{"id":"https://openalex.org/W2767539182","doi":"https://doi.org/10.1063/1.4995806","title":"Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm","display_name":"Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm","publication_year":2017,"publication_date":"2017-11-08","ids":{"openalex":"https://openalex.org/W2767539182","doi":"https://doi.org/10.1063/1.4995806","mag":"2767539182"},"language":"en","primary_location":{"id":"doi:10.1063/1.4995806","doi":"https://doi.org/10.1063/1.4995806","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4995806","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005956406","display_name":"Shang-qi Kuang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I106645853","display_name":"Changchun University of Science and Technology","ror":"https://ror.org/007mntk44","country_code":"CN","type":"education","lineage":["https://openalex.org/I106645853"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shang-qi Kuang","raw_affiliation_strings":["School of Science, Changchun University of Science and Technology 1 , Changchun 130022, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Science, Changchun University of Science and Technology 1 , Changchun 130022, China","institution_ids":["https://openalex.org/I106645853"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004738538","display_name":"Xuepeng Gong","orcid":"https://orcid.org/0000-0002-9761-605X","observed_orcids":["https://orcid.org/0000-0002-9761-605X"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210088164","display_name":"Changchun Institute of Optics, Fine Mechanics and Physics","ror":"https://ror.org/012rct222","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]},{"id":"https://openalex.org/I4391767908","display_name":"State Key Laboratory of Applied Optics","ror":"https://ror.org/01ckt9009","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164","https://openalex.org/I4391767908"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xue-peng Gong","raw_affiliation_strings":["State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 2 , Changchun 130033, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 2 , Changchun 130033, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210088164","https://openalex.org/I4391767908"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111698654","display_name":"Haigui Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210088164","display_name":"Changchun Institute of Optics, Fine Mechanics and Physics","ror":"https://ror.org/012rct222","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-gui Yang","raw_affiliation_strings":["Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 3 , Changchun 130033, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 3 , Changchun 130033, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":0.1365,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.45803489,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"122","issue":"18","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.4943999946117401,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.4943999946117401,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11183","display_name":"Advanced X-ray Imaging Techniques","score":0.09189999848604202,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.05660000070929527,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/periodic-multilayers","display_name":"periodic multilayers","score":0.8539999723434448},{"id":"https://openalex.org/keywords/mo-si-multilayers","display_name":"Mo/Si multilayers","score":0.8980000019073486},{"id":"https://openalex.org/keywords/multi-objective-evolutionary-algorithms","display_name":"multi-objective evolutionary algorithms","score":0.8429999947547913},{"id":"https://openalex.org/keywords/levenberg-marquardt-algorithm","display_name":"Levenberg-Marquardt algorithm","score":0.9679999947547913},{"id":"https://openalex.org/keywords/grazing-incidence-x-ray-reflectivity","display_name":"grazing incidence X-ray reflectivity","score":0.9750000238418579},{"id":"https://openalex.org/keywords/layer-thickness-measurement","display_name":"layer thickness measurement","score":0.6930000185966492}],"concepts":[{"id":"https://openalex.org/C146024833","wikidata":"https://www.wikidata.org/wiki/Q1385457","display_name":"Extreme ultraviolet","level":3,"score":0.8692198395729065},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.6299644708633423},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.617033839225769},{"id":"https://openalex.org/C61511704","wikidata":"https://www.wikidata.org/wiki/Q1671857","display_name":"Incidence (geometry)","level":2,"score":0.5485792756080627},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.5007717609405518},{"id":"https://openalex.org/C159149176","wikidata":"https://www.wikidata.org/wiki/Q14489129","display_name":"Evolutionary algorithm","level":2,"score":0.47722628712654114},{"id":"https://openalex.org/C108597893","wikidata":"https://www.wikidata.org/wiki/Q663650","display_name":"Reflectivity","level":2,"score":0.4749588966369629},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43075549602508545},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37829673290252686},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.33267128467559814},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.25308722257614136},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.10859441757202148},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.4995806","doi":"https://doi.org/10.1063/1.4995806","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4995806","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G4633722668","display_name":null,"funder_award_id":"61405189","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W225560312","https://openalex.org/W1976562583","https://openalex.org/W1984640325","https://openalex.org/W1987537947","https://openalex.org/W1997709645","https://openalex.org/W2005989148","https://openalex.org/W2019719096","https://openalex.org/W2020864820","https://openalex.org/W2021590641","https://openalex.org/W2026625666","https://openalex.org/W2032514945","https://openalex.org/W2032771854","https://openalex.org/W2043171022","https://openalex.org/W2052744466","https://openalex.org/W2055115481","https://openalex.org/W2061891129","https://openalex.org/W2068832839","https://openalex.org/W2087599743","https://openalex.org/W2097082366","https://openalex.org/W2126105956","https://openalex.org/W2550989815","https://openalex.org/W3195276900"],"related_works":["https://openalex.org/W1987537947","https://openalex.org/W4234822976","https://openalex.org/W2963995590","https://openalex.org/W2523476989","https://openalex.org/W2558050128","https://openalex.org/W2771035169","https://openalex.org/W1976562583","https://openalex.org/W3004250259","https://openalex.org/W2759448249","https://openalex.org/W4302805163"],"abstract_inverted_index":{"In":[0,41],"order":[1],"to":[2,25,66,80],"refine":[3],"the":[4,19,27,34,44,57,101],"layered":[5,102],"structure":[6,103],"of":[7,60,64,75,86,104,110],"extreme":[8,37],"ultraviolet":[9,38],"multilayers,":[10],"a":[11,82,99,108],"multi-objective":[12],"evolutionary":[13],"algorithm":[14,22],"which":[15,89],"is":[16,23,78,114],"post-hybridized":[17],"with":[18,107],"standard":[20],"Levenberg-Marquardt":[21],"applied":[24],"analyze":[26],"grazing":[28],"incidence":[29,36],"X-ray":[30],"reflectivity":[31],"(GIXR)":[32],"and":[33,47,56,69,95],"normal":[35],"reflectance":[39],"(EUVR).":[40],"this":[42],"procedure,":[43],"GIXR":[45,94],"data":[46,49,65],"EUVR":[48,96],"are":[50,71],"simultaneously":[51,91],"fitted":[52],"as":[53],"two":[54,62],"objectives,":[55],"high":[58],"sensitivities":[59],"these":[61],"sets":[63],"layer":[67],"thicknesses":[68],"densities":[70],"combined.":[72],"This":[73],"set":[74],"mathematical":[76],"procedures":[77],"conducive":[79],"obtain":[81],"more":[83],"correct":[84],"model":[85],"periodic":[87],"multilayers":[88,106],"can":[90],"describe":[92],"both":[93],"measurements.":[97],"As":[98],"result,":[100],"Mo/Si":[105],"period":[109],"about":[111],"7.0":[112],"nm":[113],"obtained.":[115]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2017-11-17T00:00:00"}