{"id":"https://openalex.org/W28155252","doi":"https://doi.org/10.1116/1.1319819","title":"Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor","display_name":"Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor","publication_year":2000,"publication_date":"2000-11-01","ids":{"openalex":"https://openalex.org/W28155252","doi":"https://doi.org/10.1116/1.1319819","mag":"28155252"},"language":"en","primary_location":{"id":"doi:10.1116/1.1319819","doi":"https://doi.org/10.1116/1.1319819","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1319819","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://digital.library.unt.edu/ark:/67531/metadc708290/","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003007178","display_name":"L.A. Berry","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lee Berry","raw_affiliation_strings":["Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831","institution_ids":["https://openalex.org/I1289243028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044657166","display_name":"Helen L. Maynard","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Helen Maynard","raw_affiliation_strings":["Bell Laboratories, Lucent Technologies, 700 Mountain Avenue, Murray Hill, New Jersey\u200907974"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bell Laboratories, Lucent Technologies, 700 Mountain Avenue, Murray Hill, New Jersey\u200907974","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085329927","display_name":"Paul A Miller","orcid":"https://orcid.org/0000-0002-7934-8119","observed_orcids":["https://orcid.org/0000-0002-7934-8119"]},"institutions":[{"id":"https://openalex.org/I4210104735","display_name":"Sandia National Laboratories","ror":"https://ror.org/01apwpt12","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Paul Miller","raw_affiliation_strings":["Sandia National Laboratories, Box 5800, Albuquerque, New Mexico\u200987185-1423"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, Box 5800, Albuquerque, New Mexico\u200987185-1423","institution_ids":["https://openalex.org/I4210104735"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070819434","display_name":"Tony Moore","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tony Moore","raw_affiliation_strings":["International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741","Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741","institution_ids":[]},{"raw_affiliation_string":"Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831","institution_ids":["https://openalex.org/I1289243028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050703722","display_name":"Michael Pendley","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Michael Pendley","raw_affiliation_strings":["International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010708892","display_name":"Victoria Resta","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Victoria Resta","raw_affiliation_strings":["International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091517732","display_name":"D. O. Sparks","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dennis Sparks","raw_affiliation_strings":["Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Oak Ridge National Laboratory, Box 2009, Oak Ridge, Tennessee\u200937831","institution_ids":["https://openalex.org/I1289243028"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103281845","display_name":"Qingyun Yang","orcid":"https://orcid.org/0009-0005-4666-0607","observed_orcids":["https://orcid.org/0009-0005-4666-0607"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Qingyun Yang","raw_affiliation_strings":["International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"International SEMATECH, 2706 Montopolis Drive, Austin, Texas\u200978741","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4323,"has_fulltext":true,"cited_by_count":20,"citation_normalized_percentile":{"value":0.6614306,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"18","issue":"6","first_page":"2806","last_page":"2814"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11367","display_name":"Particle accelerators and beam dynamics","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/oxide-etching","display_name":"oxide etching","score":0.7149999737739563},{"id":"https://openalex.org/keywords/ion-energy-distribution","display_name":"ion energy distribution","score":0.7450000047683716},{"id":"https://openalex.org/keywords/ion-extraction","display_name":"ion extraction","score":0.5929999947547913},{"id":"https://openalex.org/keywords/ion-energy-spectra","display_name":"ion energy spectra","score":0.4970000088214874},{"id":"https://openalex.org/keywords/feature-evolution","display_name":"feature evolution","score":0.5950000286102295}],"concepts":[{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.8291566967964172},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.7268556356430054},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5316985845565796},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.48988789319992065},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4863744080066681},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.48291870951652527},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4571748375892639},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4563087522983551},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.42670953273773193},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3527141809463501},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3312298059463501},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.33066874742507935},{"id":"https://openalex.org/C116915560","wikidata":"https://www.wikidata.org/wiki/Q83504","display_name":"Nuclear engineering","level":1,"score":0.32439321279525757},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.25992417335510254},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24178144335746765},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1116/1.1319819","doi":"https://doi.org/10.1116/1.1319819","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1319819","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},{"id":"pmh:info:ark/67531/metadc708290","doi":null,"is_oa":true,"landing_page_url":"https://digital.library.unt.edu/ark:/67531/metadc708290/","pdf_url":"https://digital.library.unt.edu/ark:/67531/metadc708290/","source":{"id":"https://openalex.org/S4306400792","display_name":"University of North Texas Digital Library (University of North Texas)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I123534392","host_organization_name":"University of North Texas","host_organization_lineage":["https://openalex.org/I123534392"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Submitted to Journal of Vacuum Science and Technology","raw_type":"Article"},{"id":"pmh:oai:osti.gov:755601","doi":null,"is_oa":true,"landing_page_url":"https://www.osti.gov/biblio/755601","pdf_url":"https://www.osti.gov/servlets/purl/755601","source":{"id":"https://openalex.org/S4306402487","display_name":"OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I139351228","host_organization_name":"Office of Scientific and Technical Information","host_organization_lineage":["https://openalex.org/I139351228"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"pmh:info:ark/67531/metadc708290","doi":null,"is_oa":true,"landing_page_url":"https://digital.library.unt.edu/ark:/67531/metadc708290/","pdf_url":"https://digital.library.unt.edu/ark:/67531/metadc708290/","source":{"id":"https://openalex.org/S4306400792","display_name":"University of North Texas Digital Library (University of North Texas)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I123534392","host_organization_name":"University of North Texas","host_organization_lineage":["https://openalex.org/I123534392"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Submitted to Journal of Vacuum Science and Technology","raw_type":"Article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.8700000047683716,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320338291","display_name":"Sandia National Laboratories","ror":"https://ror.org/01apwpt12"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W28155252.pdf","grobid_xml":"https://content.openalex.org/works/W28155252.grobid-xml"},"referenced_works_count":9,"referenced_works":["https://openalex.org/W1973061894","https://openalex.org/W1984697825","https://openalex.org/W1996503902","https://openalex.org/W2004622429","https://openalex.org/W2008464274","https://openalex.org/W2034756144","https://openalex.org/W2038118832","https://openalex.org/W2056889600","https://openalex.org/W2088351680"],"related_works":["https://openalex.org/W2034111889","https://openalex.org/W2033492650","https://openalex.org/W2046290427","https://openalex.org/W379707430","https://openalex.org/W2040995591","https://openalex.org/W2089864237","https://openalex.org/W2072826019","https://openalex.org/W2169253480","https://openalex.org/W2767809585","https://openalex.org/W2067249281"],"abstract_inverted_index":{"Radio":[0],"frequency":[1],"(rf)":[2],"power":[3],"is":[4],"commonly":[5],"applied":[6],"to":[7,17,21,71],"the":[8,23,26,30,38,42,48,51,72,77,89,93,100,107],"chuck":[9,78],"of":[10,25,32,41,50,53,79,92,103,112],"a":[11],"high-density":[12],"plasma":[13],"reactor":[14,86],"in":[15],"order":[16],"extract":[18],"ions":[19,27],"and":[20],"control":[22,95],"energy":[24,109],"used":[28],"for":[29,105],"fabrication":[31],"microelectronic":[33],"devices.":[34],"In":[35],"many":[36],"cases,":[37],"temporal":[39],"shape":[40,49],"rf":[43,64],"wave":[44,74],"form":[45,75],"largely":[46],"determines":[47],"spectrum":[52],"those":[54],"extracted":[55],"ions,":[56],"thereby":[57],"strongly":[58],"affecting":[59,88],"feature":[60],"evolution.":[61],"Using":[62],"auxiliary":[63],"circuits,":[65],"we":[66],"successfully":[67],"made":[68],"major":[69],"changes":[70],"rf-potential":[73],"at":[76],"an":[80],"Applied":[81],"Materials":[82],"5300":[83],"HDP":[84],"Omega":[85],"without":[87],"normal":[90],"functioning":[91],"reactor\u2019s":[94],"systems.":[96],"This":[97],"work":[98],"established":[99],"practical":[101],"feasibility":[102],"techniques":[104],"modifying":[106],"ion":[108],"distribution":[110],"functions":[111],"industrial":[113],"reactors.":[114]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":2}],"updated_date":"2026-09-25T08:18:29.962427","created_date":"2016-06-24T00:00:00"}