{"id":"https://openalex.org/W2808084652","doi":"https://doi.org/10.1116/1.5027387","title":"Sputtering of Si by Ar: A binary collision approach based on quantum-mechanical cross sections","display_name":"Sputtering of Si by Ar: A binary collision approach based on quantum-mechanical cross sections","publication_year":2018,"publication_date":"2018-06-15","ids":{"openalex":"https://openalex.org/W2808084652","doi":"https://doi.org/10.1116/1.5027387","mag":"2808084652"},"language":"en","primary_location":{"id":"doi:10.1116/1.5027387","doi":"https://doi.org/10.1116/1.5027387","is_oa":true,"landing_page_url":"https://doi.org/10.1116/1.5027387","pdf_url":"https://avs.scitation.org/doi/pdf/10.1116/1.5027387","source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://avs.scitation.org/doi/pdf/10.1116/1.5027387","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019723656","display_name":"Alexander P. Palov","orcid":"https://orcid.org/0000-0002-7151-2893","observed_orcids":["https://orcid.org/0000-0002-7151-2893"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I36234482","display_name":"University of Bristol","ror":"https://ror.org/0524sp257","country_code":"GB","type":"education","lineage":["https://openalex.org/I36234482"]},{"id":"https://openalex.org/I4405279538","display_name":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University","ror":"https://ror.org/01mjggc44","country_code":"RU","type":"facility","lineage":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}],"countries":["GB","RU"],"is_corresponding":true,"raw_author_name":"Alexander P. Palov","raw_affiliation_strings":["Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]},{"raw_affiliation_string":"Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","institution_ids":["https://openalex.org/I36234482"]},{"raw_affiliation_string":"Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034966138","display_name":"Gabriel G. Balint\u2010Kurti","orcid":"https://orcid.org/0000-0003-4298-1233","observed_orcids":["https://orcid.org/0000-0003-4298-1233"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I36234482","display_name":"University of Bristol","ror":"https://ror.org/0524sp257","country_code":"GB","type":"education","lineage":["https://openalex.org/I36234482"]},{"id":"https://openalex.org/I4405279538","display_name":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University","ror":"https://ror.org/01mjggc44","country_code":"RU","type":"facility","lineage":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}],"countries":["GB","RU"],"is_corresponding":false,"raw_author_name":"Gabriel G. Balint-Kurti","raw_affiliation_strings":["Centre for Computational Chemistry, School of Chemistry, University of Bristol , Bristol BS8 1TS, United Kingdom","Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre for Computational Chemistry, School of Chemistry, University of Bristol , Bristol BS8 1TS, United Kingdom","institution_ids":["https://openalex.org/I36234482"]},{"raw_affiliation_string":"Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]},{"raw_affiliation_string":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036276058","display_name":"\u0415. \u041d. \u0412\u043e\u0440\u043e\u043d\u0438\u043d\u0430","orcid":"https://orcid.org/0000-0001-7946-215X","observed_orcids":["https://orcid.org/0000-0001-7946-215X"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I36234482","display_name":"University of Bristol","ror":"https://ror.org/0524sp257","country_code":"GB","type":"education","lineage":["https://openalex.org/I36234482"]},{"id":"https://openalex.org/I4405279538","display_name":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University","ror":"https://ror.org/01mjggc44","country_code":"RU","type":"facility","lineage":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}],"countries":["GB","RU"],"is_corresponding":false,"raw_author_name":"Ekaterina N. Voronina","raw_affiliation_strings":["Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University , Moscow 119991, Russia","Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University , Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]},{"raw_affiliation_string":"Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","institution_ids":["https://openalex.org/I36234482"]},{"raw_affiliation_string":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016876955","display_name":"Tatyana V. Rakhimova","orcid":"https://orcid.org/0000-0003-3539-4823","observed_orcids":["https://orcid.org/0000-0003-3539-4823"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I36234482","display_name":"University of Bristol","ror":"https://ror.org/0524sp257","country_code":"GB","type":"education","lineage":["https://openalex.org/I36234482"]},{"id":"https://openalex.org/I4405279538","display_name":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University","ror":"https://ror.org/01mjggc44","country_code":"RU","type":"facility","lineage":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}],"countries":["GB","RU"],"is_corresponding":false,"raw_author_name":"Tatyana V. Rakhimova","raw_affiliation_strings":["Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]},{"raw_affiliation_string":"Centre for Computational Chemistry, School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom","institution_ids":["https://openalex.org/I36234482"]},{"raw_affiliation_string":"Faculty of Physics and Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow 119991, Russia","institution_ids":["https://openalex.org/I19880235","https://openalex.org/I4405279538"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5019723656"],"corresponding_institution_ids":["https://openalex.org/I19880235","https://openalex.org/I36234482","https://openalex.org/I4405279538"],"apc_list":null,"apc_paid":null,"fwci":0.4395,"has_fulltext":true,"cited_by_count":9,"citation_normalized_percentile":{"value":0.50779575,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"36","issue":"4","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10592","display_name":"Fusion materials and technologies","score":0.003599999938160181,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.0020000000949949026,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sputtering-yield","display_name":"sputtering yield","score":0.9070000052452087},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.9430000185966492},{"id":"https://openalex.org/keywords/argon-ion-bombardment","display_name":"argon ion bombardment","score":0.9570000171661377},{"id":"https://openalex.org/keywords/binary-collision-model","display_name":"binary collision model","score":0.781000018119812},{"id":"https://openalex.org/keywords/ion-solid-interaction","display_name":"ion-solid interaction","score":0.5419999957084656},{"id":"https://openalex.org/keywords/molecular-dynamics-comparison","display_name":"molecular dynamics comparison","score":0.9620000123977661},{"id":"https://openalex.org/keywords/plasma-processing","display_name":"plasma processing","score":0.7820000052452087}],"concepts":[{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.7989521026611328},{"id":"https://openalex.org/C84114770","wikidata":"https://www.wikidata.org/wiki/Q46344","display_name":"Quantum","level":2,"score":0.7015044093132019},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.6305296421051025},{"id":"https://openalex.org/C88611116","wikidata":"https://www.wikidata.org/wiki/Q957004","display_name":"Trim","level":2,"score":0.6279338002204895},{"id":"https://openalex.org/C48372109","wikidata":"https://www.wikidata.org/wiki/Q3913","display_name":"Binary number","level":2,"score":0.6108540892601013},{"id":"https://openalex.org/C121704057","wikidata":"https://www.wikidata.org/wiki/Q352070","display_name":"Collision","level":2,"score":0.5915319919586182},{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.5657455921173096},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.5270745158195496},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.5104228854179382},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.5096769332885742},{"id":"https://openalex.org/C134121241","wikidata":"https://www.wikidata.org/wiki/Q899301","display_name":"Yield (engineering)","level":2,"score":0.4803163409233093},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4601071774959564},{"id":"https://openalex.org/C59593255","wikidata":"https://www.wikidata.org/wiki/Q901663","display_name":"Molecular dynamics","level":2,"score":0.45363929867744446},{"id":"https://openalex.org/C2182769","wikidata":"https://www.wikidata.org/wiki/Q62500","display_name":"Ionic bonding","level":3,"score":0.4472094476222992},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.4396345913410187},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.41466596722602844},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38123083114624023},{"id":"https://openalex.org/C41999313","wikidata":"https://www.wikidata.org/wiki/Q489328","display_name":"Molecular physics","level":1,"score":0.33723682165145874},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1316492259502411},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.12755033373832703},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.09716656804084778},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.08616170287132263},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07499325275421143},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C94375191","wikidata":"https://www.wikidata.org/wiki/Q11205","display_name":"Arithmetic","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1116/1.5027387","doi":"https://doi.org/10.1116/1.5027387","is_oa":true,"landing_page_url":"https://doi.org/10.1116/1.5027387","pdf_url":"https://avs.scitation.org/doi/pdf/10.1116/1.5027387","source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},{"id":"pmh:oai:research-information.bris.ac.uk:openaire/29436380-234f-454a-9eaf-b1e0a44d1400","doi":null,"is_oa":true,"landing_page_url":"https://research-information.bris.ac.uk/en/publications/29436380-234f-454a-9eaf-b1e0a44d1400","pdf_url":"https://research-information.bris.ac.uk/files/163358678/1.5027387.pdf","source":{"id":"https://openalex.org/S4306400895","display_name":"Bristol Research (University of Bristol)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I36234482","host_organization_name":"University of Bristol","host_organization_lineage":["https://openalex.org/I36234482"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Palov, A P, Balint-Kurti, G G, Voronina, E N & Rakhimova, T V 2018, 'Sputtering of Si by Ar : A binary collision approach based on quantum-mechanical cross sections', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 36, no. 4, 041303. https://doi.org/10.1116/1.5027387","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"doi:10.1116/1.5027387","doi":"https://doi.org/10.1116/1.5027387","is_oa":true,"landing_page_url":"https://doi.org/10.1116/1.5027387","pdf_url":"https://avs.scitation.org/doi/pdf/10.1116/1.5027387","source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3854381673","display_name":null,"funder_award_id":"14-12-01012","funder_id":"https://openalex.org/F4320324099","funder_display_name":"Russian Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320324099","display_name":"Russian Science Foundation","ror":"https://ror.org/03y2gwe85"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2808084652.pdf","grobid_xml":"https://content.openalex.org/works/W2808084652.grobid-xml"},"referenced_works_count":34,"referenced_works":["https://openalex.org/W1598214141","https://openalex.org/W1964689415","https://openalex.org/W1966184457","https://openalex.org/W1976962198","https://openalex.org/W1993662404","https://openalex.org/W1993672755","https://openalex.org/W1994069792","https://openalex.org/W1996194621","https://openalex.org/W2002228981","https://openalex.org/W2003974290","https://openalex.org/W2003979947","https://openalex.org/W2019579242","https://openalex.org/W2022168921","https://openalex.org/W2023937525","https://openalex.org/W2024172140","https://openalex.org/W2029944231","https://openalex.org/W2031519161","https://openalex.org/W2036370299","https://openalex.org/W2037365376","https://openalex.org/W2037782625","https://openalex.org/W2047491557","https://openalex.org/W2051943365","https://openalex.org/W2065253127","https://openalex.org/W2067724673","https://openalex.org/W2077638523","https://openalex.org/W2083883171","https://openalex.org/W2084179785","https://openalex.org/W2084300021","https://openalex.org/W2085072569","https://openalex.org/W2091532693","https://openalex.org/W2136935671","https://openalex.org/W2491218394","https://openalex.org/W2517369015","https://openalex.org/W2729499071"],"related_works":["https://openalex.org/W1986781043","https://openalex.org/W2047317587","https://openalex.org/W2997414953","https://openalex.org/W2029944231","https://openalex.org/W2391245205","https://openalex.org/W2041796724","https://openalex.org/W2351987099","https://openalex.org/W3176453683","https://openalex.org/W7204887880","https://openalex.org/W2105681208"],"abstract_inverted_index":{"A":[0],"new":[1,72,104,125],"binary":[2],"collision":[3],"approach":[4,50,105,126],"for":[5,22],"the":[6,9,23,42,56,61,92,116,124],"calculation":[7,40],"of":[8,12,41,60,66,81,96,109,115],"sputtering":[10,67],"yield":[11],"Si":[13],"under":[14],"nonreactive":[15],"ionic":[16],"bombardment":[17],"by":[18],"Ar+":[19],"is":[20,100],"presented":[21],"energy":[24,62],"range":[25],"from":[26,45],"threshold":[27],"to":[28,54,107,127],"200":[29],"eV.":[30],"Unlike":[31],"conventional":[32],"Monte":[33],"Carlo":[34],"approaches":[35],"that":[36,102,114],"use":[37],"a":[38,46],"classical":[39],"scattering":[43,57],"angle":[44],"known":[47],"potential,":[48],"their":[49,71,97,103],"employs":[51],"quantum-mechanical":[52],"methods":[53],"compute":[55],"angle.":[58],"Comparison":[59],"and":[63,78,86,94,118],"angular":[64],"dependence":[65],"yields":[68],"computed":[69],"using":[70],"quantum-based":[73],"method":[74],"with":[75,79],"experimental":[76],"data":[77],"transport":[80],"ions":[82],"in":[83,130],"matter":[84],"(TRIM)":[85],"molecular":[87],"dynamics":[88],"(MD)":[89],"calculations":[90],"supports":[91],"accuracy":[93,111],"usefulness":[95],"approach.":[98],"It":[99],"shown":[101],"leads":[106],"results":[108],"an":[110],"intermediate":[112],"between":[113],"TRIM":[117],"MD":[119],"methods.":[120],"The":[121],"authors":[122],"expect":[123],"be":[128],"useful":[129],"plasma":[131],"processing":[132],"applications.":[133]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2018-06-21T00:00:00"}