{"id":"https://openalex.org/W2914767149","doi":"https://doi.org/10.1063/1.5079790","title":"Diffusion processes in microwave discharge ion source and consequences on the upgrade of existing ion sources","display_name":"Diffusion processes in microwave discharge ion source and consequences on the upgrade of existing ion sources","publication_year":2019,"publication_date":"2019-02-01","ids":{"openalex":"https://openalex.org/W2914767149","doi":"https://doi.org/10.1063/1.5079790","mag":"2914767149","pmid":"https://pubmed.ncbi.nlm.nih.gov/30831722"},"language":"en","primary_location":{"id":"doi:10.1063/1.5079790","doi":"https://doi.org/10.1063/1.5079790","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.5079790","pdf_url":null,"source":{"id":"https://openalex.org/S31010182","display_name":"Review of Scientific Instruments","issn_l":"0034-6748","issn":["0034-6748","1089-7623","1527-2400"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Review of Scientific Instruments","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015612671","display_name":"G. Castro","orcid":"https://orcid.org/0000-0002-4223-8282","observed_orcids":["https://orcid.org/0000-0002-4223-8282"]},"institutions":[{"id":"https://openalex.org/I4210120409","display_name":"Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud","ror":"https://ror.org/02k1zhm92","country_code":"IT","type":"facility","lineage":["https://openalex.org/I160013858","https://openalex.org/I4210120409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"G. Castro","raw_affiliation_strings":["INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy"],"raw_orcid":"https://orcid.org/0000-0002-4223-8282","affiliations":[{"raw_affiliation_string":"INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy","institution_ids":["https://openalex.org/I4210120409"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018892807","display_name":"D. Mascali","orcid":"https://orcid.org/0000-0003-3861-1547","observed_orcids":["https://orcid.org/0000-0003-3861-1547"]},"institutions":[{"id":"https://openalex.org/I4210120409","display_name":"Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud","ror":"https://ror.org/02k1zhm92","country_code":"IT","type":"facility","lineage":["https://openalex.org/I160013858","https://openalex.org/I4210120409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"D. Mascali","raw_affiliation_strings":["INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy"],"raw_orcid":"https://orcid.org/0000-0003-3861-1547","affiliations":[{"raw_affiliation_string":"INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy","institution_ids":["https://openalex.org/I4210120409"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006564807","display_name":"R. Miracoli","orcid":"https://orcid.org/0000-0002-1444-7677","observed_orcids":["https://orcid.org/0000-0002-1444-7677"]},"institutions":[{"id":"https://openalex.org/I4210162431","display_name":"ESS Bilbao","ror":"https://ror.org/05ans4e98","country_code":"ES","type":"other","lineage":["https://openalex.org/I4210162431"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"R. Miracoli","raw_affiliation_strings":["ESS-Bilbao\u2014Poligono Ugaldeguren III 2 , Pol. A, 7B, 48170 Zamudio, Spain"],"raw_orcid":"https://orcid.org/0000-0002-1444-7677","affiliations":[{"raw_affiliation_string":"ESS-Bilbao\u2014Poligono Ugaldeguren III 2 , Pol. A, 7B, 48170 Zamudio, Spain","institution_ids":["https://openalex.org/I4210162431"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066206317","display_name":"L. Celona","orcid":"https://orcid.org/0000-0002-6328-5926","observed_orcids":["https://orcid.org/0000-0002-6328-5926"]},"institutions":[{"id":"https://openalex.org/I4210120409","display_name":"Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud","ror":"https://ror.org/02k1zhm92","country_code":"IT","type":"facility","lineage":["https://openalex.org/I160013858","https://openalex.org/I4210120409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"L. Celona","raw_affiliation_strings":["INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy"],"raw_orcid":"https://orcid.org/0000-0002-6328-5926","affiliations":[{"raw_affiliation_string":"INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy","institution_ids":["https://openalex.org/I4210120409"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090736128","display_name":"S. Gammino","orcid":"https://orcid.org/0000-0003-1381-679X","observed_orcids":["https://orcid.org/0000-0003-1381-679X"]},"institutions":[{"id":"https://openalex.org/I4210120409","display_name":"Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud","ror":"https://ror.org/02k1zhm92","country_code":"IT","type":"facility","lineage":["https://openalex.org/I160013858","https://openalex.org/I4210120409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"S. Gammino","raw_affiliation_strings":["INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy"],"raw_orcid":"https://orcid.org/0000-0003-1381-679X","affiliations":[{"raw_affiliation_string":"INFN\u2014Laboratori Nazionali del Sud 1 , Via S. Sofia 62, 95123 Catania, Italy","institution_ids":["https://openalex.org/I4210120409"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3505,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.57088222,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"90","issue":"2","first_page":"023301","last_page":"023301"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11367","display_name":"Particle accelerators and beam dynamics","score":0.9707000255584717,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11367","display_name":"Particle accelerators and beam dynamics","score":0.9707000255584717,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.018400000408291817,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10346","display_name":"Magnetic confinement fusion research","score":0.001500000013038516,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/diffusion","display_name":"diffusion","score":0.6949999928474426},{"id":"https://openalex.org/keywords/insulator-materials","display_name":"insulator materials","score":0.7450000047683716},{"id":"https://openalex.org/keywords/alumina","display_name":"alumina","score":0.8370000123977661},{"id":"https://openalex.org/keywords/boron-nitride","display_name":"boron nitride","score":0.9929999709129333},{"id":"https://openalex.org/keywords/secondary-electron-emission","display_name":"secondary electron emission","score":0.8479999899864197},{"id":"https://openalex.org/keywords/proton-fraction","display_name":"proton fraction","score":0.9879999756813049}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7112842202186584},{"id":"https://openalex.org/C188224857","wikidata":"https://www.wikidata.org/wiki/Q905291","display_name":"Ion source","level":3,"score":0.6970311999320984},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.6563922166824341},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.642192542552948},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.634235143661499},{"id":"https://openalex.org/C212702","wikidata":"https://www.wikidata.org/wiki/Q178150","display_name":"Insulator (electricity)","level":2,"score":0.6120597124099731},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.5509131550788879},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.5472424626350403},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.5424706339836121},{"id":"https://openalex.org/C2779599953","wikidata":"https://www.wikidata.org/wiki/Q1776117","display_name":"Ripple","level":3,"score":0.5186354517936707},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.48476094007492065},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.41741061210632324},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35290253162384033},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.21376240253448486},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1971188485622406},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15406423807144165},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.10797789692878723},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/1.5079790","doi":"https://doi.org/10.1063/1.5079790","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.5079790","pdf_url":null,"source":{"id":"https://openalex.org/S31010182","display_name":"Review of Scientific Instruments","issn_l":"0034-6748","issn":["0034-6748","1089-7623","1527-2400"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Review of Scientific Instruments","raw_type":"journal-article"},{"id":"pmid:30831722","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30831722","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Review of scientific instruments","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1480160699","https://openalex.org/W1968198964","https://openalex.org/W1980203729","https://openalex.org/W1986473708","https://openalex.org/W1991012793","https://openalex.org/W2022946351","https://openalex.org/W2023913244","https://openalex.org/W2058225236","https://openalex.org/W2068515891","https://openalex.org/W2069193972","https://openalex.org/W2081222057","https://openalex.org/W2099496889","https://openalex.org/W2137604150","https://openalex.org/W2142065196","https://openalex.org/W2795248299","https://openalex.org/W2944539045"],"related_works":["https://openalex.org/W2023913244","https://openalex.org/W785486174","https://openalex.org/W2073896004","https://openalex.org/W2029040520","https://openalex.org/W1973737588","https://openalex.org/W2085753365","https://openalex.org/W2058225236","https://openalex.org/W2174235285","https://openalex.org/W4233359859","https://openalex.org/W2997881054"],"abstract_inverted_index":{"Several":[0],"experiments":[1],"have":[2,67],"shown":[3],"that":[4,88],"the":[5,11,28,33,47,51,61,73,98,101,106,117,121,127],"insertion":[6,29],"of":[7,20,30,77,100],"insulator":[8,107],"materials":[9],"within":[10],"plasma":[12,81],"chamber":[13,34],"may":[14],"lead":[15],"to":[16,45,56,86,114],"a":[17,57],"general":[18,58],"improvement":[19],"microwave":[21],"discharge":[22],"ion":[23,123],"source":[24,124],"performances.":[25],"In":[26],"particular,":[27],"alumina":[31],"into":[32,39,96],"walls":[35],"and":[36,41,50,54],"borum":[37],"nitride":[38],"extraction":[40],"injection":[42],"flanges":[43],"permits":[44],"increase":[46],"extracted":[48],"current":[49],"proton":[52],"fraction":[53],"leads":[55],"decrease":[59],"in":[60],"beam":[62],"ripple.":[63],"These":[64],"beneficial":[65],"effects":[66,90],"been":[68],"usually":[69],"explained":[70,93],"by":[71,80,94,105,125],"considering":[72],"secondary":[74],"electron":[75],"emission":[76],"insulators":[78],"hit":[79],"electrons.":[82],"This":[83,109],"paper":[84],"tries":[85],"illustrate":[87],"these":[89],"can":[91],"be":[92,112],"taking":[95],"account":[97],"modification":[99],"diffusion":[102],"regime":[103],"induced":[104],"materials.":[108],"approach":[110],"will":[111],"used":[113],"comment":[115],"on":[116],"results":[118],"obtained":[119],"with":[120],"versatile":[122],"changing":[126],"wall":[128],"conditions.":[129]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2019-02-21T00:00:00"}