{"id":"https://openalex.org/W2932995192","doi":"https://doi.org/10.1364/oe.27.010705","title":"Hydrofluoric acid\u2013based etching effect on surface pit, crack, and scratch and laser damage site of fused silica optics","display_name":"Hydrofluoric acid\u2013based etching effect on surface pit, crack, and scratch and laser damage site of fused silica optics","publication_year":2019,"publication_date":"2019-04-03","ids":{"openalex":"https://openalex.org/W2932995192","doi":"https://doi.org/10.1364/oe.27.010705","mag":"2932995192","pmid":"https://pubmed.ncbi.nlm.nih.gov/31052925"},"language":"en","primary_location":{"id":"doi:10.1364/oe.27.010705","doi":"https://doi.org/10.1364/oe.27.010705","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.27.010705","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1364/oe.27.010705","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110955682","display_name":"Taixiang Liu","orcid":"https://orcid.org/0000-0003-0573-8349","observed_orcids":["https://orcid.org/0000-0003-0573-8349"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Taixiang Liu","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101446184","display_name":"Ke Yang","orcid":"https://orcid.org/0000-0002-4973-1766","observed_orcids":["https://orcid.org/0000-0002-4973-1766"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ke Yang","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101480660","display_name":"Zhuo Zhang","orcid":"https://orcid.org/0000-0002-2918-7783","observed_orcids":["https://orcid.org/0000-0002-2918-7783","https://orcid.org/0009-0000-4282-1227","https://orcid.org/0009-0006-9466-4183"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuo Zhang","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031006790","display_name":"Lianghong Yan","orcid":"https://orcid.org/0000-0001-5862-077X","observed_orcids":["https://orcid.org/0000-0001-5862-077X"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lianghong Yan","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067750549","display_name":"Beicong Huang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Beicong Huang","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Heyang Li","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Heyang Li","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102854848","display_name":"Chuanchao Zhang","orcid":"https://orcid.org/0000-0001-6291-8819","observed_orcids":["https://orcid.org/0000-0001-6291-8819"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuanchao Zhang","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068301710","display_name":"Xiaodong Jiang","orcid":"https://orcid.org/0000-0002-9656-4972","observed_orcids":["https://orcid.org/0000-0002-9656-4972"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaodong Jiang","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026257020","display_name":"Hongwei Yan","orcid":"https://orcid.org/0000-0001-5311-7614","observed_orcids":["https://orcid.org/0000-0001-5311-7614"]},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]},{"id":"https://openalex.org/I4387155340","display_name":"Laser Fusion Research Center","ror":"https://ror.org/02ggaqt78","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongwei Yan","raw_affiliation_strings":["Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China","institution_ids":["https://openalex.org/I2801345734","https://openalex.org/I4387155340"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2270,"currency":"USD","value_usd":2270},"apc_paid":{"value":2270,"currency":"USD","value_usd":2270},"fwci":0.7511,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.74130171,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"27","issue":"8","first_page":"10705","last_page":"10705"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrofluoric-acid-etching","display_name":"hydrofluoric acid etching","score":0.9829999804496765},{"id":"https://openalex.org/keywords/fused-silica-optics","display_name":"fused silica optics","score":0.9860000014305115},{"id":"https://openalex.org/keywords/laser-induced-damage","display_name":"laser-induced damage","score":0.8550000190734863},{"id":"https://openalex.org/keywords/surface-pits","display_name":"surface pits","score":0.7850000262260437},{"id":"https://openalex.org/keywords/surface-cracks","display_name":"surface cracks","score":0.8920000195503235},{"id":"https://openalex.org/keywords/surface-scratches","display_name":"surface scratches","score":0.6859999895095825},{"id":"https://openalex.org/keywords/etch-rate","display_name":"etch rate","score":0.7680000066757202},{"id":"https://openalex.org/keywords/surface-passivation","display_name":"surface passivation","score":0.7310000061988831},{"id":"https://openalex.org/keywords/high-power-laser-optics","display_name":"high-power laser optics","score":0.5130000114440918}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7597266435623169},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7462527751922607},{"id":"https://openalex.org/C184880428","wikidata":"https://www.wikidata.org/wiki/Q1417308","display_name":"Finite-difference time-domain method","level":2,"score":0.7431658506393433},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.7325619459152222},{"id":"https://openalex.org/C2776967294","wikidata":"https://www.wikidata.org/wiki/Q209569","display_name":"Hydrofluoric acid","level":2,"score":0.7204967737197876},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6995477080345154},{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.6109307408332825},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.44858691096305847},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.22848060727119446},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.08717921376228333},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0749998688697815},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0592881441116333},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1364/oe.27.010705","doi":"https://doi.org/10.1364/oe.27.010705","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.27.010705","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},{"id":"pmid:31052925","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31052925","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics express","raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.1364/oe.27.010705","doi":"https://doi.org/10.1364/oe.27.010705","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.27.010705","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3685638321","display_name":null,"funder_award_id":"11602242","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G818822446","display_name":"\u9ad8\u80fd\u6fc0\u5149\u7cfb\u7edf\u8d85\u6d01\u51c0\u5236\u9020\u7684\u5173\u952e\u57fa\u7840\u79d1\u5b66\u95ee\u9898\u7814\u7a76","funder_award_id":"51535003","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1979729400","https://openalex.org/W1980842109","https://openalex.org/W1983300469","https://openalex.org/W1985102489","https://openalex.org/W2001017088","https://openalex.org/W2010309105","https://openalex.org/W2017720144","https://openalex.org/W2025150258","https://openalex.org/W2030843510","https://openalex.org/W2042965634","https://openalex.org/W2069331940","https://openalex.org/W2073724833","https://openalex.org/W2082311409","https://openalex.org/W2087619217","https://openalex.org/W2139196239","https://openalex.org/W2222008698","https://openalex.org/W2473432598","https://openalex.org/W2495987075","https://openalex.org/W2568089248","https://openalex.org/W2584462192","https://openalex.org/W2591126831","https://openalex.org/W2798918935"],"related_works":["https://openalex.org/W2139196239","https://openalex.org/W4212795014","https://openalex.org/W2020865192","https://openalex.org/W2359002002","https://openalex.org/W2560069373","https://openalex.org/W2332286582","https://openalex.org/W2613233669","https://openalex.org/W2074963166","https://openalex.org/W2121372483","https://openalex.org/W1980931338"],"abstract_inverted_index":{"In":[0,54,136],"a":[1],"large-scale,":[2],"high-power":[3],"laser":[4,30,52],"facility,":[5],"fused":[6,34,165],"silica":[7,35,166],"optics":[8,36,43],"plays":[9],"an":[10,91],"irreplaceable":[11],"role":[12],"to":[13,68,125,160],"transmit":[14],"extremely":[15],"intense":[16],"lasers.":[17],"However,":[18],"the":[19,39,42,47,51,76,102,114,120,127,131,142,154,161],"surface":[20,24,77,83,132,143,162],"fractures,":[21],"such":[22],"as":[23],"pit,":[25],"crack,":[26],"and":[27,29,44,90,148],"scratch":[28],"damage":[31,159],"site,":[32],"of":[33,41,50,81,113,130,157,164],"will":[37,145],"shorten":[38],"lifetime":[40],"thus":[45],"limit":[46],"output":[48],"performance":[49],"facility.":[53],"this":[55,100],"work,":[56],"besides":[57],"experimental":[58],"study,":[59],"finite":[60],"difference":[61],"time":[62],"domain":[63],"(FDTD)":[64],"simulation":[65,106,122],"is":[66,88,96,117,123,139],"performed":[67],"study":[69],"hydrofluoric":[70],"acid-based":[71],"(HF-based)":[72],"etching":[73,86,94,150],"effect":[74,80],"on":[75,85,99],"fractures.":[78],"The":[79],"local":[82],"curvature":[84],"rate":[87],"discussed":[89],"explicit":[92],"local-curvature-dependent":[93],"model":[95],"proposed.":[97],"Based":[98],"model,":[101],"result":[103],"from":[104],"FDTD":[105,121],"qualitatively":[107],"agrees":[108],"very":[109],"well":[110],"with":[111],"that":[112,119,141],"experiment.":[115],"It":[116],"demonstrated":[118],"efficient":[124],"predict":[126],"morphological":[128],"evolution":[129],"fractures":[133,144],"during":[134],"etching.":[135],"addition,":[137],"it":[138],"found":[140],"be":[146],"passivated":[147],"HF-based":[149],"can":[151],"greatly":[152],"suppress":[153],"laser-damage":[155],"growth":[156],"laser-induced":[158],"site":[163],"optics.":[167]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2019-04-11T00:00:00"}