{"id":"https://openalex.org/W2804020249","doi":"https://doi.org/10.1016/j.mee.2018.05.001","title":"The fabrication of nanoscale Bi2Te3/Sb2Te3 multilayer thin film-based thermoelectric power chips","display_name":"The fabrication of nanoscale Bi2Te3/Sb2Te3 multilayer thin film-based thermoelectric power chips","publication_year":2018,"publication_date":"2018-05-21","ids":{"openalex":"https://openalex.org/W2804020249","doi":"https://doi.org/10.1016/j.mee.2018.05.001","mag":"2804020249"},"language":"en","primary_location":{"id":"doi:10.1016/j.mee.2018.05.001","doi":"https://doi.org/10.1016/j.mee.2018.05.001","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.mee.2018.05.001","pdf_url":"https://www.sciencedirect.com/science/article/am/pii/S0167931718301989","source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Microelectronic Engineering","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.sciencedirect.com/science/article/am/pii/S0167931718301989","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079749559","display_name":"Zhigang Xiao","orcid":"https://orcid.org/0000-0002-1595-0565","observed_orcids":["https://orcid.org/0000-0002-1595-0565"]},"institutions":[{"id":"https://openalex.org/I176692203","display_name":"Alabama Agricultural and Mechanical University","ror":"https://ror.org/05hz8m414","country_code":"US","type":"education","lineage":["https://openalex.org/I176692203"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Z. Xiao","raw_affiliation_strings":["Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, United States"],"raw_orcid":"https://orcid.org/0000-0002-1595-0565","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, United States","institution_ids":["https://openalex.org/I176692203"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054131257","display_name":"Kim Kisslinger","orcid":"https://orcid.org/0000-0002-6528-7044","observed_orcids":["https://orcid.org/0000-0002-6528-7044"]},"institutions":[{"id":"https://openalex.org/I200870766","display_name":"Brookhaven National Laboratory","ror":"https://ror.org/02ex6cf31","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I200870766","https://openalex.org/I39565521","https://openalex.org/I4210142672"]},{"id":"https://openalex.org/I4390039222","display_name":"Center for Functional Nanomaterials","ror":"https://ror.org/035xqz322","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I200870766","https://openalex.org/I39565521","https://openalex.org/I4210142672","https://openalex.org/I4390039222"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Kisslinger","raw_affiliation_strings":["Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States","institution_ids":["https://openalex.org/I200870766","https://openalex.org/I4390039222"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041569887","display_name":"Elaine DiMasi","orcid":"https://orcid.org/0000-0002-6993-7315","observed_orcids":["https://orcid.org/0000-0002-6993-7315"]},"institutions":[{"id":"https://openalex.org/I200870766","display_name":"Brookhaven National Laboratory","ror":"https://ror.org/02ex6cf31","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I200870766","https://openalex.org/I39565521","https://openalex.org/I4210142672"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Dimasi","raw_affiliation_strings":["National Synchrotron Light Source, Brookhaven National Laboratory, Upton, NY 11973, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Synchrotron Light Source, Brookhaven National Laboratory, Upton, NY 11973, United States","institution_ids":["https://openalex.org/I200870766"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088434316","display_name":"Joevonte Kimbrough","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I176692203","display_name":"Alabama Agricultural and Mechanical University","ror":"https://ror.org/05hz8m414","country_code":"US","type":"education","lineage":["https://openalex.org/I176692203"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Kimbrough","raw_affiliation_strings":["Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, United States","institution_ids":["https://openalex.org/I176692203"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5079749559"],"corresponding_institution_ids":["https://openalex.org/I176692203"],"apc_list":{"value":2860,"currency":"USD","value_usd":2860},"apc_paid":null,"fwci":0.437,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.49818771,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":97},"biblio":{"volume":"197","issue":null,"first_page":"8","last_page":"14"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11277","display_name":"Thermal properties of materials","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electron-beam-evaporation","display_name":"electron beam evaporation","score":0.781000018119812},{"id":"https://openalex.org/keywords/open-circuit-voltage","display_name":"open-circuit voltage","score":0.9549999833106995},{"id":"https://openalex.org/keywords/thermoelectric-power","display_name":"thermoelectric power","score":0.8379999995231628},{"id":"https://openalex.org/keywords/temperature-gradient","display_name":"temperature gradient","score":0.5849999785423279},{"id":"https://openalex.org/keywords/solid-state-cooling","display_name":"solid-state cooling","score":0.746999979019165},{"id":"https://openalex.org/keywords/on-chip-cooling","display_name":"on-chip cooling","score":0.8050000071525574},{"id":"https://openalex.org/keywords/interface-defects","display_name":"interface defects","score":0.3440000116825104}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8170320987701416},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6626466512680054},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6242834329605103},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5970295667648315},{"id":"https://openalex.org/C161368742","wikidata":"https://www.wikidata.org/wiki/Q874906","display_name":"High-resolution transmission electron microscopy","level":3,"score":0.5691991448402405},{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.5164718627929688},{"id":"https://openalex.org/C2777038907","wikidata":"https://www.wikidata.org/wiki/Q415256","display_name":"Bismuth telluride","level":4,"score":0.48837679624557495},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.41796499490737915},{"id":"https://openalex.org/C207365445","wikidata":"https://www.wikidata.org/wiki/Q15020929","display_name":"Thermoelectric materials","level":3,"score":0.41077083349227905},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3798612654209137},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.31919246912002563},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17989382147789001},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.09868687391281128},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1016/j.mee.2018.05.001","doi":"https://doi.org/10.1016/j.mee.2018.05.001","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.mee.2018.05.001","pdf_url":"https://www.sciencedirect.com/science/article/am/pii/S0167931718301989","source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Microelectronic Engineering","raw_type":"journal-article"},{"id":"pmh:oai:osti.gov:1473637","doi":null,"is_oa":true,"landing_page_url":"https://www.osti.gov/biblio/1473637","pdf_url":"https://www.osti.gov/servlets/purl/1473637","source":{"id":"https://openalex.org/S4306402487","display_name":"OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I139351228","host_organization_name":"Office of Scientific and Technical Information","host_organization_lineage":["https://openalex.org/I139351228"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},{"id":"pmh:oai:osti.gov:1548227","doi":null,"is_oa":false,"landing_page_url":"https://www.osti.gov/biblio/1548227","pdf_url":null,"source":{"id":"https://openalex.org/S4306402487","display_name":"OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I139351228","host_organization_name":"Office of Scientific and Technical Information","host_organization_lineage":["https://openalex.org/I139351228"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"doi:10.1016/j.mee.2018.05.001","doi":"https://doi.org/10.1016/j.mee.2018.05.001","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.mee.2018.05.001","pdf_url":"https://www.sciencedirect.com/science/article/am/pii/S0167931718301989","source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Microelectronic Engineering","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.9090999960899353}],"study_designs":[],"awards":[{"id":"https://openalex.org/G1393978717","display_name":null,"funder_award_id":"DESC-00112704","funder_id":"https://openalex.org/F4320337480","funder_display_name":"Basic Energy Sciences"},{"id":"https://openalex.org/G3037531304","display_name":null,"funder_award_id":"W911NF-16-1-0554","funder_id":"https://openalex.org/F4320338281","funder_display_name":"Army Research Office"},{"id":"https://openalex.org/G5348655441","display_name":null,"funder_award_id":"N00014-17-1-2635","funder_id":"https://openalex.org/F4320337345","funder_display_name":"Office of Naval Research"},{"id":"https://openalex.org/G5431240400","display_name":"MRI: Acquisition of an Advanced E-Beam Evaporation Thin Film Deposition System for Research in Micro and Nanofabrication","funder_award_id":"1229312","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G549834383","display_name":null,"funder_award_id":"DEAC0298CH10886","funder_id":"https://openalex.org/F4320337480","funder_display_name":"Basic Energy Sciences"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320337345","display_name":"Office of Naval Research","ror":"https://ror.org/00rk2pe57"},{"id":"https://openalex.org/F4320337480","display_name":"Basic Energy Sciences","ror":"https://ror.org/05mg91w61"},{"id":"https://openalex.org/F4320338281","display_name":"Army Research Office","ror":"https://ror.org/05epdh915"},{"id":"https://openalex.org/F4320338289","display_name":"Brookhaven National Laboratory","ror":"https://ror.org/02ex6cf31"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2804020249.pdf","grobid_xml":"https://content.openalex.org/works/W2804020249.grobid-xml"},"referenced_works_count":44,"referenced_works":["https://openalex.org/W1485647986","https://openalex.org/W1502183397","https://openalex.org/W1551152190","https://openalex.org/W1661695137","https://openalex.org/W1968663260","https://openalex.org/W1969605222","https://openalex.org/W1981167895","https://openalex.org/W1984636747","https://openalex.org/W1994715177","https://openalex.org/W1996982568","https://openalex.org/W2001139162","https://openalex.org/W2002490458","https://openalex.org/W2003133633","https://openalex.org/W2008277440","https://openalex.org/W2018798737","https://openalex.org/W2038174300","https://openalex.org/W2038511975","https://openalex.org/W2041097227","https://openalex.org/W2042056247","https://openalex.org/W2052419065","https://openalex.org/W2064726803","https://openalex.org/W2067432857","https://openalex.org/W2069927004","https://openalex.org/W2082409063","https://openalex.org/W2083804128","https://openalex.org/W2086778233","https://openalex.org/W2087776094","https://openalex.org/W2090877930","https://openalex.org/W2093262079","https://openalex.org/W2102109582","https://openalex.org/W2105733071","https://openalex.org/W2107522232","https://openalex.org/W2135191428","https://openalex.org/W2141251919","https://openalex.org/W2163517070","https://openalex.org/W2294181668","https://openalex.org/W2323177712","https://openalex.org/W2343184180","https://openalex.org/W2572526078","https://openalex.org/W2583791680","https://openalex.org/W2739858290","https://openalex.org/W2744169157","https://openalex.org/W2783113687","https://openalex.org/W2802044307"],"related_works":["https://openalex.org/W2022996773","https://openalex.org/W1990566077","https://openalex.org/W2074477995","https://openalex.org/W2461425231","https://openalex.org/W1561461762","https://openalex.org/W2527777605","https://openalex.org/W3011369805","https://openalex.org/W2664620414","https://openalex.org/W2014973624","https://openalex.org/W1981320454"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":3}],"updated_date":"2026-11-11T12:16:26.678958","created_date":"2018-06-01T00:00:00"}
