{"id":"https://openalex.org/W2808056282","doi":"https://doi.org/10.1117/12.2314579","title":"Diffuse scattering of lamellar optical gratings due to line edge roughness","display_name":"Diffuse scattering of lamellar optical gratings due to line edge roughness","publication_year":2018,"publication_date":"2018-06-15","ids":{"openalex":"https://openalex.org/W2808056282","doi":"https://doi.org/10.1117/12.2314579","mag":"2808056282"},"language":"en","primary_location":{"id":"doi:10.1117/12.2314579","doi":"https://doi.org/10.1117/12.2314579","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2314579","pdf_url":null,"source":{"id":"https://openalex.org/S7407115249","display_name":"Optical Fabrication, Testing, and Metrology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Fabrication, Testing, and Metrology VI","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041227758","display_name":"Martin Heusinger","orcid":"https://orcid.org/0000-0003-0311-6378","observed_orcids":["https://orcid.org/0000-0003-0311-6378"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Martin Heusinger","raw_affiliation_strings":["Institute of Applied Physics (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Physics (Germany)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085081616","display_name":"Michael Banasch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210126143","display_name":"Vistec Electron Beam (Germany)","ror":"https://ror.org/02yxqev59","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210126143"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Banasch","raw_affiliation_strings":["Vistec Electron Beam GmbH (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Vistec Electron Beam GmbH (Germany)","institution_ids":["https://openalex.org/I4210126143"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067514274","display_name":"Dirk Michaelis","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Dirk Michaelis","raw_affiliation_strings":["Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008932115","display_name":"Thomas Fl\u00fcgel-Paul","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Fl\u00fcgel-Paul","raw_affiliation_strings":["Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007755364","display_name":"Uwe Detlef Zeitner","orcid":"https://orcid.org/0000-0002-3980-6971","observed_orcids":["https://orcid.org/0000-0002-3980-6971"]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Uwe D. Zeitner","raw_affiliation_strings":["Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)","Institute of Applied Physics (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer-Institut f\u00fcr Angewandte Optik und Feinmechanik (Germany)","institution_ids":["https://openalex.org/I4210115660"]},{"raw_affiliation_string":"Institute of Applied Physics (Germany)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.12830957,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"34","issue":null,"first_page":"17","last_page":"17"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.711899995803833,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.711899995803833,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.1639000028371811,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.04740000143647194,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/line-edge-roughness","display_name":"line edge roughness","score":0.9340000152587891},{"id":"https://openalex.org/keywords/stray-light","display_name":"stray light","score":0.7260000109672546},{"id":"https://openalex.org/keywords/angle-resolved-scattering","display_name":"angle-resolved scattering","score":0.9150000214576721},{"id":"https://openalex.org/keywords/rigorous-coupled-wave-analysis","display_name":"rigorous coupled-wave analysis","score":0.8669999837875366},{"id":"https://openalex.org/keywords/roughness-correlation-length","display_name":"roughness correlation length","score":0.7080000042915344},{"id":"https://openalex.org/keywords/roughness-exponent","display_name":"roughness exponent","score":0.9700000286102295},{"id":"https://openalex.org/keywords/grating-geometry","display_name":"grating geometry","score":0.8190000057220459}],"concepts":[{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.7936496734619141},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7688169479370117},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.7387202382087708},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.5738565921783447},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.5640846490859985},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5431146025657654},{"id":"https://openalex.org/C120456961","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Light scattering","level":3,"score":0.4837460517883301},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4720626175403595},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4505711495876312},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.45040518045425415},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.4324710965156555},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.3507853150367737},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16961047053337097},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.06990706920623779},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1117/12.2314579","doi":"https://doi.org/10.1117/12.2314579","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2314579","pdf_url":null,"source":{"id":"https://openalex.org/S7407115249","display_name":"Optical Fabrication, Testing, and Metrology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Fabrication, Testing, and Metrology VI","raw_type":"proceedings-article"},{"id":"pmh:oai:fraunhofer.de:N-520840","doi":null,"is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/N-520840.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IOF","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/402673","doi":null,"is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/402673","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1965618765","https://openalex.org/W1974516696","https://openalex.org/W1995198835","https://openalex.org/W1998688192","https://openalex.org/W2001650396","https://openalex.org/W2002190158","https://openalex.org/W2016475578","https://openalex.org/W2020694049","https://openalex.org/W2024112705","https://openalex.org/W2055673626","https://openalex.org/W2070157607","https://openalex.org/W2082277018","https://openalex.org/W2086273270","https://openalex.org/W2102080816","https://openalex.org/W2105806064","https://openalex.org/W2116586329","https://openalex.org/W2117557835","https://openalex.org/W2173261485","https://openalex.org/W2301808801","https://openalex.org/W2508074919","https://openalex.org/W2594050751","https://openalex.org/W2769682894","https://openalex.org/W2769929847","https://openalex.org/W2969903504","https://openalex.org/W4243927261","https://openalex.org/W6767347630"],"related_works":["https://openalex.org/W2897805762","https://openalex.org/W2301808801","https://openalex.org/W2769435292","https://openalex.org/W2732234128","https://openalex.org/W2055673626","https://openalex.org/W2006322955","https://openalex.org/W3009199044","https://openalex.org/W2508074919","https://openalex.org/W2808595770","https://openalex.org/W2027747056"],"abstract_inverted_index":{"In":[0,13,36,223],"recent":[1],"years,":[2],"the":[3,15,39,53,65,82,99,104,108,116,121,126,131,144,148,157,174,177,183,202,207,216,220,226,229,234,243,248],"scattering":[4,41,56],"properties":[5],"of":[6,10,17,33,43,84,101,107,161,179,186,219,228],"optical":[7],"gratings":[8,25,45,164,258],"became":[9],"high":[11,188],"interest.":[12],"particular,":[14],"effect":[16,213],"line":[18],"edge":[19],"roughness":[20,132,203],"(LER)":[21],"in":[22,81,140],"lamellar":[23],"diffraction":[24,237],"was":[26],"identified":[27],"to":[28,51,142,147,156,233],"be":[29,138,240,252],"a":[30,88,92,111,187,195,211,253],"potential":[31],"source":[32],"stray":[34],"light.":[35,222],"this":[37,72],"contribution":[38],"LER-induced":[40],"spectrum":[42],"such":[44],"is":[46,58,152,192],"investigated.":[47,193],"The":[48,150],"straight-forward":[49],"method":[50],"calculate":[52],"angle":[54],"resolved":[55],"(ARS)":[57],"offered":[59],"by":[60,154,242],"two-dimensional":[61],"simulation":[62],"tools,":[63],"e.g.":[64],"rigorous":[66,95],"coupled":[67],"wave":[68],"analysis":[69],"(RCWA).":[70],"Unfortunately,":[71],"approach":[73],"suffers":[74],"from":[75],"computation":[76,113],"times":[77],"that":[78,97,199],"typically":[79],"lie":[80],"range":[83],"several":[85],"days.":[86],"As":[87,115,194],"simplification,":[89],"we":[90,197],"apply":[91],"novel":[93],"one-dimensional":[94],"approach1":[96],"permits":[98],"prediction":[100],"ARS":[102],"along":[103],"dispersion":[105],"direction":[106],"grating":[109,191,208,244],"within":[110],"feasible":[112],"time.":[114],"1D-model":[117],"only":[118,201],"accounts":[119],"for":[120,256],"LER-parameter":[122],"\u03c3":[123],"and":[124,130,159],"neglects":[125],"correlation":[127],"length":[128],"\u03be":[129],"exponent":[133],"\u03b1,":[134],"analytical":[135],"considerations":[136],"must":[137],"employed":[139],"order":[141,238],"adapt":[143],"1D-simulation":[145],"results":[146],"2D-reality.1":[149],"model":[151],"verified":[153],"comparison":[155],"2D-model":[158],"ARS-measurements":[160],"E-beam":[162],"exposed":[163],"with":[165,259],"artificially":[166],"induced":[167],"(and":[168],"strongly":[169],"determined)":[170],"LER.":[171],"Based":[172],"on":[173,182,215],"derived":[175],"1D-model,":[176],"effects":[178],"different":[180],"parameters":[181,204],"straylight":[184,261],"performance":[185,189],"spectrometer":[190],"result":[196],"find":[198],"not":[200],"but":[205],"also":[206],"geometry":[209],"has":[210],"significant":[212],"especially":[214],"spatial":[217],"distribution":[218],"scattered":[221,230],"other":[224],"words,":[225],"strength":[227],"light":[231],"next":[232],"(spectrometric)":[235],"useful":[236,254],"can":[239],"controlled":[241],"geometry,":[245],"too.":[246],"Hence,":[247],"presented":[249],"algorithm":[250],"might":[251],"tool":[255],"designing":[257],"strong":[260],"specifications.":[262]},"counts_by_year":[],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2018-06-21T00:00:00"}