{"id":"https://openalex.org/W2895862012","doi":"https://doi.org/10.1109/icept.2018.8480663","title":"Research on Motion Simulation of Wafer Handling Robot Based on SCARA","display_name":"Research on Motion Simulation of Wafer Handling Robot Based on SCARA","publication_year":2018,"publication_date":"2018-08-01","ids":{"openalex":"https://openalex.org/W2895862012","doi":"https://doi.org/10.1109/icept.2018.8480663","mag":"2895862012"},"language":"en","primary_location":{"id":"doi:10.1109/icept.2018.8480663","doi":"https://doi.org/10.1109/icept.2018.8480663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icept.2018.8480663","pdf_url":null,"source":{"id":"https://openalex.org/S4363607763","display_name":"International Conference on Electronic Packaging Technology (ICEPT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 19th International Conference on Electronic Packaging Technology (ICEPT)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018009457","display_name":"Yunbo He","orcid":"https://orcid.org/0000-0002-6933-1209","observed_orcids":["https://orcid.org/0000-0002-6933-1209"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunbo He","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075107111","display_name":"Jiajun Chen","orcid":"https://orcid.org/0000-0001-8084-7292","observed_orcids":["https://orcid.org/0000-0001-8084-7292"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiajun Chen","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028795816","display_name":"Jian Gao","orcid":"https://orcid.org/0000-0001-5625-7751","observed_orcids":["https://orcid.org/0000-0001-5625-7751","https://orcid.org/0009-0001-7987-2615"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Gao","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005762426","display_name":"Chengqiang Cui","orcid":"https://orcid.org/0000-0002-8337-4985","observed_orcids":["https://orcid.org/0000-0002-8337-4985"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengqiang Cui","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066914548","display_name":"Zhijun Yang","orcid":"https://orcid.org/0000-0003-1927-1209","observed_orcids":["https://orcid.org/0000-0003-1927-1209"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhijun Yang","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100451609","display_name":"Xun Chen","orcid":"https://orcid.org/0000-0003-2547-9022","observed_orcids":["https://orcid.org/0000-0003-2547-9022"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xun Chen","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077845043","display_name":"Yun Chen","orcid":"https://orcid.org/0000-0001-6819-6562","observed_orcids":["https://orcid.org/0000-0001-6819-6562","https://orcid.org/0009-0001-8623-8137"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Chen","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100323899","display_name":"Kai Zhang","orcid":"https://orcid.org/0000-0001-7892-7920","observed_orcids":["https://orcid.org/0000-0001-7892-7920"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Zhang","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009718960","display_name":"Hui Tang","orcid":"https://orcid.org/0000-0003-2155-5235","observed_orcids":["https://orcid.org/0000-0003-2155-5235"]},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Tang","raw_affiliation_strings":["School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I139024713"],"apc_list":null,"apc_paid":null,"fwci":0.7514,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.65435843,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"734","last_page":"739"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11394","display_name":"Dynamics and Control of Mechanical Systems","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13451","display_name":"Mechanical Engineering Research and Applications","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer-handling-robots","display_name":"wafer handling robots","score":0.996999979019165},{"id":"https://openalex.org/keywords/scara-robot","display_name":"SCARA robot","score":0.9319999814033508},{"id":"https://openalex.org/keywords/robot-kinematics","display_name":"robot kinematics","score":0.7950000166893005},{"id":"https://openalex.org/keywords/forward-and-inverse-kinematics","display_name":"forward and inverse kinematics","score":0.9259999990463257},{"id":"https://openalex.org/keywords/robot-workspace","display_name":"robot workspace","score":0.675000011920929},{"id":"https://openalex.org/keywords/joint-trajectory-planning","display_name":"joint trajectory planning","score":0.7749999761581421},{"id":"https://openalex.org/keywords/robot-dynamics","display_name":"robot dynamics","score":0.7570000290870667},{"id":"https://openalex.org/keywords/lagrangian-dynamic-modeling","display_name":"Lagrangian dynamic modeling","score":0.8270000219345093},{"id":"https://openalex.org/keywords/semiconductor-manufacturing","display_name":"semiconductor manufacturing","score":0.46799999475479126},{"id":"https://openalex.org/keywords/robot-motion-simulation","display_name":"robot motion simulation","score":0.6570000052452087}],"concepts":[{"id":"https://openalex.org/C158732272","wikidata":"https://www.wikidata.org/wiki/Q1484792","display_name":"SCARA","level":3,"score":0.9407975077629089},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.6943180561065674},{"id":"https://openalex.org/C17816587","wikidata":"https://www.wikidata.org/wiki/Q1501872","display_name":"Inverse kinematics","level":3,"score":0.6589524149894714},{"id":"https://openalex.org/C192299074","wikidata":"https://www.wikidata.org/wiki/Q2160034","display_name":"Robot calibration","level":5,"score":0.6093182563781738},{"id":"https://openalex.org/C74222875","wikidata":"https://www.wikidata.org/wiki/Q16000312","display_name":"Robot kinematics","level":4,"score":0.5814774036407471},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.5059689879417419},{"id":"https://openalex.org/C138417311","wikidata":"https://www.wikidata.org/wiki/Q3180664","display_name":"Articulated robot","level":5,"score":0.4939938187599182},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4848710000514984},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4743833839893341},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.4649238586425781},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.4604199230670929},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4417245090007782},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.42788293957710266},{"id":"https://openalex.org/C25592040","wikidata":"https://www.wikidata.org/wiki/Q3562730","display_name":"Arm solution","level":5,"score":0.42147207260131836},{"id":"https://openalex.org/C19966478","wikidata":"https://www.wikidata.org/wiki/Q4810574","display_name":"Mobile robot","level":3,"score":0.36955392360687256},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21333765983581543},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09006431698799133},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icept.2018.8480663","doi":"https://doi.org/10.1109/icept.2018.8480663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icept.2018.8480663","pdf_url":null,"source":{"id":"https://openalex.org/S4363607763","display_name":"International Conference on Electronic Packaging Technology (ICEPT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 19th International Conference on Electronic Packaging Technology (ICEPT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W139131351","https://openalex.org/W615858980","https://openalex.org/W1981999954","https://openalex.org/W1986182534","https://openalex.org/W1988882685","https://openalex.org/W2369861193"],"related_works":["https://openalex.org/W4255006717","https://openalex.org/W1511938841","https://openalex.org/W4249752797","https://openalex.org/W2522905528","https://openalex.org/W4247508623","https://openalex.org/W2286209524","https://openalex.org/W3129004068","https://openalex.org/W2139206564","https://openalex.org/W2792156965","https://openalex.org/W2139772866"],"abstract_inverted_index":{"In":[0,49],"the":[1,6,20,27,34,45,53,57,59,64,72,89,93,97,106,116,119,124,127,140,144,148,156,163,166,169,173,176,182,185,192,197,202,206,219],"process":[2,22,221],"of":[3,19,36,56,63,96,118,126,139,147,175,184,205,222],"semiconductor":[4],"manufacturing,":[5],"wafer":[7,46,65,98,149,223],"handling":[8,47,99,150,224],"robot":[9,67,100,120,128,141,151],"has":[10,214],"become":[11],"an":[12],"key":[13],"device.":[14],"The":[15,109,159,208],"stability":[16],"and":[17,79,85,130,134,168,189],"repeatability":[18],"transfer":[21,66],"directly":[23],"or":[24],"indirectly":[25],"affect":[26],"manufacturing":[28],"quality.":[29],"This":[30],"thesis":[31,213],"focuses":[32],"on":[33],"structure":[35],"SCARA":[37],"(Selective":[38],"Compliance":[39],"Assembly":[40],"Robot":[41],"Arm)":[42],"to":[43,51,71,88,114,191],"study":[44],"robot.":[48,207,225],"order":[50],"analyze":[52,115],"motion":[54,125],"characteristics":[55],"robot,":[58,177],"link":[60],"coordinate":[61],"system":[62,188],"was":[68,112,152],"established":[69],"according":[70],"D-H":[73],"theory.":[74],"And":[75,199],"then":[76,200],"its":[77],"forward":[78],"inverse":[80],"kinematics":[81,91],"equations":[82],"were":[83],"deduced":[84],"calculated.":[86],"According":[87],"obtained":[90],"model,":[92],"working":[94],"area":[95],"could":[101],"be":[102],"solving":[103],"by":[104,154,211],"using":[105,155],"Monte-Carlo":[107],"method.":[108,158],"MATLAB":[110],"software":[111],"used":[113],"simulation":[117],"motion,":[121],"intuitively":[122],"showing":[123],"joint":[129],"obtaining":[131],"a":[132],"continuous":[133],"smooth":[135],"angle":[136],"trajectory":[137,194],"curve":[138],"joint.":[142],"Nextly,":[143],"dynamic":[145],"modeling":[146],"performed":[153],"Lagrangian":[157],"dynamics":[160],"mainly":[161],"studies":[162],"relationship":[164],"between":[165],"force":[167,203],"movement.":[170],"When":[171],"planning":[172],"movement":[174],"it":[178],"can":[179],"fully":[180],"consider":[181],"limitations":[183],"robot's":[186],"power":[187],"plan":[190],"required":[193],"without":[195],"damaging":[196],"motor.":[198],"do":[201],"analysis":[204],"work":[209],"done":[210],"this":[212],"certain":[215],"guiding":[216],"significance":[217],"for":[218],"designing":[220]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2025-10-10T00:00:00"}