{"id":"https://openalex.org/W2750100178","doi":null,"title":"\u5148\u9032\u76f8\u4e92\u63a5\u7d9a\u306e\u305f\u3081\u306e\u591a\u5c64\u30b0\u30e9\u30d5\u30a7\u30f3\u306e\u8a55\u4fa1\u3010Powered by NICT\u3011","display_name":"\u5148\u9032\u76f8\u4e92\u63a5\u7d9a\u306e\u305f\u3081\u306e\u591a\u5c64\u30b0\u30e9\u30d5\u30a7\u30f3\u306e\u8a55\u4fa1\u3010Powered by NICT\u3011","publication_year":2017,"publication_date":"2017-01-01","ids":{"openalex":"https://openalex.org/W2750100178","mag":"2750100178"},"language":"ja","primary_location":{"id":"mag:2750100178","doi":null,"is_oa":false,"landing_page_url":"http://jglobal.jst.go.jp/public/20090422/201702237439832330","pdf_url":null,"source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Microelectronic Engineering","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038988178","display_name":"Politou Maria","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Politou Maria","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101121672","display_name":"Wu Xiangyu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Wu Xiangyu","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029810556","display_name":"Inge Asselberghs","orcid":"https://orcid.org/0000-0001-8371-3222","observed_orcids":["https://orcid.org/0000-0001-8371-3222"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Asselberghs Inge","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075698809","display_name":"Antonino Contino","orcid":"https://orcid.org/0000-0002-5641-0426","observed_orcids":["https://orcid.org/0000-0002-5641-0426"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Contino Antonino","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026699748","display_name":"Bart Sor\u00e9e","orcid":"https://orcid.org/0000-0002-4157-1956","observed_orcids":["https://orcid.org/0000-0002-4157-1956"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Soree Bart","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043612766","display_name":"Iuliana P. Radu","orcid":"https://orcid.org/0000-0002-7230-7218","observed_orcids":["https://orcid.org/0000-0002-7230-7218"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Radu Iuliana","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029477844","display_name":"Cedric Huyghebaert","orcid":"https://orcid.org/0000-0001-6043-7130","observed_orcids":["https://orcid.org/0000-0001-6043-7130"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Cedric Huyghebaert","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-6043-7130","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083194625","display_name":"Zsolt T\u00f6kei","orcid":"https://orcid.org/0000-0003-3545-3424","observed_orcids":["https://orcid.org/0000-0003-3545-3424"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zsolt T\u0151kei","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-3545-3424","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058741450","display_name":"De Gendt Stefan","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"De Gendt Stefan","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5112307569","display_name":"Heyns Marc","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Heyns Marc","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2860,"currency":"USD","value_usd":2860},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"167","issue":null,"first_page":"5","last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.3666999936103821,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.3666999936103821,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.32350000739097595,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.10360000282526016,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multilayer-graphene","display_name":"multilayer graphene","score":0.9919999837875366},{"id":"https://openalex.org/keywords/interconnects","display_name":"interconnects","score":0.7570000290870667},{"id":"https://openalex.org/keywords/graphene-electronics","display_name":"graphene electronics","score":0.41600000858306885}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.29598134756088257}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2750100178","doi":null,"is_oa":false,"landing_page_url":"http://jglobal.jst.go.jp/public/20090422/201702237439832330","pdf_url":null,"source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Microelectronic Engineering","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2735882960","https://openalex.org/W2590666701","https://openalex.org/W2616353956","https://openalex.org/W2788741010","https://openalex.org/W2611527171","https://openalex.org/W2618821971","https://openalex.org/W7139574682","https://openalex.org/W634357388","https://openalex.org/W7139451115","https://openalex.org/W2744298003"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2017-08-31T00:00:00"}