{"id":"https://openalex.org/W2803198736","doi":"https://doi.org/10.1109/jsen.2018.2837143","title":"MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues","display_name":"MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues","publication_year":2018,"publication_date":"2018-05-16","ids":{"openalex":"https://openalex.org/W2803198736","doi":"https://doi.org/10.1109/jsen.2018.2837143","mag":"2803198736"},"language":"en","primary_location":{"id":"doi:10.1109/jsen.2018.2837143","doi":"https://doi.org/10.1109/jsen.2018.2837143","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jsen.2018.2837143","pdf_url":null,"source":{"id":"https://openalex.org/S189694085","display_name":"IEEE Sensors Journal","issn_l":"1530-437X","issn":["1530-437X","1558-1748","2379-9153"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310321027","host_organization_name":"IEEE Sensors Council","host_organization_lineage":["https://openalex.org/P4310321027","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Sensors Council","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Sensors Journal","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036222202","display_name":"Germano Nicollini","orcid":"https://orcid.org/0000-0002-9830-2861","observed_orcids":["https://orcid.org/0000-0002-9830-2861"]},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Germano Nicollini","raw_affiliation_strings":["STMicroelectronics, Cornaredo, Italy"],"raw_orcid":"https://orcid.org/0000-0002-9830-2861","affiliations":[{"raw_affiliation_string":"STMicroelectronics, Cornaredo, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5015050788","display_name":"Daniele Devecchi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Daniele Devecchi","raw_affiliation_strings":["STMicroelectronics, Cornaredo, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Cornaredo, Italy","institution_ids":["https://openalex.org/I4210154781"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210154781"],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":0.8598,"has_fulltext":false,"cited_by_count":23,"citation_normalized_percentile":{"value":0.71260649,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":97},"biblio":{"volume":"18","issue":"13","first_page":"5386","last_page":"5394"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.003000000026077032,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microphone-sensitivity","display_name":"microphone sensitivity","score":0.7020000219345093},{"id":"https://openalex.org/keywords/signal-to-noise-ratio","display_name":"signal-to-noise ratio","score":0.9959999918937683},{"id":"https://openalex.org/keywords/power-supply-rejection","display_name":"power supply rejection","score":0.7839999794960022},{"id":"https://openalex.org/keywords/radio-frequency-interference","display_name":"radio frequency interference","score":0.8619999885559082},{"id":"https://openalex.org/keywords/application-specific-integrated-circuits","display_name":"application-specific integrated circuits","score":0.671999990940094},{"id":"https://openalex.org/keywords/mim-capacitors","display_name":"metal-insulator-metal capacitors","score":0.7310000061988831},{"id":"https://openalex.org/keywords/n-well-cmos","display_name":"n-well CMOS","score":0.7409999966621399}],"concepts":[{"id":"https://openalex.org/C2778263558","wikidata":"https://www.wikidata.org/wiki/Q46384","display_name":"Microphone","level":3,"score":0.6637881398200989},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.663377046585083},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5980570316314697},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5463058352470398},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5399207472801208},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4908166825771332},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4757147431373596},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.464013934135437},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4565869867801666},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.45481857657432556},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.45182934403419495},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.38361358642578125},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34634870290756226},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2307690680027008},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16228199005126953},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.09699147939682007},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09141495823860168},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C157138929","wikidata":"https://www.wikidata.org/wiki/Q570","display_name":"Loudspeaker","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jsen.2018.2837143","doi":"https://doi.org/10.1109/jsen.2018.2837143","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jsen.2018.2837143","pdf_url":null,"source":{"id":"https://openalex.org/S189694085","display_name":"IEEE Sensors Journal","issn_l":"1530-437X","issn":["1530-437X","1558-1748","2379-9153"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310321027","host_organization_name":"IEEE Sensors Council","host_organization_lineage":["https://openalex.org/P4310321027","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Sensors Council","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Sensors Journal","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1873363772","https://openalex.org/W2052102926","https://openalex.org/W2157269402","https://openalex.org/W2537591330","https://openalex.org/W2592333491","https://openalex.org/W6663677985","https://openalex.org/W6734376809"],"related_works":["https://openalex.org/W2912273002","https://openalex.org/W2922158825","https://openalex.org/W2004919839","https://openalex.org/W58588902","https://openalex.org/W4367276957","https://openalex.org/W4285218140","https://openalex.org/W1975195149","https://openalex.org/W2067685489","https://openalex.org/W4213435990","https://openalex.org/W2620383729"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"on":[3],"the":[4,35,44,53,56,64,74,77,84,91,98,113,142,145,148],"design":[5],"and":[6,24,38,90,118,126],"implementation":[7],"of":[8,34,43,55,76,93,115,144],"high":[9],"performance":[10,114],"MEMS":[11,36,57,120,129],"microphones.":[12],"The":[13,128],"main":[14],"parameters":[15],"defining":[16],"microphone":[17],"performance,":[18],"i.e.,":[19],"sensitivity,":[20],"acoustic":[21],"overload":[22],"level,":[23],"signal-to-noise":[25],"ratio,":[26],"have":[27,67],"been":[28,68],"extracted":[29],"from":[30,86],"an":[31],"acoustical-mechanical-electrical":[32],"model":[33],"sensor":[37,58],"designing":[39],"a":[40,94,133,156],"proper":[41],"architecture":[42],"readout":[45,61,149],"circuit.":[46],"Moreover,":[47],"some":[48],"subtle":[49],"problems":[50],"linked":[51],"to":[52],"integration":[54],"with":[59,136,165],"its":[60],"circuit":[62],"in":[63,97,106,155],"same":[65],"package":[66],"highlighted.":[69],"These":[70],"hidden":[71],"issues":[72],"are":[73,104,130,153],"degradation":[75],"power":[78],"supply":[79],"rejection":[80],"at":[81,141],"low":[82],"frequencies,":[83],"contamination":[85],"radio":[87],"frequency":[88],"interference,":[89],"presence":[92],"spurious":[95],"tone":[96],"audio":[99],"band":[100],"when":[101],"digital":[102,119],"microphones":[103,121],"operated":[105],"stereo":[107],"configuration.":[108],"They":[109],"can":[110],"seriously":[111],"impact":[112],"advanced":[116],"analog":[117],"if":[122],"not":[123],"properly":[124],"tackled":[125],"solved.":[127],"made":[131],"by":[132],"polysilicon":[134],"membrane":[135],"serpentine":[137],"spring":[138],"structures":[139],"placed":[140],"corners":[143],"diaphragm,":[146],"whereas":[147],"application-specified":[150],"integrated":[151],"circuits":[152],"realized":[154],"0.5-\u03bcm":[157],"single-poly,":[158],"four":[159],"metal":[160],"layers,":[161],"N-well":[162],"CMOS":[163],"process":[164],"MIM":[166],"capacitors.":[167]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":3}],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2018-06-01T00:00:00"}