{"id":"https://openalex.org/W2906889225","doi":"https://doi.org/10.1063/1.5027850","title":"Effective quality factor tuning mechanisms in micromechanical resonators","display_name":"Effective quality factor tuning mechanisms in micromechanical resonators","publication_year":2018,"publication_date":"2018-12-01","ids":{"openalex":"https://openalex.org/W2906889225","doi":"https://doi.org/10.1063/1.5027850","mag":"2906889225"},"language":"en","primary_location":{"id":"doi:10.1063/1.5027850","doi":"https://doi.org/10.1063/1.5027850","is_oa":true,"landing_page_url":"https://doi.org/10.1063/1.5027850","pdf_url":null,"source":{"id":"https://openalex.org/S4210229136","display_name":"Applied Physics Reviews","issn_l":"1931-9401","issn":["1931-9401"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-1","poland-200","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Reviews","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.1063/1.5027850","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022453992","display_name":"James M. L. Miller","orcid":"https://orcid.org/0000-0001-7428-0971","observed_orcids":["https://orcid.org/0000-0001-7428-0971"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"James M. Lehto Miller","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057362202","display_name":"Azadeh Ansari","orcid":"https://orcid.org/0000-0001-9433-6370","observed_orcids":["https://orcid.org/0000-0001-9433-6370","https://orcid.org/0000-0002-8306-7897"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Azadeh Ansari","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology 2 , Atlanta, Georgia 30309, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology 2 , Atlanta, Georgia 30309, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038255682","display_name":"David B. Heinz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David B. Heinz","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103215378","display_name":"Yunhan Chen","orcid":"https://orcid.org/0000-0002-8053-4496","observed_orcids":["https://orcid.org/0000-0002-8053-4496"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yunhan Chen","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001908542","display_name":"Ian B. Flader","orcid":"https://orcid.org/0000-0001-9592-7674","observed_orcids":["https://orcid.org/0000-0001-9592-7674"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ian B. Flader","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091019913","display_name":"Dongsuk D. Shin","orcid":"https://orcid.org/0000-0002-9982-7918","observed_orcids":["https://orcid.org/0000-0002-9982-7918"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dongsuk D. Shin","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":"https://orcid.org/0000-0002-9982-7918","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025457422","display_name":"Luis Guillermo Villanueva","orcid":"https://orcid.org/0000-0003-3340-2930","observed_orcids":["https://orcid.org/0000-0003-3340-2930"]},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"L. Guillermo Villanueva","raw_affiliation_strings":["Advanced NEMS Group, \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL) 3 , 1015 Lausanne, Switzerland"],"raw_orcid":"https://orcid.org/0000-0003-3340-2930","affiliations":[{"raw_affiliation_string":"Advanced NEMS Group, \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL) 3 , 1015 Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103803864","display_name":"Thomas William Kenny","orcid":"https://orcid.org/0000-0002-7666-1775","observed_orcids":["https://orcid.org/0000-0002-7666-1775"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas W. Kenny","raw_affiliation_strings":["Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA","institution_ids":["https://openalex.org/I97018004"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.3609,"has_fulltext":false,"cited_by_count":166,"citation_normalized_percentile":{"value":0.96630057,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":"5","issue":"4","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.7080000042915344,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.7080000042915344,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.2809999883174896,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.007199999876320362,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/quality-factor-tuning","display_name":"quality factor tuning","score":0.9449999928474426},{"id":"https://openalex.org/keywords/micromechanical-resonators","display_name":"micromechanical resonators","score":0.968999981880188},{"id":"https://openalex.org/keywords/parametric-pumping","display_name":"parametric pumping","score":0.8209999799728394},{"id":"https://openalex.org/keywords/thermomechanical-noise","display_name":"thermomechanical noise","score":0.8960000276565552},{"id":"https://openalex.org/keywords/mechanical-pumping","display_name":"mechanical pumping","score":0.4580000042915344},{"id":"https://openalex.org/keywords/optical-pumping","display_name":"optical pumping","score":0.8980000019073486},{"id":"https://openalex.org/keywords/mass-sensing","display_name":"mass sensing","score":0.382999986410141}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8884844779968262},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.639911413192749},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.6065523624420166},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.5720806121826172},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.5472298860549927},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.540062427520752},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5137006044387817},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4950341582298279},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.44456878304481506},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.39688923954963684},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3897933065891266},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3873630166053772},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.38611042499542236},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.125080406665802},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/1.5027850","doi":"https://doi.org/10.1063/1.5027850","is_oa":true,"landing_page_url":"https://doi.org/10.1063/1.5027850","pdf_url":null,"source":{"id":"https://openalex.org/S4210229136","display_name":"Applied Physics Reviews","issn_l":"1931-9401","issn":["1931-9401"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-1","poland-200","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Reviews","raw_type":"journal-article"},{"id":"pmh:oai:infoscience.epfl.ch:263342","doi":null,"is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/263342","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I5124864","host_organization_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","host_organization_lineage":["https://openalex.org/I5124864"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"review"}],"best_oa_location":{"id":"doi:10.1063/1.5027850","doi":"https://doi.org/10.1063/1.5027850","is_oa":true,"landing_page_url":"https://doi.org/10.1063/1.5027850","pdf_url":null,"source":{"id":"https://openalex.org/S4210229136","display_name":"Applied Physics Reviews","issn_l":"1931-9401","issn":["1931-9401"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-1","poland-200","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Reviews","raw_type":"journal-article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.7699999809265137,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[{"id":"https://openalex.org/G2545470984","display_name":"Collaborative Research: Nonlinear Coupling and Relaxation Mechanisms in Micro-mechanics","funder_award_id":"1662464","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320332180","display_name":"Defense Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":411,"referenced_works":["https://openalex.org/W15083892","https://openalex.org/W143956347","https://openalex.org/W930220367","https://openalex.org/W1163496173","https://openalex.org/W1480691295","https://openalex.org/W1482570919","https://openalex.org/W1504338025","https://openalex.org/W1542482961","https://openalex.org/W1546382336","https://openalex.org/W1552179732","https://openalex.org/W1579500089","https://openalex.org/W1586616006","https://openalex.org/W1606730273","https://openalex.org/W1671234487","https://openalex.org/W1727905077","https://openalex.org/W1822400895","https://openalex.org/W1912297835","https://openalex.org/W1951934329","https://openalex.org/W1955792382","https://openalex.org/W1960917616","https://openalex.org/W1964404781","https://openalex.org/W1964703652","https://openalex.org/W1965274759","https://openalex.org/W1965506756","https://openalex.org/W1965702561","https://openalex.org/W1966227935","https://openalex.org/W1966459618","https://openalex.org/W1968498274","https://openalex.org/W1969658805","https://openalex.org/W1970144251","https://openalex.org/W1970879006","https://openalex.org/W1972717958","https://openalex.org/W1972896610","https://openalex.org/W1973760065","https://openalex.org/W1974377641","https://openalex.org/W1974894523","https://openalex.org/W1977511411","https://openalex.org/W1977701463","https://openalex.org/W1978674904","https://openalex.org/W1979659095","https://openalex.org/W1980091129","https://openalex.org/W1980554939","https://openalex.org/W1980721028","https://openalex.org/W1981439182","https://openalex.org/W1981491349","https://openalex.org/W1982991836","https://openalex.org/W1983329723","https://openalex.org/W1985009138","https://openalex.org/W1985354701","https://openalex.org/W1985383371","https://openalex.org/W1986229437","https://openalex.org/W1986463199","https://openalex.org/W1987335183","https://openalex.org/W1987975664","https://openalex.org/W1988096974","https://openalex.org/W1989191866","https://openalex.org/W1990518001","https://openalex.org/W1990952477","https://openalex.org/W1991000354","https://openalex.org/W1992147802","https://openalex.org/W1992177307","https://openalex.org/W1992359800","https://openalex.org/W1993853168","https://openalex.org/W1994214469","https://openalex.org/W1995143524","https://openalex.org/W1995366740","https://openalex.org/W1995571561","https://openalex.org/W1995571734","https://openalex.org/W1996179710","https://openalex.org/W1997714032","https://openalex.org/W1998814652","https://openalex.org/W1998945285","https://openalex.org/W1999223348","https://openalex.org/W1999763028","https://openalex.org/W2000848945","https://openalex.org/W2000853924","https://openalex.org/W2001251685","https://openalex.org/W2001430230","https://openalex.org/W2001451260","https://openalex.org/W2001493504","https://openalex.org/W2001636443","https://openalex.org/W2002268968","https://openalex.org/W2002419436","https://openalex.org/W2002586266","https://openalex.org/W2002765969","https://openalex.org/W2002828609","https://openalex.org/W2003469080","https://openalex.org/W2003860118","https://openalex.org/W2004956864","https://openalex.org/W2005208156","https://openalex.org/W2007734102","https://openalex.org/W2009445786","https://openalex.org/W2009462070","https://openalex.org/W2009673580","https://openalex.org/W2013089354","https://openalex.org/W2013885170","https://openalex.org/W2014532555","https://openalex.org/W2014756335","https://openalex.org/W2015007559","https://openalex.org/W2015735941","https://openalex.org/W2017792896","https://openalex.org/W2018292946","https://openalex.org/W2018806435","https://openalex.org/W2019470790","https://openalex.org/W2020174430","https://openalex.org/W2021444667","https://openalex.org/W2022031594","https://openalex.org/W2022515348","https://openalex.org/W2024060504","https://openalex.org/W2024422979","https://openalex.org/W2025003714","https://openalex.org/W2025953909","https://openalex.org/W2026963602","https://openalex.org/W2027113586","https://openalex.org/W2028362004","https://openalex.org/W2028518725","https://openalex.org/W2029816648","https://openalex.org/W2030013474","https://openalex.org/W2031632510","https://openalex.org/W2031693673","https://openalex.org/W2032142064","https://openalex.org/W2032290928","https://openalex.org/W2033608712","https://openalex.org/W2033632707","https://openalex.org/W2036028219","https://openalex.org/W2036376087","https://openalex.org/W2037057907","https://openalex.org/W2038669708","https://openalex.org/W2040651588","https://openalex.org/W2040912307","https://openalex.org/W2041025721","https://openalex.org/W2042116876","https://openalex.org/W2042205161","https://openalex.org/W2042794004","https://openalex.org/W2043416085","https://openalex.org/W2043985362","https://openalex.org/W2044747524","https://openalex.org/W2044825329","https://openalex.org/W2045394403","https://openalex.org/W2045527801","https://openalex.org/W2045654306","https://openalex.org/W2045907466","https://openalex.org/W2046032184","https://openalex.org/W2046034105","https://openalex.org/W2046538824","https://openalex.org/W2047129435","https://openalex.org/W2047690206","https://openalex.org/W2047828308","https://openalex.org/W2049523897","https://openalex.org/W2049558367","https://openalex.org/W2050730625","https://openalex.org/W2051001465","https://openalex.org/W2052022883","https://openalex.org/W2052130798","https://openalex.org/W2052294298","https://openalex.org/W2053237122","https://openalex.org/W2053912041","https://openalex.org/W2054407372","https://openalex.org/W2054641817","https://openalex.org/W2055602614","https://openalex.org/W2055645296","https://openalex.org/W2055727288","https://openalex.org/W2056415244","https://openalex.org/W2056838544","https://openalex.org/W2057198157","https://openalex.org/W2057913733","https://openalex.org/W2058481114","https://openalex.org/W2059439771","https://openalex.org/W2060025619","https://openalex.org/W2061426021","https://openalex.org/W2063866538","https://openalex.org/W2064390924","https://openalex.org/W2064866264","https://openalex.org/W2065340590","https://openalex.org/W2065486784","https://openalex.org/W2065633828","https://openalex.org/W2065808613","https://openalex.org/W2066194394","https://openalex.org/W2066298153","https://openalex.org/W2066745696","https://openalex.org/W2067244125","https://openalex.org/W2067496709","https://openalex.org/W2068072421","https://openalex.org/W2068253391","https://openalex.org/W2068582230","https://openalex.org/W2068707436","https://openalex.org/W2068734376","https://openalex.org/W2069783587","https://openalex.org/W2069934923","https://openalex.org/W2071557971","https://openalex.org/W2072243793","https://openalex.org/W2072450505","https://openalex.org/W2074191268","https://openalex.org/W2074383155","https://openalex.org/W2074664725","https://openalex.org/W2075118062","https://openalex.org/W2075356231","https://openalex.org/W2076122805","https://openalex.org/W2076300752","https://openalex.org/W2078377335","https://openalex.org/W2078740349","https://openalex.org/W2079227904","https://openalex.org/W2079551990","https://openalex.org/W2079636193","https://openalex.org/W2080139714","https://openalex.org/W2080249811","https://openalex.org/W2081677403","https://openalex.org/W2081729031","https://openalex.org/W2082161686","https://openalex.org/W2082211203","https://openalex.org/W2082778793","https://openalex.org/W2083553307","https://openalex.org/W2083980223","https://openalex.org/W2084403547","https://openalex.org/W2085486777","https://openalex.org/W2086435334","https://openalex.org/W2086778233","https://openalex.org/W2086800176","https://openalex.org/W2087223926","https://openalex.org/W2088515411","https://openalex.org/W2088546793","https://openalex.org/W2088617910","https://openalex.org/W2088684596","https://openalex.org/W2089008891","https://openalex.org/W2089179315","https://openalex.org/W2090384543","https://openalex.org/W2090393652","https://openalex.org/W2091298840","https://openalex.org/W2091334166","https://openalex.org/W2091353776","https://openalex.org/W2092445640","https://openalex.org/W2093610191","https://openalex.org/W2095647535","https://openalex.org/W2095730663","https://openalex.org/W2097235765","https://openalex.org/W2098182834","https://openalex.org/W2099635444","https://openalex.org/W2100751274","https://openalex.org/W2100800886","https://openalex.org/W2100898201","https://openalex.org/W2101160229","https://openalex.org/W2102624141","https://openalex.org/W2102904047","https://openalex.org/W2103203884","https://openalex.org/W2104143737","https://openalex.org/W2104340505","https://openalex.org/W2105093937","https://openalex.org/W2105117740","https://openalex.org/W2105178508","https://openalex.org/W2106362883","https://openalex.org/W2107461195","https://openalex.org/W2109426336","https://openalex.org/W2109605816","https://openalex.org/W2111024804","https://openalex.org/W2112357965","https://openalex.org/W2113590427","https://openalex.org/W2114785798","https://openalex.org/W2115412956","https://openalex.org/W2118203272","https://openalex.org/W2119046658","https://openalex.org/W2120432508","https://openalex.org/W2120845389","https://openalex.org/W2122330294","https://openalex.org/W2123955659","https://openalex.org/W2123984227","https://openalex.org/W2124572694","https://openalex.org/W2125838833","https://openalex.org/W2127490754","https://openalex.org/W2129434196","https://openalex.org/W2130337450","https://openalex.org/W2130452516","https://openalex.org/W2131732440","https://openalex.org/W2131874519","https://openalex.org/W2134258168","https://openalex.org/W2135255148","https://openalex.org/W2137506412","https://openalex.org/W2138216419","https://openalex.org/W2138699653","https://openalex.org/W2139031855","https://openalex.org/W2142115235","https://openalex.org/W2143116335","https://openalex.org/W2144822371","https://openalex.org/W2145003256","https://openalex.org/W2145250566","https://openalex.org/W2147515649","https://openalex.org/W2148441362","https://openalex.org/W2149400426","https://openalex.org/W2149412840","https://openalex.org/W2151896350","https://openalex.org/W2158172574","https://openalex.org/W2158595062","https://openalex.org/W2158605123","https://openalex.org/W2158806457","https://openalex.org/W2159012223","https://openalex.org/W2164060425","https://openalex.org/W2166212722","https://openalex.org/W2166475097","https://openalex.org/W2167962037","https://openalex.org/W2169166249","https://openalex.org/W2169486299","https://openalex.org/W2169552961","https://openalex.org/W2170116274","https://openalex.org/W2172028475","https://openalex.org/W2190824705","https://openalex.org/W2205041473","https://openalex.org/W2207818766","https://openalex.org/W2219561879","https://openalex.org/W2243775637","https://openalex.org/W2262146844","https://openalex.org/W2265441593","https://openalex.org/W2266014695","https://openalex.org/W2274532694","https://openalex.org/W2284733400","https://openalex.org/W2289058835","https://openalex.org/W2289095073","https://openalex.org/W2289988233","https://openalex.org/W2292321083","https://openalex.org/W2316410136","https://openalex.org/W2322114867","https://openalex.org/W2325410336","https://openalex.org/W2327758191","https://openalex.org/W2328870699","https://openalex.org/W2328898575","https://openalex.org/W2329248658","https://openalex.org/W2329631803","https://openalex.org/W2330412169","https://openalex.org/W2331714912","https://openalex.org/W2333261247","https://openalex.org/W2336284723","https://openalex.org/W2338675103","https://openalex.org/W2339866717","https://openalex.org/W2408245137","https://openalex.org/W2411118730","https://openalex.org/W2431101325","https://openalex.org/W2432347650","https://openalex.org/W2441440649","https://openalex.org/W2460416724","https://openalex.org/W2466856628","https://openalex.org/W2470304914","https://openalex.org/W2470563899","https://openalex.org/W2480999254","https://openalex.org/W2482410515","https://openalex.org/W2482900436","https://openalex.org/W2484577628","https://openalex.org/W2495534119","https://openalex.org/W2517444938","https://openalex.org/W2517477387","https://openalex.org/W2519370271","https://openalex.org/W2521690527","https://openalex.org/W2526996018","https://openalex.org/W2528112611","https://openalex.org/W2530061804","https://openalex.org/W2531777177","https://openalex.org/W2541829660","https://openalex.org/W2563848309","https://openalex.org/W2571423698","https://openalex.org/W2572134284","https://openalex.org/W2573486715","https://openalex.org/W2576934825","https://openalex.org/W2581142155","https://openalex.org/W2583656138","https://openalex.org/W2589520834","https://openalex.org/W2592413110","https://openalex.org/W2593747983","https://openalex.org/W2593804251","https://openalex.org/W2612413763","https://openalex.org/W2613560831","https://openalex.org/W2614273681","https://openalex.org/W2617836420","https://openalex.org/W2620261669","https://openalex.org/W2626022597","https://openalex.org/W2735206615","https://openalex.org/W2742625779","https://openalex.org/W2742771152","https://openalex.org/W2743360269","https://openalex.org/W2747335410","https://openalex.org/W2755093811","https://openalex.org/W2757823585","https://openalex.org/W2765987162","https://openalex.org/W2766569947","https://openalex.org/W2766755891","https://openalex.org/W2767192496","https://openalex.org/W2767800036","https://openalex.org/W2779252230","https://openalex.org/W2794706560","https://openalex.org/W2797062871","https://openalex.org/W2801546646","https://openalex.org/W2897699262","https://openalex.org/W2921929423","https://openalex.org/W2963141687","https://openalex.org/W2963183898","https://openalex.org/W2963570541","https://openalex.org/W2963878371","https://openalex.org/W3037724271","https://openalex.org/W3037853801","https://openalex.org/W3100429798","https://openalex.org/W3100467907","https://openalex.org/W3101771802","https://openalex.org/W3102004576","https://openalex.org/W3102346908","https://openalex.org/W3102410525","https://openalex.org/W3102989173","https://openalex.org/W3150248096","https://openalex.org/W4232361157","https://openalex.org/W4233151480","https://openalex.org/W4236454957","https://openalex.org/W4250459844","https://openalex.org/W4254830816","https://openalex.org/W6606239877","https://openalex.org/W6738433171","https://openalex.org/W6829821087"],"related_works":["https://openalex.org/W2766999340","https://openalex.org/W2735139788","https://openalex.org/W2054124615","https://openalex.org/W2767192496","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4283755933","https://openalex.org/W4245281580","https://openalex.org/W2244350851"],"abstract_inverted_index":{"Quality":[0],"factor":[1,36],"(Q)":[2],"is":[3],"an":[4],"important":[5],"property":[6],"of":[7,37,89,105,116],"micro-":[8],"and":[9,23,51,59,68,85,98],"nano-electromechanical":[10],"(MEM/NEM)":[11],"resonators":[12],"that":[13,95],"underlie":[14],"timing":[15],"references,":[16],"frequency":[17],"sources,":[18],"atomic":[19],"force":[20,71],"microscopes,":[21],"gyroscopes,":[22],"mass":[24],"sensors.":[25],"Various":[26],"methods":[27],"have":[28],"been":[29],"utilized":[30],"to":[31,120],"tune":[32],"the":[33,61,76,79,82,86,102,112],"effective":[34,62,83,103],"quality":[35],"MEM/NEM":[38],"resonators,":[39],"including":[40],"external":[41],"proportional":[42],"feedback":[43],"control,":[44],"optical":[45],"pumping,":[46,48,50],"mechanical":[47,80],"thermal-piezoresistive":[49,99],"parametric":[52,96],"pumping.":[53],"This":[54],"work":[55],"reviews":[56],"these":[57],"mechanisms":[58],"compares":[60],"Q":[63,104],"tuning":[64],"using":[65],"a":[66,69,90,106,117],"position-proportional":[67],"velocity-proportional":[70],"expression.":[72],"We":[73,92],"further":[74],"clarify":[75],"relationship":[77],"between":[78],"Q,":[81,84],"thermomechanical":[87,113],"noise":[88,114],"resonator.":[91],"finally":[93],"show":[94],"pumping":[97,100],"enhance":[101],"micromechanical":[107],"resonator":[108],"by":[109],"experimentally":[110],"studying":[111],"spectrum":[115],"device":[118],"subjected":[119],"both":[121],"techniques.":[122]},"counts_by_year":[{"year":2026,"cited_by_count":30},{"year":2025,"cited_by_count":18},{"year":2024,"cited_by_count":17},{"year":2023,"cited_by_count":15},{"year":2022,"cited_by_count":29},{"year":2021,"cited_by_count":23},{"year":2020,"cited_by_count":23},{"year":2019,"cited_by_count":9},{"year":2018,"cited_by_count":2}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2025-10-10T00:00:00"}