{"id":"https://openalex.org/W2900567913","doi":"https://doi.org/10.1039/c8ra06911e","title":"Solution-processed amorphous ZrO 2 gate dielectric films synthesized by a non-hydrolytic sol\u2013gel route","display_name":"Solution-processed amorphous ZrO 2 gate dielectric films synthesized by a non-hydrolytic sol\u2013gel route","publication_year":2018,"publication_date":"2018-01-01","ids":{"openalex":"https://openalex.org/W2900567913","doi":"https://doi.org/10.1039/c8ra06911e","mag":"2900567913","pmid":"https://pubmed.ncbi.nlm.nih.gov/35558330","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/9090666"},"language":"en","primary_location":{"id":"doi:10.1039/c8ra06911e","doi":"https://doi.org/10.1039/c8ra06911e","is_oa":true,"landing_page_url":"https://doi.org/10.1039/c8ra06911e","pdf_url":"https://pubs.rsc.org/en/content/articlepdf/2018/ra/c8ra06911e","source":{"id":"https://openalex.org/S2481244646","display_name":"RSC Advances","issn_l":"2046-2069","issn":["2046-2069"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320556","host_organization_name":"Royal Society of Chemistry","host_organization_lineage":["https://openalex.org/P4310320556"],"host_organization_lineage_names":["Royal Society of Chemistry"],"type":"journal"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"RSC Advances","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://pubs.rsc.org/en/content/articlepdf/2018/ra/c8ra06911e","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000755725","display_name":"Jong\u2010Baek Seon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jong-Baek Seon","raw_affiliation_strings":["Graduate School of Convergence Science and Technology","Program in Nano Science and Technology","Republic of Korea","Seoul 08826","Seoul National University","Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Convergence Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Program in Nano Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Republic of Korea","institution_ids":[]},{"raw_affiliation_string":"Seoul 08826","institution_ids":[]},{"raw_affiliation_string":"Seoul National University","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086889049","display_name":"Nam-Kwang Cho","orcid":"https://orcid.org/0000-0002-9712-192X","observed_orcids":["https://orcid.org/0000-0002-9712-192X"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Nam-Kwang Cho","raw_affiliation_strings":["Graduate School of Convergence Science and Technology","Program in Nano Science and Technology","Republic of Korea","Seoul 08826","Seoul National University","Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-9712-192X","affiliations":[{"raw_affiliation_string":"Graduate School of Convergence Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Program in Nano Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Republic of Korea","institution_ids":[]},{"raw_affiliation_string":"Seoul 08826","institution_ids":[]},{"raw_affiliation_string":"Seoul National University","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024456337","display_name":"Gayeong Yoo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Gayeong Yoo","raw_affiliation_strings":["Graduate School of Convergence Science and Technology","Program in Nano Science and Technology","Republic of Korea","Seoul 08826","Seoul National University","Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Convergence Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Program in Nano Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Republic of Korea","institution_ids":[]},{"raw_affiliation_string":"Seoul 08826","institution_ids":[]},{"raw_affiliation_string":"Seoul National University","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072235115","display_name":"Youn Sang Kim","orcid":"https://orcid.org/0000-0002-4580-2037","observed_orcids":["https://orcid.org/0000-0002-4580-2037"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]},{"id":"https://openalex.org/I4210120602","display_name":"Advanced Institute of Convergence Technology","ror":"https://ror.org/01w62yz22","country_code":"KR","type":"facility","lineage":["https://openalex.org/I139264467","https://openalex.org/I4210120602"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Youn Sang Kim","raw_affiliation_strings":["Graduate School of Convergence Science and Technology","Program in Nano Science and Technology","Republic of Korea","Seoul 08826","Seoul National University","Advanced Institutes of Convergence Technology, 864-1 Iui-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do 16229, Republic of Korea","Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-4580-2037","affiliations":[{"raw_affiliation_string":"Graduate School of Convergence Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Program in Nano Science and Technology","institution_ids":[]},{"raw_affiliation_string":"Republic of Korea","institution_ids":[]},{"raw_affiliation_string":"Seoul 08826","institution_ids":[]},{"raw_affiliation_string":"Seoul National University","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Advanced Institutes of Convergence Technology, 864-1 Iui-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do 16229, Republic of Korea","institution_ids":["https://openalex.org/I4210120602"]},{"raw_affiliation_string":"Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5000744944","display_name":"Kookheon Char","orcid":"https://orcid.org/0000-0002-7938-8022","observed_orcids":["https://orcid.org/0000-0002-7938-8022","https://orcid.org/0000-0003-2741-9488"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Kookheon Char","raw_affiliation_strings":["Republic of Korea","School of Chemical & Biological Engineering","Seoul 08826","Seoul National University","School of Chemical & Biological Engineering, Seoul National University, Seoul 08826, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-2741-9488","affiliations":[{"raw_affiliation_string":"Republic of Korea","institution_ids":[]},{"raw_affiliation_string":"School of Chemical & Biological Engineering","institution_ids":[]},{"raw_affiliation_string":"Seoul 08826","institution_ids":[]},{"raw_affiliation_string":"Seoul National University","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"School of Chemical & Biological Engineering, Seoul National University, Seoul 08826, Republic of Korea","institution_ids":["https://openalex.org/I139264467"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5000744944","https://openalex.org/A5072235115"],"corresponding_institution_ids":["https://openalex.org/I139264467","https://openalex.org/I4210120602"],"apc_list":{"value":850,"currency":"GBP","value_usd":1042},"apc_paid":{"value":850,"currency":"GBP","value_usd":1042},"fwci":0.7658,"has_fulltext":true,"cited_by_count":24,"citation_normalized_percentile":{"value":0.6831711,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"8","issue":"68","first_page":"39115","last_page":"39119"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.8939999938011169,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.8939999938011169,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10045","display_name":"Organic Electronics and Photovoltaics","score":0.04479999840259552,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.04089999943971634,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/zro2-gate-dielectric","display_name":"ZrO2 gate dielectric","score":0.9330000281333923},{"id":"https://openalex.org/keywords/non-hydrolytic-sol-gel","display_name":"non-hydrolytic sol-gel","score":0.9319999814033508},{"id":"https://openalex.org/keywords/solution-processing","display_name":"solution processing","score":0.9110000133514404},{"id":"https://openalex.org/keywords/low-temperature-film-deposition","display_name":"low-temperature film deposition","score":0.675000011920929},{"id":"https://openalex.org/keywords/high-permittivity","display_name":"high dielectric constant","score":0.9779999852180481},{"id":"https://openalex.org/keywords/thin-film-transistors","display_name":"thin-film transistors","score":0.9139999747276306},{"id":"https://openalex.org/keywords/organic-electronics","display_name":"organic electronics","score":0.47200000286102295}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7696664333343506},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6984869241714478},{"id":"https://openalex.org/C534791751","wikidata":"https://www.wikidata.org/wiki/Q1038","display_name":"Zirconium","level":2,"score":0.6417875289916992},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.623995304107666},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.6009771227836609},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5085951089859009},{"id":"https://openalex.org/C38398224","wikidata":"https://www.wikidata.org/wiki/Q48350","display_name":"Sol-gel","level":2,"score":0.48510801792144775},{"id":"https://openalex.org/C166972891","wikidata":"https://www.wikidata.org/wiki/Q5527011","display_name":"Gate dielectric","level":4,"score":0.4834674000740051},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3864036500453949},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36449167132377625},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.24961888790130615},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21183785796165466},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1264699101448059},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.12588819861412048},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1114284098148346},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.10382211208343506},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09027734398841858},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.06561279296875},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1039/c8ra06911e","doi":"https://doi.org/10.1039/c8ra06911e","is_oa":true,"landing_page_url":"https://doi.org/10.1039/c8ra06911e","pdf_url":"https://pubs.rsc.org/en/content/articlepdf/2018/ra/c8ra06911e","source":{"id":"https://openalex.org/S2481244646","display_name":"RSC Advances","issn_l":"2046-2069","issn":["2046-2069"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320556","host_organization_name":"Royal Society of Chemistry","host_organization_lineage":["https://openalex.org/P4310320556"],"host_organization_lineage_names":["Royal Society of Chemistry"],"type":"journal"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"RSC Advances","raw_type":"journal-article"},{"id":"pmid:35558330","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35558330","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"RSC advances","raw_type":"Journal Article"},{"id":"pmh:oai:pubmedcentral.nih.gov:9090666","doi":null,"is_oa":true,"landing_page_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC9090666/","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"RSC Adv","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.1039/c8ra06911e","doi":"https://doi.org/10.1039/c8ra06911e","is_oa":true,"landing_page_url":"https://doi.org/10.1039/c8ra06911e","pdf_url":"https://pubs.rsc.org/en/content/articlepdf/2018/ra/c8ra06911e","source":{"id":"https://openalex.org/S2481244646","display_name":"RSC Advances","issn_l":"2046-2069","issn":["2046-2069"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320556","host_organization_name":"Royal Society of Chemistry","host_organization_lineage":["https://openalex.org/P4310320556"],"host_organization_lineage_names":["Royal Society of Chemistry"],"type":"journal"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"RSC Advances","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320315121","display_name":"Samsung Advanced Institute of Technology","ror":"https://ror.org/04axnyp10"},{"id":"https://openalex.org/F4320332195","display_name":"Samsung","ror":"https://ror.org/04w3jy968"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2900567913.pdf","grobid_xml":"https://content.openalex.org/works/W2900567913.grobid-xml"},"referenced_works_count":25,"referenced_works":["https://openalex.org/W60756987","https://openalex.org/W1496024054","https://openalex.org/W1965145270","https://openalex.org/W1983991555","https://openalex.org/W1984342775","https://openalex.org/W1999665858","https://openalex.org/W2003645630","https://openalex.org/W2006625369","https://openalex.org/W2015491701","https://openalex.org/W2023746791","https://openalex.org/W2024231594","https://openalex.org/W2025238250","https://openalex.org/W2037899771","https://openalex.org/W2038086889","https://openalex.org/W2053674573","https://openalex.org/W2075687112","https://openalex.org/W2088848728","https://openalex.org/W2094110130","https://openalex.org/W2106278831","https://openalex.org/W2116570662","https://openalex.org/W2170330057","https://openalex.org/W2338333907","https://openalex.org/W2490765418","https://openalex.org/W2523341934","https://openalex.org/W4246740799"],"related_works":["https://openalex.org/W2790154976","https://openalex.org/W2746550681","https://openalex.org/W2465017401","https://openalex.org/W2041144151","https://openalex.org/W2095539190","https://openalex.org/W4400591834","https://openalex.org/W2744344269","https://openalex.org/W2945435192","https://openalex.org/W2772572309","https://openalex.org/W2591607828"],"abstract_inverted_index":{"Solution-processed":[0],"amorphous":[1],"zirconium":[2],"oxide":[3],"(ZrO":[4],"2":[5,19],")":[6],"dielectrics":[7],"were":[8,32],"formed":[9],"via":[10],"a":[11,22],"non-hydrolytic":[12],"sol\u2013gel":[13],"route":[14],"at":[15],"low-temperature.":[16],"The":[17],"ZrO":[18],"films":[20],"exhibited":[21],"high":[23,27],"dielectric":[24],"constant":[25],"and":[26],"mobility":[28],"p-type":[29],"pentacene":[30],"TFTs":[31],"fabricated":[33],"using":[34],"them.":[35]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":6},{"year":2019,"cited_by_count":2}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2018-11-29T00:00:00"}