628},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.7186358571052551},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5650826692581177},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.5272780060768127},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.48401233553886414},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.47822660207748413},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.46178796887397766},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.4612921476364136},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4387959837913513},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4135356843471527},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.41195616126060486},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36674124002456665},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1243230402469635},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1364/ome.9.003132","doi":"https://doi.org/10.1364/ome.9.003132","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.9.003132","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1364/ome.9.003132","doi":"https://doi.org/10.1364/ome.9.003132","is_oa":true,"landing_page_url":"https://doi.org/10.1364/ome.9.003132","pdf_url":null,"source":{"id":"https://openalex.org/S2496121912","display_name":"Optical Materials Express","issn_l":"2159-3930","issn":["2159-3930"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","oarl","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Materials Express","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G2747874741","display_name":null,"funder_award_id":"U1730141","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6734892149","display_name":null,"funder_award_id":"2018FZ0032","funder_id":"https://openalex.org/F4320322922","funder_display_name":"Department of Science and Technology of Sichuan Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322922","display_name":"Department of Science and Technology of Sichuan Province","ror":"https://ror.org/04323m874"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1482363076","https://openalex.org/W1513763899","https://openalex.org/W1521026343","https://openalex.org/W1554713466","https://openalex.org/W1557896917","https://openalex.org/W1965349591","https://openalex.org/W1967402939","https://openalex.org/W1976274449","https://openalex.org/W1991457814","https://openalex.org/W1992454659","https://openalex.org/W2000475541","https://openalex.org/W2043371886","https://openalex.org/W2050861746","https://openalex.org/W2053841080","https://openalex.org/W2055065871","https://openalex.org/W2060483292","https://openalex.org/W2064939311","https://openalex.org/W2065694881","https://openalex.org/W2075563702","https://openalex.org/W2075807111","https://openalex.org/W2093982084","https://openalex.org/W2530545919","https://openalex.org/W2588741231","https://openalex.org/W2605783814"],"related_works":["https://openalex.org/W2069094459","https://openalex.org/W2043297701","https://openalex.org/W2047356819","https://openalex.org/W2057096271","https://openalex.org/W2055513861","https://openalex.org/W1977861863","https://openalex.org/W1528460027","https://openalex.org/W2316949787","https://openalex.org/W7052648818","https://openalex.org/W7066672452"],"abstract_inverted_index":{"As":[0],"a":[1,5,131],"material":[2],"that":[3,43,123,149],"exhibits":[4],"high":[6],"refractive":[7],"index":[8],"and":[9,21,55,72,89,111,115,141],"an":[10,128],"excellent":[11],"chemical":[12,22],"stability,":[13],"Ta2O5":[14,36],"is":[15],"widely":[16],"used":[17],"in":[18,95,153],"the":[19,29,44,48,59,63,67,93,96,100,103,106,112,120,124,136,139,150,154,159],"microelectronics":[20],"industries.":[23],"In":[24],"this":[25],"study,":[26],"we":[27],"analyzed":[28],"effect":[30],"of":[31,47,66,105,119,138,158],"plasma":[32,77],"shock":[33],"waves":[34],"on":[35],"thin":[37],"films.":[38],"The":[39,144],"experimental":[40],"results":[41,147],"showed":[42],"damage":[45,160],"characteristics":[46],"film":[49,107,125,155],"include":[50],"thermal":[51],"ablation,":[52],"surface":[53],"cracks,":[54],"peeling":[56],"off":[57],"from":[58,127],"substrate":[60],"owing":[61,134],"to":[62,75,130,135,162],"repeated":[64],"action":[65,137],"pulse.":[68],"Coating":[69],"characterization":[70],"before":[71],"after":[73,109],"exposure":[74],"laser":[76],"was":[78],"performed":[79],"using":[80],"UV-Vis":[81],"spectroscopy,":[82,88],"energy":[83],"dispersive":[84],"spectroscopy":[85],"(EDS),":[86],"Raman":[87,113],"X-ray":[90,116],"diffraction.":[91],"With":[92],"increase":[94],"light":[97],"absorbed":[98],"by":[99],"ablated":[101],"products,":[102],"transmittance":[104],"decreased":[108],"damage,":[110],"spectrum":[114],"diffraction":[117],"pattern":[118],"sample":[121],"indicated":[122,148],"changes":[126],"amorphous":[129],"crystalline":[132],"structure":[133],"high-temperature":[140],"high-pressure":[142],"plasma.":[143],"EDS":[145],"analysis":[146],"oxygen":[151],"content":[152],"decreases":[156],"because":[157],"inflicted":[161],"its":[163],"structure.":[164]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2019-07-12T00:00:00"}