{"id":"https://openalex.org/W2783178614","doi":null,"title":"300mm process line for qubit fabrication","display_name":"300mm process line for qubit fabrication","publication_year":2018,"publication_date":"2018-03-05","ids":{"openalex":"https://openalex.org/W2783178614","mag":"2783178614"},"language":"en","primary_location":{"id":"mag:2783178614","doi":null,"is_oa":false,"landing_page_url":"https://meetings.aps.org/Meeting/MAR18/Session/C28.9","pdf_url":null,"source":{"id":"https://openalex.org/S2764664775","display_name":"Bulletin of the American Physical Society","issn_l":"0003-0503","issn":["0003-0503"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Bulletin of the American Physical Society","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022030310","display_name":"Hubert C. George","orcid":"https://orcid.org/0009-0007-3897-0829","observed_orcids":["https://orcid.org/0009-0007-3897-0829"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hubert C. George","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102992959","display_name":"Kanwal Jit Singh","orcid":"https://orcid.org/0000-0001-5958-6788","observed_orcids":["https://orcid.org/0000-0001-5958-6788"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kanwal Jit Singh","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5958-6788","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004550232","display_name":"R. Pillarisetty","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. Pillarisetty","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113924689","display_name":"Nicole K. Thomas","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N. Thomas","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059215104","display_name":"Jelmer M. Boter","orcid":"https://orcid.org/0000-0003-1097-7459","observed_orcids":["https://orcid.org/0000-0003-1097-7459"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jelmer M. Boter","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-1097-7459","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045323548","display_name":"Delphine Brousse","orcid":"https://orcid.org/0000-0002-3659-9428","observed_orcids":["https://orcid.org/0000-0002-3659-9428"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Delphine Brousse","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-3659-9428","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053703360","display_name":"Juan Pablo Dehollain","orcid":"https://orcid.org/0000-0002-0425-4345","observed_orcids":["https://orcid.org/0000-0002-0425-4345"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Juan Pablo Dehollain","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-0425-4345","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058836524","display_name":"Gabriel Droulers","orcid":"https://orcid.org/0000-0002-8743-5271","observed_orcids":["https://orcid.org/0000-0002-8743-5271"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Droulers","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-8743-5271","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063670681","display_name":"H. G. J. Eenink","orcid":"https://orcid.org/0000-0001-8162-279X","observed_orcids":["https://orcid.org/0000-0001-8162-279X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"GertJan Eenink","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037738119","display_name":"Nico W. Hendrickx","orcid":"https://orcid.org/0000-0003-4224-7418","observed_orcids":["https://orcid.org/0000-0003-4224-7418"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nico W. Hendrickx","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-4224-7418","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068082225","display_name":"Nima Kalhor","orcid":"https://orcid.org/0000-0002-0378-9209","observed_orcids":["https://orcid.org/0000-0002-0378-9209"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nima Kalhor","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-0378-9209","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001323831","display_name":"Nodar Samkharadze","orcid":"https://orcid.org/0000-0003-4830-214X","observed_orcids":["https://orcid.org/0000-0003-4830-214X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nodar Samkharadze","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056862915","display_name":"Amir Sammak","orcid":"https://orcid.org/0000-0002-9776-9099","observed_orcids":["https://orcid.org/0000-0002-9776-9099","https://orcid.org/0009-0002-6779-7221"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Amir Sammak","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-9776-9099","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112276586","display_name":"LaReine A. Yeoh","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. A. Yeoh","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041123482","display_name":"Diego Sabbagh","orcid":"https://orcid.org/0000-0003-3062-9697","observed_orcids":["https://orcid.org/0000-0003-3062-9697"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Diego Sabbagh","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-3062-9697","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028014163","display_name":"Giordano Scappucci","orcid":"https://orcid.org/0000-0003-2512-0079","observed_orcids":["https://orcid.org/0000-0003-2512-0079"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Giordano Scappucci","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-2512-0079","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043398280","display_name":"Menno Veldhorst","orcid":"https://orcid.org/0000-0001-9730-3523","observed_orcids":["https://orcid.org/0000-0001-9730-3523"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Menno Veldhorst","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-9730-3523","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012503150","display_name":"Lieven M. K. Vandersypen","orcid":"https://orcid.org/0000-0003-4346-7877","observed_orcids":["https://orcid.org/0000-0003-4346-7877"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. M. K. Vandersypen","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-4346-7877","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5006806891","display_name":"James S. Clarke","orcid":"https://orcid.org/0000-0002-7917-0998","observed_orcids":["https://orcid.org/0000-0002-7917-0998"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"James S. Clarke","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-7917-0998","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2018","issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10682","display_name":"Quantum Computing Algorithms and Architecture","score":0.24060000479221344,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10682","display_name":"Quantum Computing Algorithms and Architecture","score":0.24060000479221344,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10382","display_name":"Quantum and electron transport phenomena","score":0.163100004196167,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10020","display_name":"Quantum Information and Cryptography","score":0.11010000109672546,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/qubit-fabrication","display_name":"qubit fabrication","score":0.8569999933242798},{"id":"https://openalex.org/keywords/semiconductor-quantum-devices","display_name":"semiconductor quantum devices","score":0.5920000076293945},{"id":"https://openalex.org/keywords/nanofabrication","display_name":"nanofabrication","score":0.675000011920929},{"id":"https://openalex.org/keywords/quantum-computing","display_name":"quantum computing","score":0.3799999952316284}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6054712533950806},{"id":"https://openalex.org/C203087015","wikidata":"https://www.wikidata.org/wiki/Q378201","display_name":"Qubit","level":3,"score":0.5912607312202454},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5430116653442383},{"id":"https://openalex.org/C198352243","wikidata":"https://www.wikidata.org/wiki/Q37105","display_name":"Line (geometry)","level":2,"score":0.5024049282073975},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.349642276763916},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3221077024936676},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3017657995223999},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.28762322664260864},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20363593101501465},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.08356931805610657},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07012888789176941},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.06363609433174133},{"id":"https://openalex.org/C84114770","wikidata":"https://www.wikidata.org/wiki/Q46344","display_name":"Quantum","level":2,"score":0.05895125865936279},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.03367882966995239},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2783178614","doi":null,"is_oa":false,"landing_page_url":"https://meetings.aps.org/Meeting/MAR18/Session/C28.9","pdf_url":null,"source":{"id":"https://openalex.org/S2764664775","display_name":"Bulletin of the American Physical Society","issn_l":"0003-0503","issn":["0003-0503"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Bulletin of the American Physical Society","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3132108120","https://openalex.org/W3013449571","https://openalex.org/W3133381175","https://openalex.org/W2782597635","https://openalex.org/W3146562175","https://openalex.org/W1637218268","https://openalex.org/W2795421919","https://openalex.org/W7111725560","https://openalex.org/W2797054127","https://openalex.org/W4390763094"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2018-01-26T00:00:00"}