{"id":"https://openalex.org/W2802299952","doi":"https://doi.org/10.1109/isiss.2018.8358124","title":"Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators","display_name":"Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators","publication_year":2018,"publication_date":"2018-03-01","ids":{"openalex":"https://openalex.org/W2802299952","doi":"https://doi.org/10.1109/isiss.2018.8358124","mag":"2802299952"},"language":"en","primary_location":{"id":"doi:10.1109/isiss.2018.8358124","doi":"https://doi.org/10.1109/isiss.2018.8358124","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isiss.2018.8358124","pdf_url":null,"source":{"id":"https://openalex.org/S7407088344","display_name":"IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103173206","display_name":"Michael Maurer","orcid":"https://orcid.org/0000-0002-7857-8721","observed_orcids":["https://orcid.org/0000-0002-7857-8721"]},"institutions":[{"id":"https://openalex.org/I4210119362","display_name":"Hahn-Schickard-Gesellschaft f\u00fcr angewandte Forschung","ror":"https://ror.org/02reezy47","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210119362"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Maurer","raw_affiliation_strings":["Hahn-Schickard, Villingen-Schwenningen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hahn-Schickard, Villingen-Schwenningen, Germany","institution_ids":["https://openalex.org/I4210119362"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023748424","display_name":"Stefan Rombach","orcid":"https://orcid.org/0000-0001-7627-1008","observed_orcids":["https://orcid.org/0000-0001-7627-1008"]},"institutions":[{"id":"https://openalex.org/I4210119362","display_name":"Hahn-Schickard-Gesellschaft f\u00fcr angewandte Forschung","ror":"https://ror.org/02reezy47","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210119362"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Rombach","raw_affiliation_strings":["Hahn-Schickard, Villingen-Schwenningen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hahn-Schickard, Villingen-Schwenningen, Germany","institution_ids":["https://openalex.org/I4210119362"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052080512","display_name":"Yiannos Manoli","orcid":"https://orcid.org/0000-0003-2805-0539","observed_orcids":["https://orcid.org/0000-0003-2805-0539"]},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Yiannos Manoli","raw_affiliation_strings":["Department of Microsystems Engineering, University of Freiburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Microsystems Engineering, University of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.7992,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59929565,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":93,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9404000043869019,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9404000043869019,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.02630000002682209,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.02539999969303608,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-gyroscope","display_name":"MEMS gyroscope","score":0.9440000057220459},{"id":"https://openalex.org/keywords/resonant-frequency-control","display_name":"resonant frequency control","score":0.9070000052452087},{"id":"https://openalex.org/keywords/in-band-noise","display_name":"in-band noise","score":0.8270000219345093},{"id":"https://openalex.org/keywords/digital-correction","display_name":"digital correction","score":0.6919999718666077},{"id":"https://openalex.org/keywords/spring-softening","display_name":"spring softening","score":0.875},{"id":"https://openalex.org/keywords/modulatory-effects","display_name":"modulation effects","score":0.48500001430511475}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8705505132675171},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6803900003433228},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.5785000324249268},{"id":"https://openalex.org/C68754193","wikidata":"https://www.wikidata.org/wiki/Q1184820","display_name":"Delta-sigma modulation","level":3,"score":0.5204370617866516},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4926493763923645},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.47758153080940247},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.47465115785598755},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.4704436659812927},{"id":"https://openalex.org/C196348190","wikidata":"https://www.wikidata.org/wiki/Q3744733","display_name":"Mechanical resonance","level":3,"score":0.4693630337715149},{"id":"https://openalex.org/C158411068","wikidata":"https://www.wikidata.org/wiki/Q2720568","display_name":"Digital control","level":2,"score":0.44353121519088745},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4263412058353424},{"id":"https://openalex.org/C25915539","wikidata":"https://www.wikidata.org/wiki/Q220786","display_name":"Automatic frequency control","level":2,"score":0.4208931624889374},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4139062464237213},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4106051027774811},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2929793894290924},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2736128568649292},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2669704556465149},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2058391273021698},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19953912496566772},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.18358594179153442},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1703680455684662},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.14865422248840332},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.12003478407859802},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isiss.2018.8358124","doi":"https://doi.org/10.1109/isiss.2018.8358124","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isiss.2018.8358124","pdf_url":null,"source":{"id":"https://openalex.org/S7407088344","display_name":"IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1924881435","https://openalex.org/W1982656162","https://openalex.org/W2103120683","https://openalex.org/W2115570435","https://openalex.org/W2140717033","https://openalex.org/W2466745998","https://openalex.org/W2757226945"],"related_works":["https://openalex.org/W199951459","https://openalex.org/W1568308873","https://openalex.org/W2126208174","https://openalex.org/W2000143927","https://openalex.org/W2064279082","https://openalex.org/W2096843620","https://openalex.org/W3014144707","https://openalex.org/W1924881435","https://openalex.org/W2159014047","https://openalex.org/W2000121421"],"abstract_inverted_index":{"This":[0,105],"paper":[1],"reports":[2],"on":[3,19,61],"a":[4,20,55,65],"resonance":[5,33,57,71],"frequency":[6,50,58,66,72,84],"control":[7,51,67,85],"for":[8],"vibratory":[9],"MEMS":[10],"gyroscopes.":[11],"The":[12,48,83],"angular":[13],"rate":[14],"readout":[15,44],"system":[16,45],"is":[17,46,103,117],"based":[18,60],"continuous-time":[21],"electromechanical":[22],"bandpass":[23],"Delta-Sigma":[24],"Modulator":[25],"(emDSM).":[26],"Due":[27,94],"to":[28,78,95,119,130],"mismatch":[29],"of":[30,35,42,54,73,89],"the":[31,36,38,43,70,74,90,96,100,121,126],"mechanical":[32],"frequencies":[34],"gyroscope":[37],"in-band":[39],"noise":[40],"(IBN)":[41],"increased.":[47],"presented":[49,115],"concept":[52],"consists":[53],"digital":[56,111],"detection":[59,76],"injected":[62],"testsignals":[63],"and":[64,124],"which":[68,116],"controls":[69],"gyroscope's":[75],"mass":[77],"achieve":[79],"matched":[80],"mode":[81],"condition.":[82],"voltages":[86,98],"make":[87],"use":[88],"spring":[91],"softening":[92],"effect.":[93],"applied":[97],"also":[99],"feedback":[101],"force":[102],"affected.":[104],"causes":[106],"modulation":[107,122],"effects.":[108],"A":[109],"novel":[110],"correction":[112],"will":[113],"be":[114],"able":[118],"compensate":[120],"effect":[123],"decreases":[125],"IBN":[127],"by":[128],"up":[129],"40":[131],"dB.":[132]},"counts_by_year":[{"year":2019,"cited_by_count":2}],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2018-05-17T00:00:00"}