{"id":"https://openalex.org/W2728056267","doi":"https://doi.org/10.12693/aphyspola.131.1419","title":"Effect of Reactor Pressure on Electrical and Structural Properties of Diamond Films Grown by Hot-Filament CVD","display_name":"Effect of Reactor Pressure on Electrical and Structural Properties of Diamond Films Grown by Hot-Filament CVD","publication_year":2017,"publication_date":"2017-06-01","ids":{"openalex":"https://openalex.org/W2728056267","doi":"https://doi.org/10.12693/aphyspola.131.1419","mag":"2728056267"},"language":"en","primary_location":{"id":"doi:10.12693/aphyspola.131.1419","doi":"https://doi.org/10.12693/aphyspola.131.1419","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.131.1419","pdf_url":"https://doi.org/10.12693/aphyspola.131.1419","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://doi.org/10.12693/aphyspola.131.1419","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101925532","display_name":"Mahtab Ullah","orcid":"https://orcid.org/0000-0002-5692-8591","observed_orcids":["https://orcid.org/0000-0002-5692-8591"]},"institutions":[{"id":"https://openalex.org/I127670440","display_name":"Bahauddin Zakariya University","ror":"https://ror.org/05x817c41","country_code":"PK","type":"education","lineage":["https://openalex.org/I127670440"]},{"id":"https://openalex.org/I194348271","display_name":"Government College University, Faisalabad","ror":"https://ror.org/051zgra59","country_code":"PK","type":"education","lineage":["https://openalex.org/I194348271"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"M. Ullah","raw_affiliation_strings":["Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan","present address: Department of Physics, G.C. University Faisalabad Layyah Campus, Layyah, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan","institution_ids":["https://openalex.org/I127670440"]},{"raw_affiliation_string":"present address: Department of Physics, G.C. University Faisalabad Layyah Campus, Layyah, Pakistan","institution_ids":["https://openalex.org/I194348271"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084085087","display_name":"Ejaz Ahmed","orcid":"https://orcid.org/0000-0002-3676-2950","observed_orcids":["https://orcid.org/0000-0002-3676-2950"]},"institutions":[{"id":"https://openalex.org/I127670440","display_name":"Bahauddin Zakariya University","ror":"https://ror.org/05x817c41","country_code":"PK","type":"education","lineage":["https://openalex.org/I127670440"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"E. Ahmed","raw_affiliation_strings":["Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan","institution_ids":["https://openalex.org/I127670440"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033511540","display_name":"Anwar Manzoor Rana","orcid":"https://orcid.org/0000-0003-1246-5799","observed_orcids":["https://orcid.org/0000-0003-1246-5799"]},"institutions":[{"id":"https://openalex.org/I127670440","display_name":"Bahauddin Zakariya University","ror":"https://ror.org/05x817c41","country_code":"PK","type":"education","lineage":["https://openalex.org/I127670440"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"A.M. Rana","raw_affiliation_strings":["Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Bahauddin Zakariya University, Multan-60800, Pakistan","institution_ids":["https://openalex.org/I127670440"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.05987439,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"131","issue":"6","first_page":"1419","last_page":"1425"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polycrystalline-diamond-films","display_name":"polycrystalline diamond films","score":0.9959999918937683},{"id":"https://openalex.org/keywords/reactor-pressure","display_name":"reactor pressure","score":0.8069999814033508},{"id":"https://openalex.org/keywords/hot-filament-chemical-vapor-deposition","display_name":"hot filament chemical vapor deposition","score":0.9779999852180481},{"id":"https://openalex.org/keywords/111-facets","display_name":"(111) facets","score":0.5759999752044678},{"id":"https://openalex.org/keywords/electrical-resistivity","display_name":"electrical resistivity","score":0.7300000190734863},{"id":"https://openalex.org/keywords/growth-rate-crystal-and-thin-film-growth","display_name":"growth rate (crystal and thin-film growth)","score":0.6620000004768372},{"id":"https://openalex.org/keywords/grain-size","display_name":"grain size","score":0.7229999899864197},{"id":"https://openalex.org/keywords/nucleation","display_name":"nucleation","score":0.7350000143051147},{"id":"https://openalex.org/keywords/surface-morphology","display_name":"surface morphology","score":0.9139999747276306},{"id":"https://openalex.org/keywords/sp3-bonding","display_name":"sp3 bonding","score":0.871999979019165},{"id":"https://openalex.org/keywords/semiconducting-diamond","display_name":"diamond semiconductors","score":0.6330000162124634}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7829781770706177},{"id":"https://openalex.org/C14228908","wikidata":"https://www.wikidata.org/wiki/Q2920483","display_name":"Protein filament","level":2,"score":0.7122659683227539},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.6697827577590942},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5031847357749939},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.414700448513031},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.24134790897369385}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.12693/aphyspola.131.1419","doi":"https://doi.org/10.12693/aphyspola.131.1419","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.131.1419","pdf_url":"https://doi.org/10.12693/aphyspola.131.1419","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.12693/aphyspola.131.1419","doi":"https://doi.org/10.12693/aphyspola.131.1419","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.131.1419","pdf_url":"https://doi.org/10.12693/aphyspola.131.1419","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2728056267.pdf","grobid_xml":"https://content.openalex.org/works/W2728056267.grobid-xml"},"referenced_works_count":35,"referenced_works":["https://openalex.org/W1970598385","https://openalex.org/W1983215360","https://openalex.org/W1986116204","https://openalex.org/W1987213990","https://openalex.org/W1993893910","https://openalex.org/W1994123289","https://openalex.org/W1994904389","https://openalex.org/W1997062321","https://openalex.org/W2001272501","https://openalex.org/W2009125144","https://openalex.org/W2009606244","https://openalex.org/W2010992271","https://openalex.org/W2014627821","https://openalex.org/W2023706445","https://openalex.org/W2028545865","https://openalex.org/W2034803453","https://openalex.org/W2037749032","https://openalex.org/W2038075025","https://openalex.org/W2042752853","https://openalex.org/W2048086263","https://openalex.org/W2049091567","https://openalex.org/W2049684656","https://openalex.org/W2055025759","https://openalex.org/W2067686743","https://openalex.org/W2068164751","https://openalex.org/W2074886869","https://openalex.org/W2082498530","https://openalex.org/W2083965462","https://openalex.org/W2084558008","https://openalex.org/W2090739622","https://openalex.org/W2092074299","https://openalex.org/W2096610102","https://openalex.org/W2153905209","https://openalex.org/W2154630356","https://openalex.org/W2164028723"],"related_works":["https://openalex.org/W2012200677","https://openalex.org/W2067686743","https://openalex.org/W3099948395","https://openalex.org/W1991190807","https://openalex.org/W7153085031","https://openalex.org/W1986922211","https://openalex.org/W1983099051","https://openalex.org/W2390881387","https://openalex.org/W1903703136","https://openalex.org/W1994123289"],"abstract_inverted_index":{"Polycrystalline":[0],"diamond":[1,42,50,78,179],"films":[2,180],"with":[3,85,100,120],"preferred":[4],"(111)":[5,86],"and":[6,51,65,106,172],"(":[7],"222)":[8],"facets":[9],"were":[10,54],"fabricated":[11],"inside":[12],"hot":[13],"filament":[14],"chemical":[15],"vapour":[16],"deposition":[17],"reactor":[18,32],"on":[19],"silicon":[20],"wafers":[21],"using":[22,56],"a":[23,142],"mixture":[24],"of":[25,41,49,72,139,168,176],"1%":[26],"methane":[27],"in":[28,82,112,155,163,186],"hydrogen":[29],"at":[30,124,144],"various":[31],"pressures":[33,126],"ranging":[34],"from":[35],"10":[36,147],"to":[37,98,103],"50":[38],"mbar.Regarding":[39],"characterization":[40],"films,":[43],"internal":[44],"texture,":[45],"surface":[46,165],"morphology,":[47,166],"quality":[48],"electrical":[52,133,184],"conductivity":[53],"investigated":[55],"X-ray":[57],"diffraction,":[58],"scanning":[59],"electron":[60],"microscopy,":[61],"the":[62,156],"Raman":[63],"spectroscopy":[64],"four-point-probe":[66],"van":[67],"der":[68],"Pauw":[69],"techniques,":[70],"respectively.Results":[71],"these":[73],"studies":[74],"demonstrate":[75],"that":[76],"polycrystalline":[77],"structure":[79],"is":[80,114,118],"grown":[81],"random":[83],"orientation":[84],"facet":[87],"being":[88],"dominant":[89],"showing":[90,141],"sharp":[91],"grain":[92,116],"boundaries.Moreover,":[93],"growth":[94,161],"rate":[95],"was":[96,153],"found":[97],"increase":[99],"pressure":[101,152,158],"up":[102],"20":[104],"mbar":[105],"then":[107],"decreased":[108,135],"for":[109,182],"further":[110],"rise":[111],"pressure.That":[113],"why":[115],"density":[117],"high":[119],"relatively":[121],"smaller":[122],"grains":[123],"higher":[125,129],"caused":[127],"by":[128],"nucleation":[130],"rates.In":[131],"contrast,":[132],"resistivity":[134,177],"\u2248":[136],"3":[137,170],"orders":[138],"magnitude":[140],"minimum":[143],"2.9":[145],"\u00d7":[146],"6":[148],"\u2126":[149],"cm":[150],"as":[151],"increased":[154],"reactor.Reactor":[157],"during":[159],"film":[160],"resulted":[162],"poor":[164],"absence":[167],"sp":[169],"bonds":[171],"low":[173],"resistivity.Hence,":[174],"decrease":[175],"makes":[178],"desirable":[181],"many":[183],"applications":[185],"semiconducting/electronic":[187],"devices.":[188]},"counts_by_year":[],"updated_date":"2026-10-03T13:16:28.481748","created_date":"2017-07-14T00:00:00"}